300 lines
11 KiB
C#
300 lines
11 KiB
C#
using System;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.UnLoad;
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using SicModules.EFEMs.Routines.Base;
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using SicModules.LLs;
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using SicModules.LLs.Routines;
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using SicModules.TMs;
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using SicModules.UnLoads;
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using SicModules.UnLoads.Routines;
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namespace SicModules.EFEMs.Routines
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{
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public class EfemSlitValveRoutine : EfemBaseRoutine
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{
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enum RoutineStep
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{
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ServoRoutine,
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LiftRoutine,
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CheckPressureCondition,
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CheckPressure,
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SetSlitValve,
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CheckPressureCondition2,
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TimeDlay1
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}
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private int _motionTimeout = 30;
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private ModuleName _paramTarget; //目标腔体
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private ModuleName _robot; //机械手
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private bool _paramIsOpen; //是否开门
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private bool _bothPressureIsATM; //判断两边压力是否都为ATM
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private SicTM _tm;
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private LoadLock _loadLock;
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private UnLoad _unLoad;
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private LoadLockServoToRoutine _llServoToRoutine;
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private UnLoadServoToRoutine _unLoadServoToRoutine;
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private LoadLockLiftRoutine _llLiftRoutine;
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private UnLoadLiftRoutine _unLoadLiftRoutine;
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private double _maxPressureDiffOpenSlitValve = SC.GetValue<double>("EFEM.MaxPressureDiffOpenSlitValve");
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public void Init(ModuleName targetModule,ModuleName robot, bool isOpen)
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{
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_paramTarget = targetModule;
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_robot = robot;
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_paramIsOpen = isOpen;
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Name = isOpen ? "Open Slit Valve" : "Close Slit Valve";
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}
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public EfemSlitValveRoutine()
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{
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Module = ModuleName.EFEM.ToString();
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Name = "EFEMSlitValue";
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_tm = DEVICE.GetDevice<SicTM>($"{ ModuleName.System.ToString()}.{ ModuleName.TM.ToString()}");
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_loadLock= DEVICE.GetDevice<SicLoadLock>($"{ ModuleName.LoadLock.ToString()}.{ ModuleName.LoadLock.ToString()}");
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_unLoad = DEVICE.GetDevice<SicUnLoad>($"{ ModuleName.UnLoad.ToString()}.{ ModuleName.UnLoad.ToString()}");
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_llServoToRoutine = new LoadLockServoToRoutine(ModuleName.LoadLock);
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_unLoadServoToRoutine = new UnLoadServoToRoutine(ModuleName.UnLoad);
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_llLiftRoutine = new LoadLockLiftRoutine();
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_unLoadLiftRoutine = new UnLoadLiftRoutine();
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}
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public override Result Start(params object[] objs)
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{
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Reset();
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//只有LoadLock和UnLoad需要开门
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if (_robot == ModuleName.WaferRobot)
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{
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if (_paramTarget != ModuleName.LoadLock && _paramTarget != ModuleName.Load && _paramTarget != ModuleName.UnLoad)
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{
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return Result.DONE;
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}
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}
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else if (_robot == ModuleName.TrayRobot)
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{
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if (_paramTarget != ModuleName.LoadLock)
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{
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return Result.DONE;
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}
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}
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else
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{
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return Result.DONE;
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}
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if (_paramIsOpen)
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{
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if (EfemDevice.CheckSlitValveOpen(_paramTarget, _robot))
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{
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return Result.DONE;
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}
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//判断TM到LoadLock或者UnLoad的门是否关上
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if (!_tm.CheckSlitValveClose(_paramTarget))
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{
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EV.PostWarningLog(Module, $"can not open slit valve {_paramTarget}, {_paramTarget} to TM slit valve not closed, can not open at same time");
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return Result.FAIL;
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}
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if (!EfemDevice.CheckSlitValveClose(ModuleName.LoadLock, ModuleName.WaferRobot)) //此门是必须要关上的
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{
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EV.PostWarningLog(Module, $"can not open slit valve {_paramTarget}, {ModuleName.LoadLock} to Efem slit valve not closed, can not open at same time");
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return Result.FAIL;
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}
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if (!EfemDevice.CheckSlitValveClose(ModuleName.UnLoad, _robot))
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{
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EV.PostWarningLog(Module, $"can not open slit valve {_paramTarget}, {ModuleName.UnLoad} to Efem slit valve not closed, can not open at same time");
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return Result.FAIL;
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}
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if (!EfemDevice.CheckSlitValveClose(ModuleName.LoadLock, _robot))
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{
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EV.PostWarningLog(Module, $"can not open slit valve {_paramTarget}, {ModuleName.LoadLock} to Efem slit valve not closed, can not open at same time");
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return Result.FAIL;
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}
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_motionTimeout = SC.GetValue<int>("EFEM.SlitValveMotionTimeout");
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_llServoToRoutine.Init(SC.GetValue<double>("LoadLock.AtmPressureBase"));
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_unLoadServoToRoutine.Init(SC.GetValue<double>("UnLoad.AtmPressureBase"));
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_llLiftRoutine.Init(false);
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_unLoadLiftRoutine.Init(false);
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}
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else
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{
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if (EfemDevice.CheckSlitValveClose(_paramTarget, _robot))
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{
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return Result.DONE;
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}
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}
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Notify("Start");
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return Result.RUN;
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}
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public override Result Monitor()
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{
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try
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{
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//开门之前需要对两边腔体进行气压调节,降Lift
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if (_paramIsOpen)
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{
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if (_paramTarget == ModuleName.LoadLock)
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{
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CheckPressureConditionATM((int)RoutineStep.CheckPressureCondition, _paramTarget);//先判断Load腔是否在大气，因为EFEM始终在大气
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if (!_bothPressureIsATM)
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{
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ExecuteRoutine((int)RoutineStep.ServoRoutine, _llServoToRoutine);
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ExecuteRoutine((int)RoutineStep.LiftRoutine, _llLiftRoutine);
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}
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}
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else if (_paramTarget == ModuleName.UnLoad)
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{
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CheckPressureConditionATM((int)RoutineStep.CheckPressureCondition, _paramTarget);//先判断UnLoad腔是否在大气
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if (!_bothPressureIsATM)
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{
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ExecuteRoutine((int)RoutineStep.ServoRoutine, _unLoadServoToRoutine);
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ExecuteRoutine((int)RoutineStep.LiftRoutine, _unLoadLiftRoutine);
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}
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}
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CheckPressureCondition((int)RoutineStep.CheckPressureCondition2,_paramTarget);
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}
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SetSlitValve((int)RoutineStep.SetSlitValve, _paramTarget, _robot, _paramIsOpen, _motionTimeout);
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TimeDelay((int)RoutineStep.TimeDlay1, 1);
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}
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catch (RoutineBreakException)
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{
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return Result.RUN;
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}
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catch (RoutineFaildException)
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{
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return Result.FAIL;
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}
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Notify("Finished");
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return Result.DONE;
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}
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public void CheckPressureConditionATM(int id, ModuleName target)
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{
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Tuple<bool, Result> ret = Execute(id, () =>
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{
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Notify($"check pressure condition to open {target} slit valve");
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double targetPressure = 0.0;
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if (target == ModuleName.LoadLock)
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{
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targetPressure = _loadLock.ChamberPressure;
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}
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else
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{
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targetPressure = _unLoad.ChamberPressure;
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}
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_bothPressureIsATM = Math.Abs(EfemDevice.AtmPressureBase - targetPressure) <= _maxPressureDiffOpenSlitValve;
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return true;
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});
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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}
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}
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public void CheckPressureCondition(int id, ModuleName target)
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{
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Tuple<bool, Result> ret = Execute(id, () =>
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{
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Notify($"check {target} pressure is atm");
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double targetPressure = 0.0;
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if (target == ModuleName.LoadLock)
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{
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targetPressure = _loadLock.ChamberPressure;
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}
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else
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{
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targetPressure = _unLoad.ChamberPressure;
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}
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if (Math.Abs(EfemDevice.AtmPressureBase - targetPressure) > _maxPressureDiffOpenSlitValve)
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{
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Stop($"pressure difference {Math.Abs(EfemDevice.AtmPressureBase - targetPressure):F3} between Efem and {target} exceed tolerance {_maxPressureDiffOpenSlitValve}");
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return false;
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}
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return true;
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});
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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}
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}
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public void SetSlitValve(int id, ModuleName module,ModuleName _robort, bool isOpen, int timeout)
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{
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Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
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{
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Notify($"set slit valve {module} " + (isOpen ? "Open" : "Close"));
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if (!EfemDevice.SetSlitValve(module, _robort, isOpen, out string reason))
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{
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Stop(reason);
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return false;
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}
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return true;
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}, () =>
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{
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return isOpen ? EfemDevice.CheckSlitValveOpen(module, _robort) : EfemDevice.CheckSlitValveClose(module, _robort);
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}, timeout * 1000);
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else if (ret.Item2 == Result.TIMEOUT) //timeout
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{
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Stop($"can not complete in {timeout} seconds");
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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}
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}
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}
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}
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