SicMultiplate/Modules/Mainframe/PMs/Routines
Liang Su 8bc589ebf5 refactor(Heater): 优化Heater操作视图,优化HeatStrategy等枚举定义。
更新Common库至f05010b。
FlowMode、TCModes、HeatStrategy等枚举从DicMode对象中移出至Aitex.Core.RT.Device.PmDevices命名空间。
PMHeaterView视图从SicUI项目中移除,移至UI.Client库。
2024-04-24 09:21:23 +08:00
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Base refactor(Heater): 优化Heater操作视图,优化HeatStrategy等枚举定义。 2024-04-24 09:21:23 +08:00
EditableRoutine refactor(Heater): 优化Heater操作视图,优化HeatStrategy等枚举定义。 2024-04-24 09:21:23 +08:00
PMButttomSectionMoveRoutine.cs
PMChamberMoveBodyRoutine.cs 1.PM Interlock中用DI-7代替DI-6 2023-07-05 13:34:33 +08:00
PMCleanRoutine.cs 1.Routine时间修改 2024-03-27 14:13:06 +08:00
PMExchangeMoRoutine.cs
PMHomeRoutine.cs
PMLeakCheckRoutine.cs 1.Routine时间修改 2024-03-27 14:13:06 +08:00
PMMfcRorRoutine.cs 1.修改PM Routine有关超时时间和压力到达条件判断 2024-03-26 10:17:56 +08:00
PMMfcValueTestRoutine.cs 1.解决更新Common库后导致数据库处理出现的报错 2023-07-10 18:29:20 +08:00
PMPcCalibrationRoutine.cs
PMPostTransferRoutine.cs 1.进度更新 2024-03-28 13:24:05 +08:00
PMPrepareTransferRoutine.cs
PMProcessAbortRoutine.cs 1.PM ProcessAbort增加将PSU和SCR设置为Power模式 2024-04-09 08:54:02 +08:00
PMProcessRoutine.cs 1.整理WaferInfoRt类 2023-08-10 15:56:27 +08:00
PMPumpRoutine.cs 1.Routine时间修改 2024-03-27 14:13:06 +08:00
PMPurgeRoutine.cs 1.修改PM Routine有关超时时间和压力到达条件判断 2024-03-26 10:17:56 +08:00
PMServoToPressure.cs
PMStopHeatEnableRoutine.cs
PMToAtmIdleRoutine.cs
PMToIsolationRoutine.cs
PMToProcessIdleRoutine.cs 修正PostProcess、PMPostTransferRoutine和PMToProcessIdleRoutine中未正确设置PSU、SCR加热模式的问题。 2024-03-14 15:26:03 +08:00
PMVacIdleRoutine.cs 1.Routine时间修改 2024-03-27 14:13:06 +08:00
PMVentRoutine.cs