Han Qiang Qiang
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8fb7a84308
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更新dll [2cdf762],修改MFC5控制流程逻辑
1.PM Device配置中使用库中类实例化MFC5控制流程
2.SC配置中添加参数,是否安装MFC5, PM.{module}.MFC.Mfc5.IsInstalled
3.修改PM主界面显示,根据配置是否显示MFC5
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2023-11-21 17:20:54 +08:00 |
Han Qiang Qiang
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167ed09b97
|
使用日期作为版本号
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2023-11-20 13:25:52 +08:00 |
Han Qiang Qiang
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b77f8f5112
|
Merge branch 'develop' into feature/测温重构
# Conflicts:
# ThirdParty/MECF.Framework/MECF.Framework.Common.dll
# ThirdParty/MECF.Framework/MECF.Framework.RT.Core.dll
# ThirdParty/MECF.Framework/MECF.Framework.RT.EquipmentLibrary.dll
# ThirdParty/MECF.Framework/MECF.Framework.Simulator.Core.dll
# ThirdParty/MECF.Framework/MECF.Framework.UI.Client.dll
# ThirdParty/MECF.Framework/MECF.Framework.UI.Core.dll
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2023-11-20 13:21:57 +08:00 |
Han Qiang Qiang
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80eb027801
|
添加测温配置项
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2023-11-20 13:19:53 +08:00 |
HQQ
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e2dd90b0ca
|
版本号更新至## Version 1.1.1.3
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2023-11-19 12:19:13 +08:00 |
HQQ
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f04658385a
|
添加IoN2HighDoping类,配置气阀控制PN2气体
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2023-11-19 12:17:29 +08:00 |
Han Qiang Qiang
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1f814517bf
|
删除PM2多余Interlock配置项
更新版本号至## Version 1.1.1.2
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2023-11-17 20:51:03 +08:00 |
HCL
|
6bdcb0b68d
|
1.更新Common库
|
2023-11-17 14:29:51 +08:00 |
Liang Su
|
c6bcaeeb34
|
修正Recipe中的C3H8设置项识别错误,全部默认到Purge的问题。
版本号更新至v1.1.1.1
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2023-11-17 14:13:53 +08:00 |
Han Qiang Qiang
|
8c62eed8a8
|
6号机版本号更新至 ## Version 1.1.0.0
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2023-11-16 14:45:27 +08:00 |
Han Qiang Qiang
|
3c7374dfc9
|
更新dll [ed25f36],优化PM右键菜单选项
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2023-11-16 14:34:09 +08:00 |
Han Qiang Qiang
|
55f6602cd9
|
更新dll [bdaa90e],PM腔体添加右键菜单功能
|
2023-11-15 21:38:16 +08:00 |
HCL
|
20fa98e2b8
|
1.AutoTransfer中判断Tray是否从Buffer中传到Load,这时不需要Load Purge
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2023-11-15 15:12:15 +08:00 |
Han Qiang Qiang
|
493a3f6499
|
1更新dll [d2bcfff],上银机械手注册真空开关,夹爪开关控制
2修改按钮界面显示
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2023-11-15 14:57:48 +08:00 |
HCL
|
76664e49c3
|
1.启用Cassette下降沿信号删除Wafer信息功能
|
2023-11-15 14:41:55 +08:00 |
Han Qiang Qiang
|
1e74ce3893
|
修改PM 单向阀额定压力值
|
2023-11-15 14:32:09 +08:00 |
Han Qiang Qiang
|
389e3f377f
|
修改Tray机械手夹爪关闭按钮名称
|
2023-11-15 14:08:33 +08:00 |
Han Qiang Qiang
|
b70314fedd
|
1添加机械手真空
2还原PM DI-6 InterLock
|
2023-11-15 13:23:35 +08:00 |
Han Qiang Qiang
|
3d49ff7cd9
|
Merge branch '修改界面' into Sic8ToSic6
|
2023-11-15 11:36:00 +08:00 |
HCL
|
b34a124194
|
1.解决传盘过程中PM2存在的BUG
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2023-11-15 11:34:23 +08:00 |
Han Qiang Qiang
|
4ba9b6b3e1
|
1修改界面布局
2隐藏Recipe保存到数据库
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2023-11-15 11:25:58 +08:00 |
Han Qiang Qiang
|
3c6d04a34e
|
删除PM DI6 Interlock
|
2023-11-15 09:32:24 +08:00 |
HCL
|
b476a7e6e9
|
1.解决WaferRobot会取3个同PM的Wafer问题
|
2023-11-14 16:27:33 +08:00 |
Han Qiang Qiang
|
268c0fd369
|
修改Recipe C2H4-> UnitName
|
2023-11-14 15:42:09 +08:00 |
Han Qiang Qiang
|
cf50e26d9b
|
删除PM2 DI-33门报警Interlock
修改LineHeat配置SC名称
|
2023-11-14 14:29:33 +08:00 |
Han Qiang Qiang
|
307e9a3ed7
|
修改气体流量C2H4配置
修改SC对应的气体流量配置
删除DI-33门报警InterLock
|
2023-11-14 14:03:18 +08:00 |
Han Qiang Qiang
|
272b0d3174
|
修改Power,SC配置,
|
2023-11-14 11:08:27 +08:00 |
Han Qiang Qiang
|
ddad95686d
|
Merge branch '6-1' into Sic8ToSic6
|
2023-11-14 10:44:58 +08:00 |
Han Qiang Qiang
|
9c3e075a8b
|
C2H4修改为C3H8
|
2023-11-14 10:43:36 +08:00 |
HCL
|
1e2fc7b36f
|
1.增加MFC5控制
|
2023-11-14 10:38:38 +08:00 |
Han Qiang Qiang
|
bbda00b198
|
1.修改C2H4名称->C3H8
2.IO名称(DI-19,DI 188 189 190 ,AO 211 212 )
3.显示DO43
|
2023-11-14 10:14:26 +08:00 |
Han Qiang Qiang
|
45094de4f7
|
更新dll [5ff6400],IoValue类中,添加BypassEnableTable实时生效
|
2023-11-08 11:31:12 +08:00 |
Han Qiang Qiang
|
b324fbd620
|
修改PMHeaterView界面标签名称
|
2023-11-07 15:00:51 +08:00 |
Han Qiang Qiang
|
04803b365f
|
1修改配置注释,修改三铯测温无数据问题(配置名称不一致导致)
|
2023-11-07 14:02:24 +08:00 |
Han Qiang Qiang
|
b2a63a8a61
|
1.修改合并冲突内容
2.IoTC添加存储到数据库配置
3.更新dll, IoTC中添加属性,根据属性值判断是否注册温度数据,优化温度获取条件逻辑顺序
|
2023-11-06 17:26:07 +08:00 |
Han Qiang Qiang
|
078a6cb81a
|
Merge branch 'develop' into feature/测温重构
# Conflicts:
# SicRT/Config/System.sccfg
# SicRT/Instances/ToolLoader.cs
# ThirdParty/MECF.Framework/MECF.Framework.Common.dll
# ThirdParty/MECF.Framework/MECF.Framework.RT.Core.dll
# ThirdParty/MECF.Framework/MECF.Framework.RT.EquipmentLibrary.dll
# ThirdParty/MECF.Framework/MECF.Framework.Simulator.Core.dll
# ThirdParty/MECF.Framework/MECF.Framework.UI.Client.dll
# ThirdParty/MECF.Framework/MECF.Framework.UI.Core.dll
|
2023-11-06 13:43:32 +08:00 |
HCL
|
81bd96391a
|
1.修改Purge中Vent超时时间
|
2023-11-06 13:37:35 +08:00 |
Han Qiang Qiang
|
3e66bf4e21
|
修改TM vent超时问题,由于Routine流程中不区分慢充超时和快充超时,因此统一系统配置参数超时时间VentTimeout
|
2023-11-06 11:23:12 +08:00 |
Han Qiang Qiang
|
a5936c017e
|
1修改加热带配置名称,
2添加启动前检测LineHeater
3添加气柜温度显示
|
2023-11-06 11:07:48 +08:00 |
Han Qiang Qiang
|
815fcaa102
|
修改默认配置项
|
2023-11-06 10:25:02 +08:00 |
Han Qiang Qiang
|
1a434f3a6d
|
版本号更新至## Version 1.1.32.53
|
2023-11-03 12:35:23 +08:00 |
Han Qiang Qiang
|
c24b7db2bb
|
更新dll [007352e],修改气柜检测
添加SC配置
修改PM的Device配置
|
2023-11-03 12:33:09 +08:00 |
Han Qiang Qiang
|
a60ba333de
|
添加三铯测温硬件配置
|
2023-11-02 17:46:31 +08:00 |
Han Qiang Qiang
|
0336cee22e
|
删除旧的测温配置项,配置AE测温类
|
2023-11-02 10:29:28 +08:00 |
HCL
|
6a0ea58574
|
1.修改初始化顺序
|
2023-11-01 17:19:27 +08:00 |
Han Qiang Qiang
|
a84805fa35
|
精简SC中测温对象名称
|
2023-11-01 17:18:43 +08:00 |
Han Qiang Qiang
|
8b74f31cd0
|
修改SC配置的测温参数相关名称
修改Common.xml配置的内容
|
2023-11-01 15:41:48 +08:00 |
Han Qiang Qiang
|
d3389459be
|
添加Common.XML配置文件,用来初始化设备共用硬件
|
2023-11-01 10:49:43 +08:00 |
HCL
|
8d89c35b5a
|
1.修改ROR M11配置文件的错误
2.ROR时间间隔和基础压力可统一设置
|
2023-10-31 14:20:48 +08:00 |
HCL
|
1bb1fd34d6
|
1.修改Clean流程
|
2023-10-31 08:57:02 +08:00 |