using Aitex.Core.RT.Event; using Aitex.Core.RT.Log; using Aitex.Core.RT.Routine; using Aitex.Core.RT.SCCore; using MECF.Framework.Common.Equipment; using MECF.Framework.Common.SubstrateTrackings; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots; using SicModules.EFEMs.Routines.Base; using SicModules.LLs.Routines; using SicModules.UnLoads.Routines; using System; namespace SicModules.EFEMs.Routines { public class WaferRobotPlaceRoutine : EfemBaseRoutine { /* 1.Place to LoadLock(需要开门)/Aligner/Cassette * 2.判断目标是否无Wafer，判断Robot是否有Wafer * 3.判断是否需要开门（包括气压等） * 4.判断顶针是否上升 * 5.伸出 * 6.判断顶针上升 * 7.ActionDone * 8.关门 * 机械手伸进来 顶针顶起来 夹爪夹住 夹爪松开 机械手退出 顶针下降 */ private EfemSlitValveRoutine _efemSlitValveOpenRoutine = new EfemSlitValveRoutine(); private EfemSlitValveRoutine _efemSlitValveCloseRoutine = new EfemSlitValveRoutine(); private LoadLockLiftRoutine _loadLockLiftDown = new LoadLockLiftRoutine(); private LoadLockLiftRoutine _loadLockLiftUp = new LoadLockLiftRoutine(); private LoadLockClawRoutine _loadLockClaw = new LoadLockClawRoutine(); private LoadLockClawRoutine _loadLockClawOpen = new LoadLockClawRoutine(); private UnLoadLiftRoutine _unLoadLiftDown = new UnLoadLiftRoutine(); private UnLoadLiftRoutine _unLoadLiftUp = new UnLoadLiftRoutine(); private UnLoadClawRoutine _unLoadClaw = new UnLoadClawRoutine(); private UnLoadClawRoutine _unLoadClawOpen = new UnLoadClawRoutine(); private ModuleName _target; private int _targetSlot; private int _placeTimeout; private int _alignerMoveTimeOut = 10; private bool _isSimulator = false; enum RoutineStep { SetLiftDown0, AlignerMoveTo, OpenSlitValve, SetLiftUp, CheckRobotReady, ExtendForPlace, PickComplete, SetLiftDown, CloseSlitValve, TimeDelay1, Place, SetClawOpen1, SetClawOpen2, SetClaw, AlignerCheckWafer, SetExtendToDo, ClearRobortExtendToDo, CheckWaferStatusByRq } public WaferRobotPlaceRoutine() { Module = ModuleName.EFEM.ToString(); Name = "Place"; } public void Init(ModuleName targetModule, int targetSlt) { _target = targetModule; _targetSlot = targetSlt; } public override Result Start(params object[] objs) { Reset(); if (!WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 0)) { Stop("Can not place,WaferRobot no wafer"); return Result.FAIL; } //Place之前先,根据Sensor检测是否有盘 if (WaferManager.Instance.CheckHasWafer(_target, _targetSlot)) { EV.PostWarningLog(Module, $"Can not place, {_target} slot {_targetSlot} has wafer"); return Result.FAIL; } if (WaferRobot.RobotState != RobotStateEnum.Idle) { EV.PostWarningLog(Module, $"Can not place, WaferRobot is not Idle"); return Result.FAIL; } //LoadLock传感器是否需要检测有Wafer //if (_target == ModuleName.LoadLock || _target == ModuleName.Load) //{ // if (_loadWaferPlaced.Value) // { // EV.PostWarningLog(Module, $"Can not place,{_target} sensor[DI-35] check have wafer"); // return Result.FAIL; // } //} if (_target == ModuleName.CassAL) { if (!_cassAL6Inch.Value) { EV.PostWarningLog(Module, $"Can not place,{_target} sensor check no cassette"); return Result.FAIL; } } else if (_target == ModuleName.CassAR) { if (!_cassAR6Inch.Value) { EV.PostWarningLog(Module, $"Can not place,{_target} sensor check no cassette"); return Result.FAIL; } } _efemSlitValveOpenRoutine.Init(_target, ModuleName.WaferRobot, true); _efemSlitValveCloseRoutine.Init(_target, ModuleName.WaferRobot, false); _loadLockLiftDown.Init(false); _loadLockLiftUp.Init(true); _loadLockClaw.Init(true,true); _loadLockClawOpen.Init(true, false); _unLoadLiftDown.Init(false); _unLoadLiftUp.Init(true); _unLoadClaw.Init(true); _unLoadClawOpen.Init(false); _placeTimeout = SC.GetConfigItem($"{ModuleName.WaferRobot}.MotionTimeout").IntValue; _isSimulator = SC.GetValue($"System.IsSimulatorMode"); _alignerMoveTimeOut = SC.GetValue("HiWinAligner.AlignerMoveToCenterTimeOut"); return Result.RUN; } public override Result Monitor() { try { if (_target == ModuleName.Aligner && !_isSimulator) { CheckHaveWafer((int)RoutineStep.AlignerCheckWafer, 3); //发送指令检测是否有Wafer AlignerMoveToRobotPutPalce((int)RoutineStep.AlignerMoveTo, _alignerMoveTimeOut); //Aligner移动至测量中心点 } if (_target == ModuleName.LoadLock) { ExecuteRoutine((int)RoutineStep.SetLiftDown0, _loadLockLiftDown); ExecuteRoutine((int)RoutineStep.SetClawOpen1, _loadLockClawOpen); //夹爪打开 } else if (_target == ModuleName.UnLoad) { ExecuteRoutine((int)RoutineStep.SetLiftDown0, _unLoadLiftDown); ExecuteRoutine((int)RoutineStep.SetClawOpen1, _unLoadClawOpen); //夹爪打开 } ExecuteRoutine((int)RoutineStep.OpenSlitValve, _efemSlitValveOpenRoutine); //打开闸板阀 SetWaferRobortExtendToDO((int)RoutineStep.SetExtendToDo, _target, 10); //设置ExtendToDO,用于检测InterLock CheckRobotReady((int)RoutineStep.CheckRobotReady, WaferRobot, _placeTimeout); //判断机械手当前是否空闲 ExtendForPlace((int)RoutineStep.ExtendForPlace, WaferRobot, _target, _targetSlot, _placeTimeout); //伸出,关真空 //夹爪打开,顶针上升 if (_target == ModuleName.LoadLock) { ExecuteRoutine((int)RoutineStep.SetLiftUp, _loadLockLiftUp); } else if (_target == ModuleName.UnLoad) { ExecuteRoutine((int)RoutineStep.SetLiftUp, _unLoadLiftUp); } Place((int)RoutineStep.Place, WaferRobot, _target, _targetSlot, _placeTimeout); //机械手收回 if (_target == ModuleName.LoadLock) { ExecuteRoutine((int)RoutineStep.SetClaw, _loadLockClaw); ExecuteRoutine((int)RoutineStep.SetLiftDown, _loadLockLiftDown); } else if (_target == ModuleName.UnLoad) { ExecuteRoutine((int)RoutineStep.SetClaw, _unLoadClaw); ExecuteRoutine((int)RoutineStep.SetLiftDown, _unLoadLiftDown); } ClearRobortExtendToDO((int)RoutineStep.ClearRobortExtendToDo); TimeDelay((int)RoutineStep.TimeDelay1, 1); CheckWaferStatuAfterPlace((int)RoutineStep.CheckWaferStatusByRq, WaferRobot, 10); //结束后检查Wafer ExecuteRoutine((int)RoutineStep.CloseSlitValve, _efemSlitValveCloseRoutine); //关闭闸板阀 } catch (RoutineBreakException) { return Result.RUN; } catch (RoutineFaildException ex) { LOG.Error(ex.ToString()); return Result.FAIL; } Notify($"Finish"); return Result.DONE; } public override void Abort() { WaferRobot.Abort(); WaferRobot.Stop(); base.Abort(); } } }