using System; using Aitex.Core.RT.Event; using Aitex.Core.RT.Routine; using Aitex.Core.RT.SCCore; using MECF.Framework.Common.Equipment; using SicModules.LLs.Routines.Base; namespace SicModules.LLs.Routines { public class LoadLockServoToRoutine : LoadLockBaseRoutine { enum RoutineStep { CheckForelinePressure, RequestPump, RequestPumpDelay, SlowPump, CloseSlowValve, FastPump, PumpDelay, CloseFastValve, Delay, SlowVent, CloseSlowVentValve, TimeDelay1, TimeDelay2, TimeDelay3, } private double _pumpSwitchPressure; private int _slowPumpTimeout=100; private int _fastPumpTimeout=100; private int _slowVentTimeout = 100; private bool _useSettingValue; private double _targetPressure; private bool _needPump = false; private int _ventDelayTime; public LoadLockServoToRoutine(ModuleName module) { Module = module.ToString(); Name = "LoadLockServoTo"; } public void Init(double pressure) { _targetPressure = pressure; _useSettingValue = true; } public override Result Start(params object[] objs) { Reset(); if (!_useSettingValue) { _targetPressure = SC.GetConfigItem("TM.PressureBalance.BalancePressure").DoubleValue; } _pumpSwitchPressure = SC.GetValue("LoadLock.Pump.SlowFastPumpSwitchPressure"); _slowVentTimeout = SC.GetValue("LoadLock.Vent.RoutineTimeOut"); _ventDelayTime = SC.GetValue("LoadLock.Vent.VentDelayTime"); string reason; if (!LoadLockDevice.SetFastVentValve(false, out reason) || !LoadLockDevice.SetSlowVentValve(false, out reason)) { EV.PostAlarmLog(Module, $"Can not turn off valves, {reason}"); return Result.FAIL; } if (!LoadLockDevice.SetFastPumpValve(false, out reason) || !LoadLockDevice.SetSlowPumpValve(false, out reason)) { EV.PostAlarmLog(Module, $"Can not turn off valves, {reason}"); return Result.FAIL; } bool isAtmMode = SC.GetValue("System.IsATMMode"); if (isAtmMode) { EV.PostInfoLog(Module, $"system in atm mode, {Module} pump skipped"); return Result.DONE; } if (!LoadLockDevice.CheckLidClose()) { EV.PostAlarmLog(Module, $"Can not pump, door is open"); return Result.FAIL; } if (!TMDevice.CheckSlitValveClose(ModuleHelper.Converter(Module))) { EV.PostAlarmLog(Module, $"LoadLock Can not servo to pressure, slit valve is open"); return Result.FAIL; } if (Math.Abs(_targetPressure - LoadLockDevice.ChamberPressure) < SC.GetConfigItem("TM.PressureBalance.BalanceMaxDiffPressure").DoubleValue && LoadLockDevice.CheckVacuum()) { return Result.DONE; } _needPump = LoadLockDevice.ChamberPressure > _targetPressure; //LockPump2(out reason); Notify("Start"); return Result.RUN; } public override Result Monitor() { try { TimeDelay((int)RoutineStep.TimeDelay1, 1); if (_needPump) { //需要调节的压力低于打开快抽的压力 if (_targetPressure < _pumpSwitchPressure) { SlowPump((int)RoutineStep.SlowPump, _pumpSwitchPressure, _slowPumpTimeout); FastPump((int)RoutineStep.FastPump, _targetPressure, _fastPumpTimeout); //TimeDelay((int)RoutineStep.TimeDelay2, 5); CloseFastPumpValve((int)RoutineStep.CloseFastValve); CloseSlowPumpValve((int)RoutineStep.CloseSlowValve); } else { SlowPump((int)RoutineStep.SlowPump, _targetPressure, _slowPumpTimeout); CloseSlowPumpValve((int)RoutineStep.CloseSlowValve); } TimeDelay((int)RoutineStep.TimeDelay3, 1); } else { SlowVent((int)RoutineStep.SlowVent, _targetPressure, _slowVentTimeout); if (_useSettingValue) { TimeDelay((int)RoutineStep.TimeDelay2, _ventDelayTime); } CloseVentValveAndWait((int)RoutineStep.CloseSlowVentValve); } } catch (RoutineBreakException) { return Result.RUN; } catch (RoutineFaildException) { //UnlockPump2(); return Result.FAIL; } //UnlockPump2(); Notify("Finished"); return Result.DONE; } } }