75 lines
3.9 KiB
XML
75 lines
3.9 KiB
XML
<?xml version="1.0" encoding="utf-8"?>
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<Aitex>
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<TableSequenceFormat RecipeVersion="Sic">
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<Catalog Type="Position">
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<Item Name="Position" DisplayName="Position" InputType="ReadOnlySelection" >
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<Selection Name="PM1" DisplayName="PM1" Parameter="ProcessRecipe" />
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<Selection Name="PM2" DisplayName="PM2" Parameter="ProcessRecipe" />
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<Selection Name="Buffer" DisplayName="Buffer" Parameter="SetValue" />
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<Selection Name="Load" DisplayName="Load" Parameter="SetValue,PurgeCount,PumpDelayTime" />
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</Item>
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</Catalog>
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<Catalog Type="Parameter">
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<Item Name="PMSelection" DisplayName="Reactor Selection" InputType="MultiSelection" >
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<Selection Name="PM1" DisplayName="PM1"/>
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<Selection Name="PM2" DisplayName="PM2"/>
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</Item>
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<Item Name="ProcessRecipe" DisplayName="Process Recipe" InputType="RecipeSelection" Parameter="Process" Min="0" Max="999999" />
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<Item Name="SlotSelection" DisplayName="SlotSelection" InputType="MultiSelection" >
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<Selection Name="1" DisplayName="1"/>
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<Selection Name="2" DisplayName="2"/>
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<Selection Name="3" DisplayName="3"/>
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</Item>
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<Item Name="BufferType" DisplayName="Type" InputType="ReadOnlySelection" >
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<Selection Name="HeatByTime" DisplayName="HeatByTime"/>
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<Selection Name="CoolingByTime" DisplayName="CoolingByTime"/>
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</Item>
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<Item Name="Type" DisplayName="Type" InputType="ReadOnlySelection" >
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<Selection Name="CoolingByTime" DisplayName="CoolingByTime"/>
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</Item>
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<Item Name="SetValue" DisplayName="SetValue" InputType="NumInput" Min="0" Max="10000" />
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<Item Name="PurgeCount" DisplayName="PurgeCount" InputType="NumInput" Min="0" Max="1000" />
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<Item Name="PumpDelayTime" DisplayName="PumpDelayTime" InputType="NumInput" Min="0" Max="1000" />
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<Item Name="PurgeCountBeforeWaferPicking" DisplayName="Purge Count Before ATM" InputType="NumInput" Min="0" Max="1000" />
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<Item Name="PumpDelayTimeBeforeWaferPicking" DisplayName="Pump Delay Before ATM" InputType="NumInput" Min="0" Max="1000" />
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<Item Name="PurgeCountAfterWaferPicking" DisplayName="Purge Count After ATM" InputType="NumInput" Min="0" Max="1000" />
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<Item Name="PumpDelayTimeAfterWaferPicking" DisplayName="Pump Delay After ATM" InputType="NumInput" Min="0" Max="1000" />
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<Item Name="CoolingTime" DisplayName="Cooling Time(s)" InputType="NumInput" Min="0" Max="3600" />
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</Catalog>
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</TableSequenceFormat>
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<TableSequenceData RecipeVersion="Sic" CreatedBy="System" Barcode="" CreationTime="2016-05-13T13:56:44" LastRevisedBy="admin" LastRevisionTime="2015-10-13T13:56:44" Description="（Empty）">
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<Step></Step>
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</TableSequenceData>
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<TableRecipeSchema>
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<xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">
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<xs:simpleType name="booleanType">
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<xs:restriction base="xs:string">
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<xs:enumeration value="0" />
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<xs:enumeration value="1" />
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<xs:enumeration value="False" />
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<xs:enumeration value="True" />
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<xs:enumeration value="false" />
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<xs:enumeration value="true" />
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</xs:restriction>
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</xs:simpleType>
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<xs:element name="TableSequenceData">
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<xs:complexType>
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<xs:sequence>
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<xs:element maxOccurs="unbounded" name="Step">
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</xs:element>
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</xs:sequence>
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<xs:attribute name="RecipeVersion" type="xs:string" fixed="Sic" use="required" />
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<xs:attribute name="CreatedBy" type="xs:string" use="required" />
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<xs:attribute name="CreationTime" type="xs:dateTime" use="required" />
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<xs:attribute name="LastRevisedBy" type="xs:string" use="required" />
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<xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />
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<xs:attribute name="Barcode" type="xs:string" use="required" />
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<xs:attribute name="Description" type="xs:string" use="required" />
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</xs:complexType>
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</xs:element>
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</xs:schema>
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</TableRecipeSchema>
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<Signature>axPPcBt+girefGdBoafkJf+pBhY=</Signature>
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</Aitex> |