Commit Graph

Select branches

Hide Pull Requests

develop

Mono Color

• 7aaf7e38f8 1.PM开腔时关闭V75后延时2s再打开V76阀 develop HCL 2024-10-08 17:06:30 +0800
• f8bae8eea8 1.解决PSU和SCR触发状态反的问题 HCL 2024-09-06 14:44:43 +0800
• aa6e4423d0 1屏蔽温度变化检测 2显示升降温过快报警类型 hanqiangqiang 2024-08-19 17:05:15 +0800
• 7f8a38a705 Ar和H2模式切换时，V65 V64为取反状态 hanqiangqiang 2024-08-12 08:58:16 +0800
• 9ad568814d 加热界面添加温度监控 hanqiangqiang 2024-08-08 13:05:21 +0800
• 7b45da3519 更新dll hanqiangqiang 2024-07-29 17:15:05 +0800
• ff06999e1b 1添加机械手放盘检测，防呆 2更新dll，修改M41 M42流量计算器 3修改水温报警SC配置描述信息 hanqiangqiang 2024-07-29 16:42:52 +0800
• 27d80346ec 修改PM Routine大流量MFC相关内容 hanqiangqiang 2024-07-26 16:19:29 +0800
• d5bd7c95f2 修改PM Routine相关内容 hanqiangqiang 2024-07-26 11:10:35 +0800
• 059bce57a5 更新dll ，MFC设置流量界面，点击OK后自动关闭 hanqiangqiang 2024-07-25 16:26:49 +0800
• 08753d5bae 1 修改SC配置中压力单位 2 Load腔中添加机械手取托盘Tray防呆 3 修改创建和删除tray Wafer对应的逻辑问题修改 hanqiangqiang 2024-07-25 15:59:44 +0800
• 429b402a35 1.TMRobot Pick和Place PM腔时增加停留延时 HCL 2024-07-25 09:56:29 +0800
• dbf3386605 1修改 ProcessIdle结束后磁流体旋转超时修改 2修改V64 默认NC hanqiangqiang 2024-07-24 16:44:40 +0800
• 37bbfea3ea 修改界面，更新版本号 hanqiangqiang 2024-07-24 14:38:01 +0800
• 0e6f51d75d 添加托盘温度 hanqiangqiang 2024-07-24 09:58:28 +0800
• 54ab92d6a6 修改PM Routine相关内容 hanqiangqiang 2024-07-23 16:59:02 +0800
• 8dc0d9634a 修改PM流量统计 hanqiangqiang 2024-07-19 11:15:58 +0800
• cd1de6cfd5 修改Recipe中MFC默认显示 hanqiangqiang 2024-07-19 08:33:01 +0800
• 5ed714934e 更新dll，修改流量计算器 添加Recipe参数配置项 hanqiangqiang 2024-07-17 17:44:17 +0800
• 859ef96382 更新版号 hanqiangqiang 2024-07-17 10:08:33 +0800
• 74093ee0e4 更新dll，修改AKunTriggerTemp仿真无温度问题 hanqiangqiang 2024-07-17 09:58:42 +0800
• 845c83e546 整理默认配置项 删除多余升降温过快检测 hanqiangqiang 2024-07-15 17:36:01 +0800
• 06c4d228ba 更新dll，修改Recipe控制气阀类 hanqiangqiang 2024-07-15 13:53:02 +0800
• 490b0a92a7 更新库，合并develop分支， hanqiangqiang 2024-07-15 09:33:55 +0800
• 598d5ea0f8 修改大流量MFC不能按照分步Ramp hanqiangqiang 2024-07-15 09:09:16 +0800
• 1ff2d1e174 自动流程中更新JobStatus，优化null状态检查 hanqiangqiang 2024-07-11 17:13:20 +0800
• e32f1b3d3b 1更新dll ,昂坤Triger测温，添加温度不变监控，连续10次温度不变报警提示 2版本号使用日期格式 hanqiangqiang 2024-07-11 10:45:53 +0800
• a9c77f844c 1修改调度器中Reset函数，对象为null调用 2PM在Home时，隔热罩ServoOn hanqiangqiang 2024-07-10 17:29:09 +0800
• 3daf894b80 1重命名解决方案名称 2修改自动流程中先关问题 hanqiangqiang 2024-07-10 14:25:53 +0800
• 74b1244f68 更新dll [2c1e01f],仅为了方便浏览代码 hanqiangqiang 2024-07-10 09:08:40 +0800
• 5104766304 Recipe气阀操作类整理，修改上层配置 Han Qiang Qiang 2024-07-08 16:23:51 +0800
• f9e503b36c 整理多片机问题点 1.Recipe不能运行问题 2.V30问题 3.泵问题 4.Recipe中磁流体设置问题 5.Recipe中HCLSourSplitRatio设置问题 Han Qiang Qiang 2024-07-08 09:25:18 +0800
• fe58c9fac4 初步实现昂坤基础测温功能 Han Qiang Qiang 2024-07-04 17:18:52 +0800
• fa8d924e5c 添加昂坤测温，修改开腔动画 Han Qiang Qiang 2024-07-03 14:53:57 +0800
• 448c487794 初步添加昂坤带Trige测温 Han Qiang Qiang 2024-07-02 16:51:37 +0800
• d09c262503 修改MFCflow默认值 SIC1016\caipeilun 2024-07-02 16:35:05 +0800
• bc9416d7c7 修改mfc配置界面 SIC1016\caipeilun 2024-07-02 15:31:22 +0800
• 74e06c94cb PM开关腔状态和动画不一致问题修改 Han Qiang Qiang 2024-07-02 13:27:08 +0800
• ebf69eda70 昂坤测温临时保存 Han Qiang Qiang 2024-07-02 13:05:45 +0800
• e0bf983e50 Merge branch '多片机/multiplate-develop' of http://118.31.5.210:65000/Sic-Software/Sic08 into 多片机/multiplate-develop SIC1016\caipeilun 2024-07-02 10:27:44 +0800
• 501ba0f9ad 更新dll，修改TM机械手取放相关动画 Han Qiang Qiang 2024-07-01 14:26:11 +0800
• acbeb15279 1机械手添加状态绑定 2机械手添加晶圆设定和查询 3修改磁流体相关内容 Han Qiang Qiang 2024-06-30 15:50:31 +0800
• 80f65eba5e 临时存储 Han Qiang Qiang 2024-06-28 14:27:03 +0800
• acb370ddb6 开放机械手晶圆状态查询 Han Qiang Qiang 2024-06-28 08:37:46 +0800
• cc3fcd2e29 删除无用Device配置项 Han Qiang Qiang 2024-06-27 13:15:03 +0800
• 32c9480bf1 更新dll Han Qiang Qiang 2024-06-27 10:34:46 +0800
• 65f7737a96 修改Interlock相关内容， 删除DI-29,DO-70中DI-49设为true Han Qiang Qiang 2024-06-26 16:33:39 +0800
• 36acbf4c86 1修改PM开腔兼容性问题 2修改MFC17相关问题 Han Qiang Qiang 2024-06-26 15:50:10 +0800
• 671567ff45 1修改开关腔相应Routine, 2更新dll，更新开腔互锁 3修改界面数据绑定 Han Qiang Qiang 2024-06-25 17:38:49 +0800
• a5a61abb6a text修改 SIC1016\caipeilun 2024-06-25 15:41:03 +0800
• 4c18bc3c17 1更新dll,修改磁流体先关内容 2修改界面相关数据显示 Han Qiang Qiang 2024-06-24 14:30:18 +0800
• 2ccc1ea72b Merge branch '多片机/multiplate-develop' of http://118.31.5.210:65000/Sic-Software/Sic08 into 多片机/multiplate-develop Han Qiang Qiang 2024-06-24 13:26:52 +0800
• 5a52d6cc6e 1修改Load腔伺服函数名 2修改Load伺服相关动作 3修改PM初始化 Han Qiang Qiang 2024-06-24 13:26:44 +0800
• ddee8723c2 Merge branch '多片机/multiplate-develop' of http://118.31.5.210:65000/Sic-Software/Sic08 into 多片机/multiplate-develop SIC1016\caipeilun 2024-06-24 09:27:50 +0800
• ea1734350e simulator仿真优化 SIC1016\caipeilun 2024-06-24 09:23:13 +0800
• bcb245e65e 1添加TrayHome动作 2添加Load腔伺服Jog动作 Han Qiang Qiang 2024-06-21 16:45:44 +0800
• a8a1784a15 Merge branch '多片机/multiplate-develop' of http://118.31.5.210:65000/Sic-Software/Sic08 into 多片机/multiplate-develop Han Qiang Qiang 2024-06-21 09:08:27 +0800
• f6237da3ed 调试机械手取放时感应器和UI不同步问题 Han Qiang Qiang 2024-06-21 09:07:52 +0800
• 6bf2f992eb TM流程检查 优化 SIC1016\caipeilun 2024-06-21 09:01:20 +0800
• 6000204b66 Merge branch '多片机/multiplate-develop' of http://118.31.5.210:65000/Sic-Software/Sic08 into 多片机/multiplate-develop SIC1016\caipeilun 2024-06-20 10:29:08 +0800
• fbce8e1101 磁流体速度设定，不需要Ramp,删除时间参数 Han Qiang Qiang 2024-06-20 10:27:06 +0800
• c542dd424f Merge branch '多片机/multiplate-develop' of http://118.31.5.210:65000/Sic-Software/Sic08 into 多片机/multiplate-develop SIC1016\caipeilun 2024-06-20 10:21:09 +0800
• 8478393d01 修改TM Interlock SIC1016\caipeilun 2024-06-20 10:20:11 +0800
• e1dc35bbcd 1添加机械手去PM取放，添加磁流体Home防呆 2添加TrayHome 3优化LoadHome动作 5更新dll,修改磁流体相关动作 4修改自动流程动作 Han Qiang Qiang 2024-06-20 10:17:01 +0800
• 395e8ab6ec Merge branch '多片机/multiplate-develop' of http://118.31.5.210:65000/Sic-Software/Sic08 into 多片机/multiplate-develop Han Qiang Qiang 2024-06-18 17:36:58 +0800
• 8fae47f224 1修改PM泵绑定数据源 2修改机械手传盘相应逻辑 3屏蔽调试时遇到的信号检测 Han Qiang Qiang 2024-06-18 17:36:32 +0800
• eb45106ef3 Merge branch '多片机/multiplate-develop' of http://118.31.5.210:65000/Sic-Software/Sic08 into 多片机/multiplate-develop SIC1016\caipeilun 2024-06-18 10:04:58 +0800
• 11bd3eaf5a routine修改 SIC1016\caipeilun 2024-06-18 09:47:32 +0800
• 258187b9d9 屏蔽V25强制Interlock 修改测试内容 Han Qiang Qiang 2024-06-16 10:01:21 +0800
• a2beffeb1d 添加V25对应的DI点 修改仿真中不能ProcessIdle问题点 临时屏蔽仿真中V25相关内容 Han Qiang Qiang 2024-06-14 14:05:51 +0800
• 6b4e3eeff4 Merge branch '多片机/multiplate-develop' of http://118.31.5.210:65000/Sic-Software/Sic08 into 多片机/multiplate-develop Han Qiang Qiang 2024-06-14 10:47:12 +0800
• 18be77ea4b 整理Buffer穿盘问题 优化磁流体设置问题 Han Qiang Qiang 2024-06-14 10:46:19 +0800
• 36d38c251b Merge branch '多片机/multiplate-develop' of http://118.31.5.210:65000/Sic-Software/Sic08 into 多片机/multiplate-develop SIC1016\caipeilun 2024-06-14 10:11:38 +0800
• c258d39440 DI11 仿真信号 SIC1016\caipeilun 2024-06-14 10:11:19 +0800
• e1b62ee617 自动传盘流程添加 Han Qiang Qiang 2024-06-13 18:13:59 +0800
• b4362b2345 routine purge SIC1016\caipeilun 2024-06-13 16:38:12 +0800
• 00515bf654 Merge branch '多片机/multiplate-develop' of http://118.31.5.210:65000/Sic-Software/Sic08 into 多片机/multiplate-develop SIC1016\caipeilun 2024-06-13 09:15:15 +0800
• 621d12fa1d routine改到vac idle SIC1016\caipeilun 2024-06-13 09:07:33 +0800
• 40e6aca84f 测试Interlock流程 修改传盘流程临时保存 Han Qiang Qiang 2024-06-13 08:59:38 +0800
• 8234870469 1修改Recipe流量计算器可配置 2机械手Home时根据感应器创建和删除托盘和晶圆 Han Qiang Qiang 2024-06-12 14:19:18 +0800
• c83b4241db Merge branch '多片机/multiplate-develop' of http://118.31.5.210:65000/Sic-Software/Sic08 into 多片机/multiplate-develop SIC1016\caipeilun 2024-06-08 10:20:52 +0800
• 5e978d4346 TM腔Interlock SIC1016\caipeilun 2024-06-08 10:20:40 +0800
• 30265f0feb Merge branch '多片机/multiplate-develop' of http://118.31.5.210:65000/Sic-Software/Sic08 into 多片机/multiplate-develop Han Qiang Qiang 2024-06-07 17:28:29 +0800
• cba3822d36 修改UnLoad扫描闸板阀报错问题 添加Routine需要修改的地方 Han Qiang Qiang 2024-06-07 17:28:20 +0800
• 5864a567a6 Merge branch '多片机/multiplate-develop' of http://118.31.5.210:65000/Sic-Software/Sic08 into 多片机/multiplate-develop SIC1016\caipeilun 2024-06-07 09:03:15 +0800
• 3a9d1feb7d enabletable SIC1016\caipeilun 2024-06-06 15:42:10 +0800
• 55a62b1053 Interlock修改 SIC1016\caipeilun 2024-06-06 10:35:57 +0800
• d3d0bc5fdb 修改PM主界面泵 Han Qiang Qiang 2024-06-05 15:13:51 +0800
• 2a1672c59f 修改报错问题 Han Qiang Qiang 2024-06-05 14:12:00 +0800
• 9477c90329 修改模块组合界面 Han Qiang Qiang 2024-06-05 13:57:34 +0800
• 8f812c1f80 仿真中添加MFC Han Qiang Qiang 2024-06-03 14:27:03 +0800
• 1f8eb2bd24 修改TM IO相关内容 Han Qiang Qiang 2024-05-31 16:19:09 +0800
• e33a47f6e7 修改Load腔手动操作界面 Han Qiang Qiang 2024-05-30 17:27:16 +0800
• 58bc8b75aa 添加V97气阀对应的DI点 修改仿真中V64 V64 V97操作气阀时，赋值对应的DI点 Han Qiang Qiang 2024-05-30 16:56:23 +0800
• 78848aeeaf 更新dll [731c87c]，磁流体添加新功能 修改磁流体相关功能 Han Qiang Qiang 2024-05-30 16:42:17 +0800
• 950c8d5937 修改水温报警相关内容 Han Qiang Qiang 2024-05-30 10:28:01 +0800
• dc3468f5de 添加PM泵绑定数据 Han Qiang Qiang 2024-05-29 14:30:21 +0800
• f9507a5947 1修改界面气路显示不全 2修改气阀控制错误 Han Qiang Qiang 2024-05-28 15:03:40 +0800
• ac8c261437 1修改气阀打开不对应问题 2修改PM的IO，水温的还需要继续优化 3TM的IO好多和逻辑相关，只修改小部分，后面继续修改 4界面添加泵，绑定数据还需要沟通 Han Qiang Qiang 2024-05-28 11:17:00 +0800
• bb5c4a6dc0 1修改Recipe，新增MFC 2修改配置中Recipe权限，开启全部显示 Han Qiang Qiang 2024-05-27 17:05:51 +0800