parent
27d80346ec
commit
ff06999e1b
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@ -47,6 +47,8 @@ namespace SicModules.TMs.Routines.Base
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protected bool IsTrayLoad => _ioLoadRotation.IsMoveDone;
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protected bool IsLoadRotationHome => _ioLoadRotation.IsServeHomeDone;
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protected IoLift4 UnLoadLift
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{
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get { return _unLoadLift; }
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@ -202,13 +202,13 @@ namespace SicModules.TMs.Routines
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if (LLTrayClaw.IsClamp)
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{
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EV.PostWarningLog(Module, $"Can not place, Load is clamp!");
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EV.PostWarningLog(Module, $"Can not pick, Load is clamp!");
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return Result.FAIL;
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}
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if (!IsTrayLoad)
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{
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EV.PostWarningLog(Module, $"Can not place, tray is not at load angle !");
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EV.PostWarningLog(Module, $"Can not pick,Load tray is not at load angle !");
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return Result.FAIL;
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}
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}
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@ -216,7 +216,7 @@ namespace SicModules.TMs.Routines
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{
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if (!UnLoadLift.IsDown)
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{
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EV.PostWarningLog(Module, $"Can not place, UnLoad Lift must in down Position!");
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EV.PostWarningLog(Module, $"Can not pick, UnLoad Lift must in down Position!");
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return Result.FAIL;
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}
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}
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@ -293,7 +293,7 @@ namespace SicModules.TMs.Routines
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SetRobotExtendToDO((int)RoutineStep.SetRobortExtendToDo, _target, 2);
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CheckRobotReady((int)RoutineStep.CheckRobotReady, RobotDevice, _pickTimeout);
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if (_target == ModuleName.Load || _target == ModuleName.LoadLock)//放Load前打开夹爪
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if (_target == ModuleName.Load || _target == ModuleName.LoadLock)//取Load前打开夹爪
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{
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ExecuteRoutine((int)RoutineStep.TrayUnClamp1, _trayUnClamp); //夹爪打开
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}
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@ -191,14 +191,23 @@ namespace SicModules.TMs.Routines
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// }
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//}
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//Place之前先,根据Sensor检测是否有盘
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if (!SC.GetValue<bool>("System.IsSimulatorMode"))
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{
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if ((_target ==ModuleName.LoadLock || _target == ModuleName.Load) && SensorLLTrayPresence.Value)
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if ((_target ==ModuleName.LoadLock || _target == ModuleName.Load) )
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{
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EV.PostWarningLog(Module, $"Can not place, LLTrayPresence sensor has tray");
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return Result.FAIL;
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if (SensorLLTrayPresence.Value)
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{
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EV.PostWarningLog(Module, $"Can not place, LLTrayPresence sensor has tray");
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return Result.FAIL;
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}
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if (!IsLoadRotationHome)
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{
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EV.PostWarningLog(Module, $"Can not place,Load rotation is not at home !");
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return Result.FAIL;
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}
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}
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//if (_target == ModuleName.UnLoad && SensorUnloadWaferPresence.Value)
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//{
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@ -271,7 +280,7 @@ namespace SicModules.TMs.Routines
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CheckRobotReady((int)RoutineStep.CheckRobotReady, RobotDevice, _placeTimeout);
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if (_target == ModuleName.Load || _target == ModuleName.LoadLock)//放Load前打开夹爪
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if (_target == ModuleName.Load || _target == ModuleName.LoadLock)//放Load前操作
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{
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ExecuteRoutine((int)RoutineStep.TrayUnClamp1, _trayUnClamp); //夹爪打开
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}
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@ -1102,20 +1102,20 @@
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<config default="1" name="PT10_K" description="PT10 K值" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
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</configs>
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<configs name="WaterTemp">
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<config default="0" name="U1_Water" description="SHFlow" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
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<config default="0" name="U2_Water" description="ChamTopFlow" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
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<config default="0" name="U3_Water" description="ChamMiddleFlow1" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
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<config default="0" name="U4_Water" description="ChamMiddleFlow2" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
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<config default="0" name="U5_Water" description="ChamBottomFlow" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
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<config default="0" name="U6_Water" description="Foreline1.Flow" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
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<config default="0" name="U7_Water" description="PowerRod1Flow" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
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<config default="0" name="U8_Water" description="PowerRod2Flow" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
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<config default="0" name="U9_Water" description="Foreline2.Flow" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
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<config default="0" name="U10_Water" description="Electrode-W.Flow" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
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<config default="0" name="U11_Water" description="TMPump1Flow" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
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<config default="0" name="U12_Water" description="Spare1" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
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<config default="0" name="U13_Water" description="Spare2" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
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<config default="0" name="U14_Water" description="TransformerFlow" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
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<config default="0" name="U1_Water" description="ChamMiddleFlow1Temp" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
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<config default="0" name="U2_Water" description="SHFlow1Temp" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
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<config default="0" name="U3_Water" description="SHFlow2Temp" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
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<config default="0" name="U4_Water" description="ChamTopFlowTemp" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
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<config default="0" name="U5_Water" description="ChamFlowTemp" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
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<config default="0" name="U6_Water" description="ChamBottomFlowTemp" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
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<config default="0" name="U7_Water" description="ForlineFlowTemp" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
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<config default="0" name="U8_Water" description="PowerRod1FlowTemp" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
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<config default="0" name="U9_Water" description="PowerRod2FlowTemp" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
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<config default="0" name="U10_Water" description="ElectrodeWFlowTemp" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
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<config default="0" name="U11_Water" description="TransformerFlowTemp" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
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<config default="0" name="U12_Water" description="PMpumpFlowTemp" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
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<config default="0" name="U13_Water" description="PSUFlowTemp" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
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<config default="0" name="U14_Water" description="TMPump1FlowTemp" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
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</configs>
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<configs name="LineHeaterTemp">
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<config default="0" name="加热带温区1" description="HeatTMAHigh 温度上限,设为0忽略报警" max="100" min="0" paramter="" tag="" unit="℃" type="Double" />
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@ -51,5 +51,5 @@ using System.Windows;
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// 可以指定所有值,也可以使用以下所示的 "*" 预置版本号和修订号
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// 方法是按如下所示使用“*”: :
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[assembly: AssemblyVersion("1.0.1.40726")]
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[assembly: AssemblyVersion("1.0.1.40729")]
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[assembly: AssemblyInformationalVersion("Sic多片机(无EFEM)")]
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@ -54,5 +54,5 @@ using System.Windows;
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// You can specify all the values or you can default the Build and Revision Numbers
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// by using the '*' as shown below:
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[assembly: AssemblyVersion("1.0.1.40726")]
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[assembly: AssemblyVersion("1.0.1.40729")]
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[assembly: AssemblyInformationalVersion("Sic多片机(无EFEM)")]
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