Han Qiang Qiang
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1f814517bf
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删除PM2多余Interlock配置项
更新版本号至## Version 1.1.1.2
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2023-11-17 20:51:03 +08:00 |
Liang Su
|
c6bcaeeb34
|
修正Recipe中的C3H8设置项识别错误,全部默认到Purge的问题。
版本号更新至v1.1.1.1
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2023-11-17 14:13:53 +08:00 |
HCL
|
76664e49c3
|
1.启用Cassette下降沿信号删除Wafer信息功能
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2023-11-15 14:41:55 +08:00 |
Han Qiang Qiang
|
b70314fedd
|
1添加机械手真空
2还原PM DI-6 InterLock
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2023-11-15 13:23:35 +08:00 |
Han Qiang Qiang
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3c6d04a34e
|
删除PM DI6 Interlock
|
2023-11-15 09:32:24 +08:00 |
Han Qiang Qiang
|
268c0fd369
|
修改Recipe C2H4-> UnitName
|
2023-11-14 15:42:09 +08:00 |
Han Qiang Qiang
|
cf50e26d9b
|
删除PM2 DI-33门报警Interlock
修改LineHeat配置SC名称
|
2023-11-14 14:29:33 +08:00 |
Han Qiang Qiang
|
307e9a3ed7
|
修改气体流量C2H4配置
修改SC对应的气体流量配置
删除DI-33门报警InterLock
|
2023-11-14 14:03:18 +08:00 |
Han Qiang Qiang
|
9c3e075a8b
|
C2H4修改为C3H8
|
2023-11-14 10:43:36 +08:00 |
Han Qiang Qiang
|
bbda00b198
|
1.修改C2H4名称->C3H8
2.IO名称(DI-19,DI 188 189 190 ,AO 211 212 )
3.显示DO43
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2023-11-14 10:14:26 +08:00 |
HCL
|
81bd96391a
|
1.修改Purge中Vent超时时间
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2023-11-06 13:37:35 +08:00 |
Han Qiang Qiang
|
3e66bf4e21
|
修改TM vent超时问题,由于Routine流程中不区分慢充超时和快充超时,因此统一系统配置参数超时时间VentTimeout
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2023-11-06 11:23:12 +08:00 |
Han Qiang Qiang
|
a5936c017e
|
1修改加热带配置名称,
2添加启动前检测LineHeater
3添加气柜温度显示
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2023-11-06 11:07:48 +08:00 |
Han Qiang Qiang
|
c24b7db2bb
|
更新dll [007352e],修改气柜检测
添加SC配置
修改PM的Device配置
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2023-11-03 12:33:09 +08:00 |
HCL
|
8d89c35b5a
|
1.修改ROR M11配置文件的错误
2.ROR时间间隔和基础压力可统一设置
|
2023-10-31 14:20:48 +08:00 |
HCL
|
1bb1fd34d6
|
1.修改Clean流程
|
2023-10-31 08:57:02 +08:00 |
Han Qiang Qiang
|
cd3abbd3c3
|
修改PMIO报警
|
2023-10-26 14:46:35 +08:00 |
Han Qiang Qiang
|
27f6b53a3d
|
删除无用的AE监控项
|
2023-10-26 10:14:48 +08:00 |
Han Qiang Qiang
|
4a688d93fe
|
删除DI-29
|
2023-10-26 09:04:30 +08:00 |
Han Qiang Qiang
|
175495e086
|
Merge branch 'feature/PM1的IO报警配置移植到PM2中' into develop
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2023-10-25 17:59:39 +08:00 |
Han Qiang Qiang
|
c466b3c4ae
|
1根据PM1的IO报警信息配置PM2配置
2修改PM2水温报警,
3修改PM2水温报警配置名称
|
2023-10-25 17:59:10 +08:00 |
Liang Su
|
8302cccaa1
|
更新库文件094abb3,修正Recipe保存的一些问题。
修正SicRT\Toolloader中IoManager对象的加载顺序,移至末尾加载,以避免IoManager中启动了InterlockManager,但InterlockManager使用的数据还未在DATA中注册,导致Poll数据失败的问题。
|
2023-10-25 16:46:33 +08:00 |
HCL
|
e29b70233c
|
1.解决MFC ROR测试重做上次MFC ROR流程的问题
|
2023-10-25 08:53:01 +08:00 |
HCL
|
fe8c96316a
|
1.自动设备增加inch类型参数选项
|
2023-10-24 15:29:21 +08:00 |
HCL
|
b701df3337
|
1.优化Purge和Vent可能出现的问题
|
2023-10-24 09:58:50 +08:00 |
HCL
|
2ee8555705
|
1.修改TM Purge和Vent逻辑,在Vent最终压力的过程中检测是否开启快充流量
|
2023-10-24 09:50:54 +08:00 |
SIC1016\caipeilun
|
6b3d985945
|
Merge branch 'develop' of http://118.31.5.210:65000/Sic-Software/Sic08 into develop_configChangedV2
# Conflicts:
# SicRT/Properties/AssemblyInfo.cs
# SicUI/Properties/AssemblyInfo.cs
# ThirdParty/MECF.Framework/MECF.Framework.Common.dll
# ThirdParty/MECF.Framework/MECF.Framework.RT.Core.dll
# ThirdParty/MECF.Framework/MECF.Framework.RT.EquipmentLibrary.dll
# ThirdParty/MECF.Framework/MECF.Framework.Simulator.Core.dll
# ThirdParty/MECF.Framework/MECF.Framework.UI.Client.dll
# ThirdParty/MECF.Framework/MECF.Framework.UI.Core.dll
|
2023-10-20 16:32:28 +08:00 |
HCL
|
d19fed6c29
|
Recipe中取消Pyro选项
|
2023-10-19 08:33:55 +08:00 |
SIC1016\caipeilun
|
bd60f6edcc
|
删除错误复制
|
2023-10-18 15:29:14 +08:00 |
Han Qiang Qiang
|
157dde3317
|
删除PM Interlock配置的DI-29
|
2023-10-18 13:27:01 +08:00 |
HCL
|
2e4e67fff6
|
1.PM K阀组增加V111控制
|
2023-10-18 11:46:15 +08:00 |
SIC1016\caipeilun
|
6bf63d4b06
|
优化: TM开闸板阀时腔体压力直接使用PT1的Feedback,不另外建立IoPressureMeter3s
*错误:TM使用IoPressureMeter3s类,DATA会注册PM1.ChamberPressure.Value,树状图会覆盖掉PM1.ChamberPressure,从而数值不正确
|
2023-10-12 17:28:57 +08:00 |
SIC1016\caipeilun
|
9019666f02
|
修复 TM purge时 vent延时绑定错误
|
2023-10-10 09:05:59 +08:00 |
SIC1016\caipeilun
|
3f3f66eced
|
修复:
TM purge时 vent延时绑定错误
|
2023-10-09 17:33:31 +08:00 |
SIC1016\caipeilun
|
611d7b771b
|
Merge branch 'develop_InterlockV1.3' into develop_configChangedV2
|
2023-10-07 13:38:35 +08:00 |
SIC1016\caipeilun
|
dbda23b2ba
|
修复Interlock项: do-100 和 do-49触发前 di-9 必须为0
|
2023-10-07 13:38:03 +08:00 |
SIC1016\caipeilun
|
4d3b740167
|
Merge branch 'develop' of http://118.31.5.210:65000/Sic-Software/Sic08 into develop_InterlockV1.3
|
2023-10-07 13:31:13 +08:00 |
SIC1016\caipeilun
|
fb96e5de9f
|
修复 EFEM SlitValueRoutine 触发时提示文本缺失名称
|
2023-10-07 13:23:58 +08:00 |
SIC1016\caipeilun
|
fce4967a57
|
更新多用户登录机制:
同时只允许一个用户登录操作A;
多个用户B登录时,有权限用户A将进行确认,若确认后操作权限转移到B,A变成ReadOnly模式,仅有只读权限;
目前ReadOnly模式禁用鼠标键盘功能,只能切换页面,无法操控页面内功能(滚动条、Log等无法点击查看)
|
2023-10-06 09:50:11 +08:00 |
SIC1016\caipeilun
|
c18ffff29d
|
修改 新增的data项 数据库不保存
删除多余代码
版本更新23.9.28.2
|
2023-10-03 09:08:02 +08:00 |
SIC1016\caipeilun
|
d4a2d4b252
|
修改TM的interlock DO-47 48 17 8 10 12 14 16
要求压差小于50
|
2023-09-28 14:38:55 +08:00 |
SIC1016\caipeilun
|
b8e3b8c030
|
Merge branch '_Bypass_InterLock_ReEdit' into develop
# Conflicts:
# SicRT/Properties/AssemblyInfo.cs
# SicRT/ReleaseNotes.md
# SicUI/Properties/AssemblyInfo.cs
# ThirdParty/MECF.Framework/MECF.Framework.Common.dll
# ThirdParty/MECF.Framework/MECF.Framework.RT.Core.dll
# ThirdParty/MECF.Framework/MECF.Framework.RT.EquipmentLibrary.dll
# ThirdParty/MECF.Framework/MECF.Framework.Simulator.Core.dll
# ThirdParty/MECF.Framework/MECF.Framework.UI.Client.dll
# ThirdParty/MECF.Framework/MECF.Framework.UI.Core.dll
# ThirdParty/MECF.Framework/Sicentury.Core.dll
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2023-09-25 15:23:25 +08:00 |
SIC1016\caipeilun
|
aae3721283
|
1.PM2同步修改V75V76和V72TVInterlock
2.删除PM DI0和DI7 (DO2、40、41、54、112-119、111的互锁 (为了开腔维护时间可以吹扫)
|
2023-09-25 15:15:58 +08:00 |
SIC1016\caipeilun
|
ca98256710
|
删除PM DI0和DI7 (DO2、40、41、54、112-119、111的互锁 (为了开腔维护时间可以吹扫) => DO-111漏删
|
2023-09-20 15:48:25 +08:00 |
Han Qiang Qiang
|
0e8d46ef76
|
电阻丝加热,当设置为Warning时Log不输出问题修改
|
2023-09-13 09:17:41 +08:00 |
SIC1016\caipeilun
|
76d4a4e83c
|
1.取消v42v56v60Interlock
2.修正V75Interlock
3.修改V46V50Interlock
4.修正TV触发Interlock无信息提示
|
2023-09-08 10:26:47 +08:00 |
HCL
|
3f58922c10
|
1.取消Load Servo压力Pump延时
|
2023-09-06 15:48:27 +08:00 |
SIC1016\caipeilun
|
b7742be1e0
|
新增interlockV75
|
2023-09-04 17:13:31 +08:00 |
SIC1016\caipeilun
|
5517dfc39d
|
同步PM2 interlock --V27强制打开配置在PMModuleDevice中
|
2023-09-04 15:22:09 +08:00 |
SIC1016\caipeilun
|
8d1e0e11d2
|
Interlock新增DO-175
|
2023-09-04 10:52:32 +08:00 |