Base
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1修改开关腔相应Routine,
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2024-06-25 17:38:49 +08:00 |
LoadHomeRoutine.cs
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1修改Load腔伺服函数名
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2024-06-24 13:26:44 +08:00 |
LoadLockClawRoutine.cs
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Mainframe工程更名为SicModules。
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2023-04-13 15:35:13 +08:00 |
LoadLockGroupRoutine.cs
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自动传盘流程添加
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2024-06-13 18:13:59 +08:00 |
LoadLockLiftRoutine.cs
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Mainframe工程更名为SicModules。
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2023-04-13 15:35:13 +08:00 |
LoadLockPrepareTransferRoutine.cs
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修改UnLoad扫描闸板阀报错问题
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2024-06-07 17:28:20 +08:00 |
LoadLockPumpRoutine.cs
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1.Load Pump时不关闭TM Fast Pump阀
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2023-08-10 16:51:27 +08:00 |
LoadLockPurgeRoutine.cs
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1.Load和Unload Purge增加Vent超时时间
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2023-08-10 14:32:17 +08:00 |
LoadLockServoToRoutine.cs
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1.取消Load Servo压力Pump延时
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2023-09-06 15:48:27 +08:00 |
LoadLockTrayClawRoutine.cs
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Mainframe工程更名为SicModules。
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2023-04-13 15:35:13 +08:00 |
LoadLockTrayLoadAngleRoutine.cs
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1修改开关腔相应Routine,
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2024-06-25 17:38:49 +08:00 |
LoadLockVentRoutine.cs
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1:控制V94和V96阀时,对应的控制MFC设置为0
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2023-06-20 11:09:36 +08:00 |
LoadRotationHomeRoutine.cs
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1添加机械手去PM取放,添加磁流体Home防呆
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2024-06-20 10:17:01 +08:00 |
LoadSeparateRoutine.cs
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Mainframe工程更名为SicModules。
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2023-04-13 15:35:13 +08:00 |