3576 lines
115 KiB
C#
3576 lines
115 KiB
C#
using Aitex.Core.Common.DeviceData;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Device.Devices;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Log;
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using Aitex.Core.RT.SCCore;
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using Aitex.Core.Util;
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using Aitex.Core.Utilities;
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using Aitex.Sorter.Common;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.Common.Event;
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using MECF.Framework.Common.PLC;
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using MECF.Framework.Common.Schedulers;
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using MECF.Framework.RT.EquipmentLibrary.Devices;
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using System;
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using System.Collections.Concurrent;
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using System.Collections.Generic;
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using System.Linq;
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using System.Reflection;
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using System.Threading.Tasks;
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namespace SicModules.PMs
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{
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public enum IoGroupName
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{
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A, B, C, D, E, F, G, H, I, J, K, Final1, Final2, EPV2, V68, GasIn2, V72, ArSupply, GasSupply, All,
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V27, V888990, V76, V75, V70, V69, V25, V94, GroupIWithoutV94, V93V94V95, V96, V30, V31, V32, V35V36, V65, V93V95, V92V93V95,
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Final1WithOutV94, V97V87, V111
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};
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public enum MfcGroupName
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{
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Final1, Final2, M1to16, M2M9M15_M19toM26, M2toM45, M2toM40NoFinal1MFC, M27toM38, M2toM26, M2toM26M43M44M45, M27toM45, M19toM33, M36, M2829313540To42,
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M19toM26, All, M35M37, M35M36M37M38, M38
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};
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public partial class PMModule
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{
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[Tag("SignalTower")]
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public IoSignalTower SignalTower { get; set; }
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#region InterLock
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[Tag("PMInterLock")]
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public IoInterLock _pmInterLock { get; set; }
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#endregion InterLock
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#region Servo && TV
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[Tag("PMServo")]
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public SicMultipleServo _sicServo { get; set; }
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[Tag("PMHeatEnable")]
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public IoHeat _IoHeat { get; set; }
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[Tag("TV")]
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public IoThrottleValve2 _ioThrottleValve { get; set; }
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#endregion Servo && TV
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#region Valve
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[Tag("V25")]
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public IoValve V25 { get; set; }
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[Tag("V27")]
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public IoValve V27 { get; set; }
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[Tag("V30")]
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public IoValve V30 { get; set; }
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[Tag("V31")]
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public IoValve V31 { get; set; }
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[Tag("V32")]
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public IoValve V32 { get; set; }
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[Tag("V33")]
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public IoValve V33 { get; set; }
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[Tag("V33s")]
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public IoValve V33s { get; set; }
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[Tag("V35")]
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public IoValve V35 { get; set; }
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[Tag("V36")]
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public IoValve V36 { get; set; }
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[Tag("V37")]
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public IoValve V37 { get; set; }
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[Tag("V37s")]
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public IoValve V37s { get; set; }
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[Tag("V39")]
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public IoValve V39 { get; set; }
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[Tag("V39s")]
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public IoValve V39s { get; set; }
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[Tag("V40")]
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public IoValve V40 { get; set; }
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[Tag("V40s")]
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public IoValve V40s { get; set; }
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[Tag("V41")]
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public IoValve V41 { get; set; }
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[Tag("V42")]
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public IoValve V42 { get; set; }
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[Tag("V43")]
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public IoValve V43 { get; set; }
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[Tag("V43s")]
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public IoValve V43s { get; set; }
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[Tag("V45")]
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public IoValve V45 { get; set; }
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[Tag("V46")]
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public IoValve V46 { get; set; }
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[Tag("V46s")]
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public IoValve V46s { get; set; }
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[Tag("V48")]
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public IoValve V48 { get; set; }
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[Tag("V48s")]
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public IoValve V48s { get; set; }
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[Tag("V49")]
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public IoValve V49 { get; set; }
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[Tag("V50")]
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public IoValve V50 { get; set; }
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[Tag("V50s")]
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public IoValve V50s { get; set; }
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[Tag("V51")]
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public IoValve V51 { get; set; }
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[Tag("V51s")]
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public IoValve V51s { get; set; }
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[Tag("V52")]
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public IoValve V52 { get; set; }
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[Tag("V52s")]
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public IoValve V52s { get; set; }
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[Tag("V53")]
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public IoValve V53 { get; set; }
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[Tag("V53s")]
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public IoValve V53s { get; set; }
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[Tag("V54")]
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public IoValve V54 { get; set; }
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[Tag("V54s")]
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public IoValve V54s { get; set; }
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[Tag("V55")]
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public IoValve V55 { get; set; }
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[Tag("V56")]
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public IoValve V56 { get; set; }
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[Tag("V58")]
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public IoValve V58 { get; set; }
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[Tag("V58s")]
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public IoValve V58s { get; set; }
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[Tag("V59")]
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public IoValve V59 { get; set; }
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[Tag("V60")]
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public IoValve V60 { get; set; }
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[Tag("V61")]
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public IoValve V61 { get; set; }
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[Tag("V62")]
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public IoValve V62 { get; set; }
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[Tag("V63")]
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public IoValve V63 { get; set; }
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[Tag("V64")]
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public IoValve V64 { get; set; }
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[Tag("V65")]
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public IoValve V65 { get; set; }
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[Tag("V68")]
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public IoValve V68 { get; set; }
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[Tag("V69")]
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public IoValve V69 { get; set; }
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[Tag("V70")]
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public IoValve V70 { get; set; }
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[Tag("V72")]
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public IoValve V72 { get; set; }
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[Tag("V73")]
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public IoValve V73 { get; set; }
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[Tag("V74")]
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public IoValve V74 { get; set; }
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[Tag("V75")]
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public IoValve V75 { get; set; }
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[Tag("V76")]
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public IoValve V76 { get; set; }
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[Tag("V87")]
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public IoValve V87 { get; set; }
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[Tag("V88")]
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public IoValve V88 { get; set; }
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[Tag("V89")]
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public IoValve V89 { get; set; }
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[Tag("V90")]
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public IoValve V90 { get; set; }
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[Tag("V91")]
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public IoValve V91 { get; set; }
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[Tag("V93")]
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public IoValve V93 { get; set; }
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[Tag("V94")]
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public IoValve V94 { get; set; }
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[Tag("V95")]
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public IoValve V95 { get; set; }
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[Tag("V96")]
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public IoValve V96 { get; set; }
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[Tag("V97")]
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public IoValve V97 { get; set; }
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[Tag("EPV2")]
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public IoValve EPV2 { get; set; }
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#endregion Valve
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#region MFC
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[Tag("Mfc1")]
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public IoMFC Mfc1 { get; set; }
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[Tag("Mfc2")]
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public IoMFC Mfc2 { get; set; }
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[Tag("Mfc3")]
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public IoMFC Mfc3 { get; set; }
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[Tag("Mfc4")]
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public IoMFC Mfc4 { get; set; }
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[Tag("Mfc5")]
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public IoMFC Mfc5 { get; set; }
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[Tag("Mfc6")]
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public IoMFC Mfc6 { get; set; }
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[Tag("Mfc7")]
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public IoMFC Mfc7 { get; set; }
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[Tag("Mfc8")]
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public IoMFC Mfc8 { get; set; }
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[Tag("Mfc9")]
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public IoMFC Mfc9 { get; set; }
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[Tag("Mfc10")]
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public IoMFC Mfc10 { get; set; }
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[Tag("Mfc11")]
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public IoMFC Mfc11 { get; set; }
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[Tag("Mfc12")]
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public IoMFC Mfc12 { get; set; }
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[Tag("Mfc13")]
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public IoMFC Mfc13 { get; set; }
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[Tag("Mfc14")]
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public IoMFC Mfc14 { get; set; }
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[Tag("Mfc15")]
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public IoMFC Mfc15 { get; set; }
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[Tag("Mfc16")]
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public IoMFC Mfc16 { get; set; }
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[Tag("Mfc17")]
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public IoMFC Mfc17 { get; set; }
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[Tag("Mfc19")]
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public IoMFC Mfc19 { get; set; }
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[Tag("Mfc20")]
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public IoMFC Mfc20 { get; set; }
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[Tag("Mfc22")]
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public IoMFC Mfc22 { get; set; }
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[Tag("Mfc23")]
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public IoMFC Mfc23 { get; set; }
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[Tag("Mfc25")]
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public IoMFC Mfc25 { get; set; }
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[Tag("Mfc26")]
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public IoMFC Mfc26 { get; set; }
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[Tag("Mfc27")]
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public IoMFC Mfc27 { get; set; }
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[Tag("Mfc28")]
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public IoMFC Mfc28 { get; set; }
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[Tag("Mfc29")]
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public IoMFC Mfc29 { get; set; }
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[Tag("Mfc31")]
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public IoMFC Mfc31 { get; set; }
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[Tag("Mfc33")]
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public IoMFC Mfc33 { get; set; }
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[Tag("Mfc35")]
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public IoMFC Mfc35 { get; set; }
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[Tag("Mfc36")]
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public IoMFC Mfc36 { get; set; }
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[Tag("Mfc37")]
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public IoMFC Mfc37 { get; set; }
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[Tag("Mfc38")]
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public IoMFC Mfc38 { get; set; }
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[Tag("Mfc40")]
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public IoMFC Mfc40 { get; set; }
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[Tag("Mfc41")]
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public IoMFC Mfc41 { get; set; }
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[Tag("Mfc42")]
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public IoMFC Mfc42 { get; set; }
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[Tag("Mfc43")]
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public IoMFC Mfc43 { get; set; }
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[Tag("Mfc44")]
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public IoMFC Mfc44 { get; set; }
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[Tag("Mfc45")]
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public IoMFC Mfc45 { get; set; }
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#endregion MFC
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#region Pressure
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[Tag("Pressure1")]
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public IoPressure Pressure1 { get; set; }
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[Tag("Pressure2")]
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public IoPressure Pressure2 { get; set; }
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[Tag("Pressure3")]
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public IoPressure Pressure3 { get; set; }
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[Tag("Pressure4")]
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public IoPressure Pressure4 { get; set; }
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[Tag("Pressure5")]
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public IoPressure Pressure5 { get; set; }
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[Tag("Pressure6")]
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public IoPressure Pressure6 { get; set; }
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[Tag("Pressure7")]
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public IoPressure Pressure7 { get; set; }
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[Tag("PT1")]
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public IoPressure PT1 { get; set; }
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[Tag("PT2")]
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public IoPressure PT2 { get; set; }
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#endregion Pressure
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#region Sensor
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[Tag("SensorChamPressAboveATMSW")]
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public Aitex.Core.RT.Device.Devices.IoSensor SensorChamPressAboveATMSW { get; set; }
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[Tag("SensorDORPressATMSW")]
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public Aitex.Core.RT.Device.Devices.IoSensor SensorDORPressATMSW { get; set; }
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[Tag("SensorPMATMSW")]
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public Aitex.Core.RT.Device.Devices.IoSensor SensorPMATMSW { get; set; }
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//[Tag("CleanRoutineSucceed")]
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//public Aitex.Core.RT.Device.Devices.DoSensor CleanRoutineSucceed { get; set; }
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[Tag("SensorSusceptorAtSafeSpeed")]
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public Aitex.Core.RT.Device.Devices.IoSensor SensorSusceptorAtSafeSpeed { get; set; }
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#endregion Sensor
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#region ChamberMoveBody
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[Tag("IoChamberMoveBodySicMultiple")]
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public IoChamberMoveBody ChamberMoveBody { get; set; }
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#endregion ChamberMoveBody
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#region SHLidSwing
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[Tag("SHLidSwing")]
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public IoLidSwing SHLidSwing { get; set; }
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#endregion SHLidSwing
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#region ConfinementRing
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[Tag("ConfinementRing")]
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public IoConfinementRing ConfinementRing { get; set; }
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#endregion ConfinementRing
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#region Pump
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[Tag("Pump")]
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public Aitex.Core.RT.Device.Devices.IoPump Pump { get; set; }
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#endregion Pump
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#region Sevro
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[Subscription("PM1.NAISServo.AlarmStatus")]
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public bool IsAlarmStatus { get; set; }
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[Subscription("PM1.NAISServo.PositionComplete")]
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public bool IsPositionComplete { get; set; }
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[Subscription("PM1.NAISServo.MotorBusy")]
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public bool IsMotorBusy { get; set; }
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#endregion Sevro
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#region Heater
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[Tag("TC1")]
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public IoTC TC1 { get; set; }
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[Tag("TC2")]
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public IoTC TC2 { get; set; }
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[Tag("PSU1")]
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public IoPSU PSU1 { get; set; }
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[Tag("PSU2")]
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public IoPSU PSU2 { get; set; }
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[Tag("PSU3")]
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public IoPSU PSU3 { get; set; }
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[Tag("SCR1")]
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public IoSCR SCR1 { get; set; }
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[Tag("SCR2")]
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public IoSCR SCR2 { get; set; }
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[Tag("SCR3")]
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public IoSCR SCR3 { get; set; }
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#endregion Heater
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private Func<MemberInfo, bool> _hasTagAttribute;
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private Func<object, bool> _isTagAttribute;
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public override double ChamberPressure
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{
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get
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{
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if (PT1 != null)
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{
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return PT1.FeedBack;
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}
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return 0;
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}
|
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}
|
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public IAdsPlc Plc { get; set; }
|
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private ConcurrentBag<IDevice> _allModuleDevice = new ConcurrentBag<IDevice>();
|
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private List<string> _mfc = new List<string>()
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{
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"Mfc1", "Mfc2", "Mfc3", "Mfc4", "Mfc5", "Mfc6", "Mfc7", "Mfc8","Mfc9",
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"Mfc10", "Mfc11", "Mfc12", "Mfc13", "Mfc14", "Mfc15", "Mfc16","Mfc17","Mfc19",
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"Mfc20","Mfc22", "Mfc23", "Mfc26", "Mfc27", "Mfc28", "Mfc29",
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"Mfc31", "Mfc33", "Mfc34", "Mfc35", "Mfc36", "Mfc37", "Mfc38","Mfc31",
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"Mfc40", "Mfc41", "Mfc42", "Mfc43", "Mfc44", "Mfc45"};
|
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private List<int> _lstPcList = new List<int> { 1, 2, 3, 4, 5, 6, 7 };
|
||
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public List<IoMFC> _mfcList
|
||
{
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||
get
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||
{
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var list = new List<IoMFC>();
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||
list.Add(Mfc1);
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list.Add(Mfc2);
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list.Add(Mfc3);
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list.Add(Mfc4);
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list.Add(Mfc5);
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list.Add(Mfc6);
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list.Add(Mfc7);
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list.Add(Mfc8);
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list.Add(Mfc9);
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list.Add(Mfc10);
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list.Add(Mfc11);
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list.Add(Mfc12);
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list.Add(Mfc13);
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list.Add(Mfc14);
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list.Add(Mfc15);
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list.Add(Mfc16);
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list.Add(Mfc17);
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list.Add(Mfc19);
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list.Add(Mfc20);
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list.Add(Mfc22);
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list.Add(Mfc23);
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||
list.Add(Mfc25);
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||
list.Add(Mfc26);
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||
list.Add(Mfc27);
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||
list.Add(Mfc28);
|
||
list.Add(Mfc29);
|
||
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list.Add(Mfc31);
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||
list.Add(Mfc33);
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||
list.Add(Mfc35);
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||
list.Add(Mfc36);
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||
list.Add(Mfc37);
|
||
list.Add(Mfc38);
|
||
|
||
list.Add(Mfc40);
|
||
list.Add(Mfc41);
|
||
list.Add(Mfc42);
|
||
list.Add(Mfc43);
|
||
list.Add(Mfc44);
|
||
list.Add(Mfc45);
|
||
|
||
return list;
|
||
}
|
||
}
|
||
|
||
public List<IoPressure> _pcList
|
||
{
|
||
get
|
||
{
|
||
var list = new List<IoPressure>();
|
||
list.Add(Pressure1);
|
||
list.Add(Pressure2);
|
||
list.Add(Pressure3);
|
||
list.Add(Pressure4);
|
||
list.Add(Pressure5);
|
||
list.Add(Pressure6);
|
||
list.Add(Pressure7);
|
||
|
||
return list;
|
||
}
|
||
}
|
||
|
||
public void InitDevice()
|
||
{
|
||
if (SC.GetValue<bool>("System.IsSimulatorMode"))
|
||
{
|
||
Plc = DEVICE.GetOptionDevice($"{Module}.MainPLC", typeof(WcfPlc)) as IAdsPlc;
|
||
|
||
(Plc as WcfPlc).Initialize();
|
||
}
|
||
else
|
||
{
|
||
Plc = DEVICE.GetOptionDevice($"{Module}.MainPLC", typeof(SicAds)) as IAdsPlc;
|
||
|
||
(Plc as SicAds).Initialize();
|
||
}
|
||
|
||
if (Plc != null)
|
||
{
|
||
Plc.OnDeviceAlarmStateChanged += OnModuleDeviceAlarmStateChanged;
|
||
Plc.OnConnected += PlcConnected;
|
||
Plc.OnDisconnected += PlcDisconnected;
|
||
|
||
_allModuleDevice.Add(Plc);
|
||
}
|
||
|
||
_isTagAttribute = attribute => attribute is TagAttribute;
|
||
_hasTagAttribute = mi => mi.GetCustomAttributes(false).Any(_isTagAttribute);
|
||
Parallel.ForEach(this.GetType().GetProperties().Where(_hasTagAttribute),
|
||
field =>
|
||
{
|
||
if (!(field.GetCustomAttributes(false).First(_isTagAttribute) is TagAttribute tag))
|
||
return;
|
||
|
||
var device = DEVICE.GetDevice<IDevice>($"{Module}.{tag.Tag}");
|
||
|
||
if (device == null)
|
||
{
|
||
LOG.Error($"Device {tag.Tag} is not found");
|
||
return;
|
||
}
|
||
|
||
device.OnDeviceAlarmStateChanged += OnModuleDeviceAlarmStateChanged;
|
||
|
||
_allModuleDevice.Add(device);
|
||
|
||
var pi = (PropertyInfo)field;
|
||
|
||
var convertedValue = Convert.ChangeType(device, pi.PropertyType);
|
||
|
||
System.Diagnostics.Debug.Assert(convertedValue != null);
|
||
|
||
pi.SetValue(this, convertedValue);
|
||
});
|
||
|
||
if (_pmInterLock == null)
|
||
{
|
||
_pmInterLock = DEVICE.GetDevice<IoInterLock>($"{Module}.PMInterLock");
|
||
}
|
||
}
|
||
|
||
private void StopRamp()
|
||
{
|
||
SetMfcStopRampByGroup(MfcGroupName.All);
|
||
SetPCStopRamp(_lstPcList);
|
||
SetHeaterStopRamp();
|
||
SetTVStopRamp();
|
||
SetRotationStopRamp();
|
||
|
||
//_ioThrottleValve.StopRamp();
|
||
}
|
||
|
||
private void StopProcess()
|
||
{
|
||
SetHeatEnable(false);
|
||
SetServoSpeed(0, 1);
|
||
|
||
SetIOValueByGroup(IoGroupName.B, false);
|
||
SetIOValueByGroup(IoGroupName.C, false);
|
||
SetIOValueByGroup(IoGroupName.E, false);
|
||
SetIOValueByGroup(IoGroupName.F, false);
|
||
SetIOValueByGroup(IoGroupName.H, false);
|
||
SetIOValueByGroup(IoGroupName.K, false);
|
||
SetIOValueByGroup(IoGroupName.A, true);
|
||
|
||
SetMfcToDefaultByGroupRamp(MfcGroupName.M1to16, SC.GetConfigItem($"PM.{Module}.ProcessIdle.MFC1to16RampTime").IntValue);
|
||
SetMfcToDefaultByGroupRamp(MfcGroupName.M2toM45, SC.GetConfigItem($"PM.{Module}.ProcessIdle.MFC19to40RampTime").IntValue);
|
||
}
|
||
|
||
private void PlcDisconnected()
|
||
{
|
||
CheckToPostMessage(MSG.Disconnected);
|
||
}
|
||
|
||
private void PlcConnected()
|
||
{
|
||
CheckToPostMessage(MSG.Connected);
|
||
}
|
||
|
||
private void OnModuleDeviceAlarmStateChanged(string deviceId, AlarmEventItem alarmItem)
|
||
{
|
||
if (!alarmItem.IsAcknowledged)
|
||
{
|
||
if (alarmItem.Level == EventLevel.Alarm)
|
||
{
|
||
EV.PostAlarmLog(alarmItem.Source, alarmItem.Description);
|
||
}
|
||
else
|
||
{
|
||
EV.PostWarningLog(alarmItem.Source, alarmItem.Description);
|
||
}
|
||
}
|
||
}
|
||
|
||
public bool CheckIsEableMonitor()
|
||
{
|
||
if (!IsAlarmStatus && !IsMotorBusy && IsPositionComplete)
|
||
return true;
|
||
return false;
|
||
}
|
||
|
||
public bool CheckServoAlarm()
|
||
{
|
||
return IsAlarmStatus;
|
||
}
|
||
|
||
public bool CheckServoIsBusy()
|
||
{
|
||
return IsMotorBusy;
|
||
}
|
||
|
||
public bool CheckServoPositionComplete()
|
||
{
|
||
return IsPositionComplete;
|
||
}
|
||
|
||
public override bool CheckAcked(int entityTaskToken)
|
||
{
|
||
return true;
|
||
}
|
||
|
||
public override void Terminate()
|
||
{
|
||
}
|
||
|
||
public override void Reset()
|
||
{
|
||
}
|
||
|
||
public override bool Home()
|
||
{
|
||
return true;
|
||
}
|
||
|
||
public override bool IsProcessed()
|
||
{
|
||
return true;
|
||
}
|
||
|
||
public override bool IsPrepareTransferReady(ModuleName robot, EnumTransferType type, int slot)
|
||
{
|
||
if (SC.GetValue<bool>("System.IsATMMode"))
|
||
{
|
||
return true;
|
||
}
|
||
else if (SC.GetConfigItem("TM.NeedPressureBalance").BoolValue)
|
||
{
|
||
if (Math.Abs(SC.GetConfigItem("TM.PressureBalance.BalancePressure").DoubleValue - GetChamberPressure()) > SC.GetConfigItem("TM.PressureBalance.BalanceMaxDiffPressure").DoubleValue)
|
||
{
|
||
return false;
|
||
}
|
||
}
|
||
return true;
|
||
}
|
||
|
||
public override bool PrepareTransfer(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType, out string reason)
|
||
{
|
||
reason = string.Empty;
|
||
return true;
|
||
}
|
||
|
||
public override int InvokePrepareTransfer(ModuleName robot, EnumTransferType type, int slot)
|
||
{
|
||
if (CheckToPostMessage((int)MSG.PrepareTransfer, robot, slot))
|
||
return 0;
|
||
return 0;
|
||
}
|
||
|
||
public override int InvokeProcess(string recipeName, bool isCleanRecipe, bool withWafer)
|
||
{
|
||
SC.SetItemValue($"PM.{Module}.LastRecipeName", recipeName); // 记录最后一次工艺文件名称
|
||
|
||
CheckToPostMessage((int)MSG.RunRecipe, recipeName, isCleanRecipe, withWafer);
|
||
|
||
return 0;
|
||
}
|
||
|
||
public override int InvokeCleanProcess(string recipeName)
|
||
{
|
||
CheckToPostMessage((int)MSG.CleanProcess, recipeName);
|
||
return 0;
|
||
}
|
||
|
||
public override bool InvokeCheckHeaterDisable()
|
||
{
|
||
return CheckHeatEnableTC(false, true) && CheckHeatEnableTC(false, true);
|
||
}
|
||
|
||
public override int InvokeSetHeatDisable()
|
||
{
|
||
if (CheckToPostMessage((int)MSG.StopHeat))
|
||
return 0;
|
||
|
||
return 0;
|
||
}
|
||
|
||
#region pump device operation
|
||
|
||
public override bool PreparePump(out string reason)
|
||
{
|
||
//if (!VentValve.TurnValve(false, out reason))
|
||
// return false;
|
||
|
||
//if (!GasLine1.SetFlow(out reason, 0, 0))
|
||
// return false;
|
||
|
||
//if (!GasLine2.SetFlow(out reason, 0, 0))
|
||
// return false;
|
||
|
||
//if (!GasLine3.SetFlow(out reason, 0, 0))
|
||
// return false;
|
||
|
||
//if (!GasLine4.SetFlow(out reason, 0, 0))
|
||
// return false;
|
||
|
||
//if (!FinalValve.TurnValve(false, out reason))
|
||
// return false;
|
||
|
||
//if (!Microwave.SetPowerOnOff(false, out reason))
|
||
// return false;
|
||
|
||
//if (!Rf.SetPowerOnOff(false, out reason))
|
||
// return false;
|
||
|
||
reason = string.Empty;
|
||
return true;
|
||
}
|
||
|
||
public override bool CheckPreparePump()
|
||
{
|
||
//if (FinalValve.Status)
|
||
// return false;
|
||
//if (VentValve.Status)
|
||
// return false;
|
||
//if (Microwave.IsRfOn)
|
||
// return false;
|
||
//if (Rf.IsRfOn)
|
||
// return false;
|
||
return true;
|
||
}
|
||
|
||
public override bool TurnOnPump(out string reason)
|
||
{
|
||
reason = string.Empty;
|
||
return false;//MainPump.SetPump(out reason, 0, true);
|
||
}
|
||
|
||
public override bool ShutDownPump(out string reason)
|
||
{
|
||
reason = string.Empty;
|
||
return false; //MainPump.SetPump(out reason, 0, false);
|
||
}
|
||
|
||
public override bool CheckPumpIsOn()
|
||
{
|
||
return Pump.DryPump1Running;//MainPump.IsRunning;
|
||
}
|
||
|
||
public override bool SlowPump(int tvPosition, out string reason)
|
||
{
|
||
reason = string.Empty;
|
||
return true;
|
||
}
|
||
|
||
public override bool FastPump(int tvPosition, out string reason)
|
||
{
|
||
reason = string.Empty;
|
||
return true;
|
||
}
|
||
|
||
public override bool AbortPump()
|
||
{
|
||
return true;
|
||
}
|
||
|
||
#endregion pump device operation
|
||
|
||
#region vent device operation
|
||
|
||
public override bool PrepareVent(out string reason)
|
||
{
|
||
//if (!ThrottleValve.SetMode(PressureCtrlMode.TVPositionCtrl, out reason))
|
||
//{
|
||
// return false;
|
||
//}
|
||
|
||
//if (!ThrottleValve.SetPosition(0, out reason))
|
||
// return false;
|
||
|
||
//if (!PumpValve.TurnValve(false, out reason))
|
||
// return false;
|
||
|
||
//if (!GasLine1.SetFlow(out reason, 0, 0))
|
||
// return false;
|
||
|
||
//if (!GasLine2.SetFlow(out reason, 0, 0))
|
||
// return false;
|
||
|
||
//if (!GasLine3.SetFlow(out reason, 0, 0))
|
||
// return false;
|
||
|
||
//if (!GasLine4.SetFlow(out reason, 0, 0))
|
||
// return false;
|
||
|
||
//if (!FinalValve.TurnValve(false, out reason))
|
||
// return false;
|
||
|
||
//if (!Microwave.SetPowerOnOff(false, out reason))
|
||
// return false;
|
||
|
||
//if (!Rf.SetPowerOnOff(false, out reason))
|
||
// return false;
|
||
|
||
reason = string.Empty;
|
||
return true;
|
||
}
|
||
|
||
public override bool CheckPrepareVent()
|
||
{
|
||
//if (FinalValve.Status)
|
||
// return false;
|
||
//if (PumpValve.Status)
|
||
// return false;
|
||
//if (ThrottleValve.PositionFeedback >0.1)
|
||
// return false;
|
||
//if (Microwave.IsRfOn)
|
||
// return false;
|
||
//if (Rf.IsRfOn)
|
||
// return false;
|
||
return true;
|
||
}
|
||
|
||
public override bool Vent(out string reason)
|
||
{
|
||
//if (!VentValve.TurnValve(true, out reason))
|
||
//{
|
||
// LOG.Write(reason);
|
||
// return false;
|
||
//}
|
||
reason = string.Empty;
|
||
return true;
|
||
}
|
||
|
||
public override bool StopVent(out string reason)
|
||
{
|
||
//if (!VentValve.TurnValve(false, out reason))
|
||
//{
|
||
// LOG.Write(reason);
|
||
// return false;
|
||
//}
|
||
reason = string.Empty;
|
||
return true;
|
||
}
|
||
|
||
#endregion vent device operation
|
||
|
||
public bool CheckIsConnected()
|
||
{
|
||
return Plc.CheckIsConnected();
|
||
}
|
||
|
||
public bool CheckHasAlarm()
|
||
{
|
||
foreach (var device in _allModuleDevice)
|
||
{
|
||
if (device.HasAlarm)
|
||
return true;
|
||
}
|
||
|
||
return false;
|
||
}
|
||
|
||
public override bool CheckSlitValveClose()
|
||
{
|
||
if (Module == ModuleName.PM1.ToString())
|
||
{
|
||
return DEVICE.GetDevice<IoSensor>("TM.ReactorADoorClosed").Value;
|
||
}
|
||
else
|
||
{
|
||
return DEVICE.GetDevice<IoSensor>("TM.ReactorBDoorClosed").Value;
|
||
}
|
||
}
|
||
|
||
/// <summary>
|
||
/// 获取组内的IoValue名称集合
|
||
/// </summary>
|
||
/// <param name="eGroupName"></param>6
|
||
/// <returns></returns>
|
||
public List<string> GetIoListByGroupName(IoGroupName eGroupName)
|
||
{
|
||
List<string> lst = new List<string>();
|
||
if (eGroupName == IoGroupName.V72)
|
||
{
|
||
lst = new List<string>() { "V72" };
|
||
}
|
||
else if (eGroupName == IoGroupName.ArSupply)
|
||
{
|
||
lst = new List<string>() { "V32", "V35", "V36" };
|
||
}
|
||
else if (eGroupName == IoGroupName.V35V36)
|
||
{
|
||
lst = new List<string>() { "V35", "V36" };
|
||
}
|
||
else if (eGroupName == IoGroupName.GasSupply)
|
||
{
|
||
lst = new List<string>() { "V31", "V32", "V35", "V36" };
|
||
}
|
||
else if (eGroupName == IoGroupName.V30)
|
||
{
|
||
lst = new List<string>() { "V30" };
|
||
}
|
||
else if (eGroupName == IoGroupName.V31)
|
||
{
|
||
lst = new List<string>() { "V31" };
|
||
}
|
||
else if (eGroupName == IoGroupName.V32)
|
||
{
|
||
lst = new List<string>() { "V32" };
|
||
}
|
||
else if (eGroupName == IoGroupName.A)
|
||
{
|
||
lst = new List<string>() { "V33s", "V65", "V68" };
|
||
}
|
||
else if (eGroupName == IoGroupName.B)
|
||
{
|
||
lst = new List<string>() { "V33", "V64" };
|
||
}
|
||
else if (eGroupName == IoGroupName.C)
|
||
{
|
||
lst = new List<string>() { "V43", "V48" };
|
||
}
|
||
else if (eGroupName == IoGroupName.D)
|
||
{
|
||
lst = new List<string>() { "V45", "V49" };
|
||
}
|
||
else if (eGroupName == IoGroupName.E)
|
||
{
|
||
lst = new List<string>() { "V46", "V50" };
|
||
}
|
||
else if (eGroupName == IoGroupName.F)
|
||
{
|
||
lst = new List<string>() { "V39", "V40", "V41", "V53", "V54", "V59" };
|
||
}
|
||
else if (eGroupName == IoGroupName.G)
|
||
{
|
||
lst = new List<string>() { "V42", "V60" };
|
||
}
|
||
else if (eGroupName == IoGroupName.H)
|
||
{
|
||
lst = new List<string>() { "V51", "V52", "V58", "V37s" };
|
||
}
|
||
else if (eGroupName == IoGroupName.I)
|
||
{
|
||
lst = new List<string>() { "V87", "V88", "V89", "V90", "V91", "V93", "V94", "V95", "V96", "V97" };
|
||
}
|
||
else if (eGroupName == IoGroupName.J)
|
||
{
|
||
lst = new List<string>() { "V61", "V62", "V63" };
|
||
}
|
||
else if (eGroupName == IoGroupName.K)
|
||
{
|
||
lst = new List<string>() { "V69", "V73", "V74", "V111" };
|
||
}
|
||
else if (eGroupName == IoGroupName.Final1)
|
||
{
|
||
lst = new List<string>() { "V93", "V94", "V95", "V96" };
|
||
}
|
||
else if (eGroupName == IoGroupName.V93V95)
|
||
{
|
||
lst = new List<string>() { "V93", "V95" };
|
||
}
|
||
else if (eGroupName == IoGroupName.V92V93V95)
|
||
{
|
||
lst = new List<string>() { "V92", "V93", "V95" };
|
||
}
|
||
else if (eGroupName == IoGroupName.Final1WithOutV94)
|
||
{
|
||
lst = new List<string>() { "V93", "V95", "V96" };
|
||
}
|
||
else if (eGroupName == IoGroupName.Final2)
|
||
{
|
||
lst = new List<string>() { "V87", "V88", "V89", "V90", "V91", "V97" };
|
||
}
|
||
else if (eGroupName == IoGroupName.V68)
|
||
{
|
||
lst = new List<string> { "V68" };
|
||
}
|
||
else if (eGroupName == IoGroupName.EPV2)
|
||
{
|
||
lst = new List<string> { "EPV2" };
|
||
}
|
||
else if (eGroupName == IoGroupName.V111)
|
||
{
|
||
lst = new List<string> { "V111" };
|
||
}
|
||
else if (eGroupName == IoGroupName.V27)
|
||
{
|
||
lst = new List<string> { "V27" };
|
||
}
|
||
else if (eGroupName == IoGroupName.V75)
|
||
{
|
||
lst = new List<string> { "V75" };
|
||
}
|
||
else if (eGroupName == IoGroupName.V76)
|
||
{
|
||
lst = new List<string> { "V76" };
|
||
}
|
||
else if (eGroupName == IoGroupName.V69)
|
||
{
|
||
lst = new List<string> { "V69" };
|
||
}
|
||
else if (eGroupName == IoGroupName.V70)
|
||
{
|
||
lst = new List<string> { "V70" };
|
||
}
|
||
else if (eGroupName == IoGroupName.V25)
|
||
{
|
||
lst = new List<string> { "V25" };
|
||
}
|
||
else if (eGroupName == IoGroupName.V65)
|
||
{
|
||
lst = new List<string> { "V65" };
|
||
}
|
||
else if (eGroupName == IoGroupName.V94)
|
||
{
|
||
lst = new List<string> { "V94" };
|
||
}
|
||
else if (eGroupName == IoGroupName.V93V94V95)
|
||
{
|
||
lst = new List<string> { "V93", "V94", "V95" };
|
||
}
|
||
else if (eGroupName == IoGroupName.V93V95)
|
||
{
|
||
lst = new List<string> { "V93", "V95" };
|
||
}
|
||
else if (eGroupName == IoGroupName.V96)
|
||
{
|
||
lst = new List<string> { "V96" };
|
||
}
|
||
else if (eGroupName == IoGroupName.V97V87)
|
||
{
|
||
lst = new List<string>() { "V97", "V87" };
|
||
}
|
||
else if (eGroupName == IoGroupName.GroupIWithoutV94)
|
||
{
|
||
lst = new List<string> { "V87", "V88", "V89", "V97", "V90", "V91", "V93", "V95", "V96" };
|
||
}
|
||
else if (eGroupName == IoGroupName.All)
|
||
{
|
||
lst = new List<string> { "V32","V33",
|
||
"V48","V49","V50","V45","V43","V46","V37s",
|
||
"V39", "V40", "V41", "V51", "V52","V53","V54","V55","V58","V59","V60","V61",
|
||
"V62", "V63", "V87", "V88","V89", "V97", "V90","V91","V93","V94","V95","V96","V97","V75","V76",
|
||
"V27", "V69", "V72", "V73", "V74"};
|
||
}
|
||
return lst;
|
||
}
|
||
|
||
/// <summary>
|
||
/// 获取组内的MFC名称集合
|
||
/// </summary>
|
||
/// <param name="mGroupName"></param>
|
||
/// <returns></returns>
|
||
public List<int> GetMfcListByGroupName(MfcGroupName mGroupName)
|
||
{
|
||
List<int> lst = new List<int>();
|
||
if (mGroupName == MfcGroupName.Final1)
|
||
{
|
||
lst = new List<int>() { 35, 36, 37, 38 };
|
||
}
|
||
else if (mGroupName == MfcGroupName.Final2)
|
||
{
|
||
lst = new List<int>() { 27, 28, 29, 31, 33, 40, 41, 42 };
|
||
}
|
||
else if (mGroupName == MfcGroupName.M1to16)
|
||
{
|
||
lst = new List<int>() { 1, 3, 4, 5, 6, 7, 8, 10, 11, 12, 13, 14, 16 };
|
||
}
|
||
else if (mGroupName == MfcGroupName.M2M9M15_M19toM26)
|
||
{
|
||
lst = new List<int>() { 2, 9, 15, 19, 20, 22, 23, 25, 26 };
|
||
}
|
||
else if (mGroupName == MfcGroupName.M2toM45)
|
||
{
|
||
lst = new List<int>() { 2, 9, 15,17, 19, 20, 22, 23, 25, 26, 27, 28, 29, 31, 33, 35, 36, 37, 38, 40, 41, 42, 43, 44, 45 };
|
||
}
|
||
else if (mGroupName == MfcGroupName.M2toM40NoFinal1MFC)
|
||
{
|
||
lst = new List<int>() { 2, 9, 15, 19, 20, 22, 23, 25, 26, 27, 28, 29, 31, 33, 40 };
|
||
}
|
||
else if (mGroupName == MfcGroupName.M27toM38)
|
||
{
|
||
lst = new List<int>() { 27, 28, 29, 40, 31, 32, 33, 35, 36, 37, 38 };
|
||
}
|
||
else if (mGroupName == MfcGroupName.M2toM26M43M44M45)
|
||
{
|
||
lst = new List<int>() { 2, 15, 9,17, 19, 20, 22, 23, 25, 26, 43 ,44 , 45};
|
||
}
|
||
else if (mGroupName == MfcGroupName.M2toM26)
|
||
{
|
||
lst = new List<int>() { 2, 9, 15, 19, 20, 22, 23, 25, 26};
|
||
}
|
||
else if (mGroupName == MfcGroupName.M19toM26)
|
||
{
|
||
lst = new List<int>() { 19, 20, 21, 22, 23, 24, 25, 26 };
|
||
}
|
||
else if (mGroupName == MfcGroupName.M27toM45)
|
||
{
|
||
lst = new List<int>() { 27, 28, 29, 31, 33, 32, 35, 36, 37, 38, 40 ,41 ,42 ,43 ,44, 45};
|
||
}
|
||
else if (mGroupName == MfcGroupName.M2829313540To42)
|
||
{
|
||
lst = new List<int>() { 28, 29, 31,35, 40, 41,42};
|
||
}
|
||
else if (mGroupName == MfcGroupName.M19toM33)
|
||
{
|
||
lst = new List<int>() { 19, 20, 22, 23, 25, 26, 27, 28, 29, 40, 31, 32, 33, 2, 15, 9 };
|
||
}
|
||
else if (mGroupName == MfcGroupName.M36)
|
||
{
|
||
lst = new List<int>() { 36 };
|
||
}
|
||
else if (mGroupName == MfcGroupName.M38)
|
||
{
|
||
lst = new List<int>() { 38 };
|
||
}
|
||
else if (mGroupName == MfcGroupName.M35M37)
|
||
{
|
||
lst = new List<int>() { 35, 37 };
|
||
}
|
||
else if (mGroupName == MfcGroupName.M35M36M37M38)
|
||
{
|
||
lst = new List<int>() { 35, 36, 37, 38 };
|
||
}
|
||
else if (mGroupName == MfcGroupName.All)
|
||
{
|
||
lst = new List<int>() { 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 19, 20, 22, 23, 25, 26, 27, 28, 29, 31, 33, 35, 36, 37, 38, 40, 41, 42, 43, 44, 45 };
|
||
}
|
||
|
||
return lst;
|
||
}
|
||
|
||
/// <summary>
|
||
/// 设置MFC到默认值
|
||
/// </summary>
|
||
/// <param name="lstMFCID"></param>
|
||
/// <returns></returns>
|
||
public bool SetMfcValueToDefault(List<int> lstMFCID)
|
||
{
|
||
foreach (int mfcID in lstMFCID)
|
||
{
|
||
IoMFC device = DEVICE.GetDevice<IoMFC>($"{Module}.Mfc{mfcID}");
|
||
if (device == null)
|
||
{
|
||
return false;
|
||
}
|
||
}
|
||
|
||
foreach (int mfcID in lstMFCID)
|
||
{
|
||
IoMFC device = (IoMFC)DEVICE.GetDevice<IoMFC>($"{Module}.Mfc{mfcID}");
|
||
device.SetToDefaultByRamp(0);
|
||
}
|
||
|
||
return true;
|
||
}
|
||
|
||
/// <summary>
|
||
/// 设置MFC到默认值
|
||
/// </summary>
|
||
/// <param name="lstMFCID"></param>
|
||
/// <returns></returns>
|
||
public bool SetMfcValueToDefaultByRamp(List<int> lstMFCID, int time)
|
||
{
|
||
foreach (int mfcID in lstMFCID)
|
||
{
|
||
IoMFC device = DEVICE.GetDevice<IoMFC>($"{Module}.Mfc{mfcID}");
|
||
if (device == null)
|
||
{
|
||
return false;
|
||
}
|
||
}
|
||
|
||
foreach (int mfcID in lstMFCID)
|
||
{
|
||
IoMFC device = (IoMFC)DEVICE.GetDevice<IoMFC>($"{Module}.Mfc{mfcID}");
|
||
device.SetToDefaultByRamp(time);
|
||
}
|
||
|
||
return true;
|
||
}
|
||
|
||
public bool SetMfcPurgeValue(List<int> lstMFCID, string configName, int time)
|
||
{
|
||
foreach (int mfcID in lstMFCID)
|
||
{
|
||
IoMFC device = DEVICE.GetDevice<IoMFC>($"{Module}.Mfc{mfcID}");
|
||
if (device == null)
|
||
{
|
||
return false;
|
||
}
|
||
}
|
||
|
||
foreach (int mfcID in lstMFCID)
|
||
{
|
||
double value = SC.GetValue<double>($"PM.{Module}.{configName}.Mfc{mfcID}Flow");
|
||
IoMFC device = (IoMFC)DEVICE.GetDevice<IoMFC>($"{Module}.Mfc{mfcID}");
|
||
device.Ramp(value, time);
|
||
}
|
||
|
||
return true;
|
||
}
|
||
|
||
/// <summary>
|
||
/// 设置MFC的值
|
||
/// </summary>
|
||
/// <param name="lstMFCID"></param>
|
||
/// <param name="toDefaultValue"></param>
|
||
/// <param name="value"></param>
|
||
/// <returns></returns>
|
||
public bool SetMfcValue(List<int> lstMFCID, double value, int time)
|
||
{
|
||
foreach (int mfcID in lstMFCID)
|
||
{
|
||
IoMFC device = DEVICE.GetDevice<IoMFC>($"{Module}.Mfc{mfcID}");
|
||
if (device == null)
|
||
{
|
||
return false;
|
||
}
|
||
}
|
||
|
||
foreach (int mfcID in lstMFCID)
|
||
{
|
||
IoMFC device = (IoMFC)DEVICE.GetDevice<IoMFC>($"{Module}.Mfc{mfcID}");
|
||
device.Ramp(value, time);
|
||
}
|
||
|
||
return true;
|
||
}
|
||
|
||
public bool SetMfcModelToNormal(List<int> lstMFCID)
|
||
{
|
||
foreach (int mfcID in lstMFCID)
|
||
{
|
||
IoMFC device = DEVICE.GetDevice<IoMFC>($"{Module}.Mfc{mfcID}");
|
||
if (device == null)
|
||
{
|
||
return false;
|
||
}
|
||
}
|
||
|
||
foreach (int mfcID in lstMFCID)
|
||
{
|
||
IoMFC device = (IoMFC)DEVICE.GetDevice<IoMFC>($"{Module}.Mfc{mfcID}");
|
||
device.SetMfcMode(MfcCtrlMode.Normal, out string reason);
|
||
}
|
||
|
||
return true;
|
||
}
|
||
|
||
/// <summary>
|
||
/// 设置MFC动态流量的值
|
||
/// </summary>
|
||
/// <param name="lstMFCID"></param>
|
||
/// <param name="toDefaultValue"></param>
|
||
/// <param name="value"></param>
|
||
/// <returns></returns>
|
||
public bool SetMfcValueRampByPress(List<int> lstMFCID, double press)
|
||
{
|
||
//检查MFC是否存在
|
||
foreach (int mfcID in lstMFCID)
|
||
{
|
||
IoMFC device = DEVICE.GetDevice<IoMFC>($"{Module}.Mfc{mfcID}");
|
||
if (device == null)
|
||
{
|
||
return false;
|
||
}
|
||
}
|
||
|
||
foreach (int mfcID in lstMFCID)
|
||
{
|
||
IoMFC device = (IoMFC)DEVICE.GetDevice<IoMFC>($"{Module}.Mfc{mfcID}");
|
||
|
||
//根据特殊的参数获取特定的目标值和Ramp时间
|
||
double setValue = 0;
|
||
int time = 0;
|
||
GetMfcDynamicFlowRampValueAndTime($"Mfc{mfcID}", press, out setValue, out time);
|
||
|
||
device.Ramp(setValue, time * 1000);
|
||
}
|
||
|
||
return true;
|
||
}
|
||
|
||
/// <summary>
|
||
/// MFC28,29,31,40设置为特定值
|
||
/// </summary>
|
||
/// <param name="mfc28Flow"></param>
|
||
/// <param name="mfc29Flow"></param>
|
||
/// <param name="mfc31Flow"></param>
|
||
/// <param name="mfc40Flow"></param>
|
||
/// <returns></returns>
|
||
public bool SetMFC28to40Special(double mfc28Flow, double mfc29Flow, double mfc31Flow, double mfc40Flow, int rampTime)
|
||
{
|
||
IoMFC device28 = (IoMFC)DEVICE.GetDevice<IoMFC>($"{Module}.Mfc28");
|
||
IoMFC device29 = (IoMFC)DEVICE.GetDevice<IoMFC>($"{Module}.Mfc29");
|
||
IoMFC device31 = (IoMFC)DEVICE.GetDevice<IoMFC>($"{Module}.Mfc31");
|
||
IoMFC device40 = (IoMFC)DEVICE.GetDevice<IoMFC>($"{Module}.Mfc40");
|
||
|
||
if (device28 == null || device29 == null || device31 == null || device40 == null)
|
||
{
|
||
return false;
|
||
}
|
||
|
||
device28.Ramp(mfc28Flow, rampTime * 1000);
|
||
device29.Ramp(mfc29Flow, rampTime * 1000);
|
||
device31.Ramp(mfc31Flow, rampTime * 1000);
|
||
device40.Ramp(mfc40Flow, rampTime * 1000);
|
||
return true;
|
||
}
|
||
|
||
private void GetMfcDynamicFlowRampValueAndTime(string mfcName, double press, out double setValue, out int time)
|
||
{
|
||
setValue = 0;
|
||
time = 0;
|
||
try
|
||
{
|
||
string mfcFlowStr = "";
|
||
string configStr = "";
|
||
|
||
configStr = SC.GetConfigItem($"PM.{Module}.{mfcName}DynamicFlow").StringValue;
|
||
|
||
string[] array = configStr.Split(',');
|
||
if (array.Length >= 10)
|
||
{
|
||
//int index = (int)press / 100;
|
||
|
||
//index = index >= 9 ? 9 : index;
|
||
|
||
//mfcFlowStr = array[index];
|
||
|
||
if (press >= 20 && press < 100)
|
||
{
|
||
mfcFlowStr = array[0];
|
||
}
|
||
else if (press >= 100 && press < 200)
|
||
{
|
||
mfcFlowStr = array[1];
|
||
}
|
||
else if (press >= 200 && press < 300)
|
||
{
|
||
mfcFlowStr = array[2];
|
||
}
|
||
else if (press >= 300 && press < 400)
|
||
{
|
||
mfcFlowStr = array[3];
|
||
}
|
||
else if (press >= 400 && press < 500)
|
||
{
|
||
mfcFlowStr = array[4];
|
||
}
|
||
else if (press >= 500 && press < 600)
|
||
{
|
||
mfcFlowStr = array[5];
|
||
}
|
||
else if (press >= 600 && press < 700)
|
||
{
|
||
mfcFlowStr = array[6];
|
||
}
|
||
else if (press >= 700 && press < 800)
|
||
{
|
||
mfcFlowStr = array[7];
|
||
}
|
||
else if (press >= 800 && press < 900)
|
||
{
|
||
mfcFlowStr = array[8];
|
||
}
|
||
else if (press >= 900)
|
||
{
|
||
mfcFlowStr = array[9];
|
||
}
|
||
}
|
||
|
||
string[] mfcDetail = mfcFlowStr.Split('*');
|
||
if (mfcDetail.Length == 2)
|
||
{
|
||
if (!double.TryParse(mfcDetail[0], out setValue))
|
||
{
|
||
setValue = 0;
|
||
time = 0;
|
||
return;
|
||
}
|
||
if (!Int32.TryParse(mfcDetail[1], out time))
|
||
{
|
||
time = 0;
|
||
return;
|
||
}
|
||
}
|
||
}
|
||
catch (Exception)
|
||
{ }
|
||
}
|
||
|
||
/// <summary>
|
||
/// 设置MFC的值(按最大值的百分比)
|
||
/// </summary>
|
||
/// <param name="lstMFCID"></param>
|
||
/// <param name="toDefaultValue"></param>
|
||
/// <param name="value"></param>
|
||
/// <returns></returns>
|
||
public bool SetMfcValueByPercent(int mfcID, double percent)
|
||
{
|
||
IoMFC device = DEVICE.GetDevice<IoMFC>($"{Module}.Mfc{mfcID}");
|
||
if (device == null)
|
||
{
|
||
return false;
|
||
}
|
||
|
||
double setPoint = device.Scale * percent / 100;
|
||
device.Ramp(setPoint, 0);
|
||
return true;
|
||
}
|
||
|
||
/// <summary>
|
||
/// MFC停止Ramp
|
||
/// </summary>
|
||
/// <param name="lstMFCID"></param>
|
||
/// <returns></returns>
|
||
public bool SetMfcStopRamp(List<int> lstMFCID)
|
||
{
|
||
foreach (int mfcID in lstMFCID)
|
||
{
|
||
IoMFC device = DEVICE.GetDevice<IoMFC>($"{Module}.Mfc{mfcID}");
|
||
if (device == null)
|
||
{
|
||
return false;
|
||
}
|
||
}
|
||
|
||
foreach (int mfcID in lstMFCID)
|
||
{
|
||
IoMFC device = (IoMFC)DEVICE.GetDevice<IoMFC>($"{Module}.Mfc{mfcID}");
|
||
device.StopRamp();
|
||
}
|
||
|
||
return true;
|
||
}
|
||
|
||
/// <summary>
|
||
/// 设置PC到默认值
|
||
/// </summary>
|
||
/// <param name="lstPCID"></param>
|
||
/// <returns></returns>
|
||
public bool SetPCValueToDefault(List<int> lstPCID)
|
||
{
|
||
foreach (int pcID in lstPCID)
|
||
{
|
||
IoPressure device = DEVICE.GetDevice<IoPressure>($"{Module}.Pressure{pcID}");
|
||
if (device == null)
|
||
{
|
||
return false;
|
||
}
|
||
}
|
||
|
||
foreach (int pcID in lstPCID)
|
||
{
|
||
IoPressure device = (IoPressure)DEVICE.GetDevice<IoPressure>($"{Module}.Pressure{pcID}");
|
||
device.Terminate();
|
||
}
|
||
|
||
return true;
|
||
}
|
||
|
||
/// <summary>
|
||
/// 设置PC,停止Ramp
|
||
/// </summary>
|
||
/// <param name="lstPCID"></param>
|
||
/// <returns></returns>
|
||
public bool SetPCStopRamp(List<int> lstPCID)
|
||
{
|
||
foreach (int pcID in lstPCID)
|
||
{
|
||
IoPressure device = DEVICE.GetDevice<IoPressure>($"{Module}.Pressure{pcID}");
|
||
if (device == null)
|
||
{
|
||
return false;
|
||
}
|
||
}
|
||
|
||
foreach (int pcID in lstPCID)
|
||
{
|
||
IoPressure device = (IoPressure)DEVICE.GetDevice<IoPressure>($"{Module}.Pressure{pcID}");
|
||
device.StopRamp();
|
||
}
|
||
|
||
return true;
|
||
}
|
||
|
||
public bool SetPcModelToNormal(List<int> lstPCID)
|
||
{
|
||
foreach (int pcID in lstPCID)
|
||
{
|
||
IoPressure device = DEVICE.GetDevice<IoPressure>($"{Module}.Pressure{pcID}");
|
||
if (device == null)
|
||
{
|
||
return false;
|
||
}
|
||
}
|
||
|
||
foreach (int pcID in lstPCID)
|
||
{
|
||
IoPressure device = (IoPressure)DEVICE.GetDevice<IoPressure>($"{Module}.Pressure{pcID}");
|
||
device.SetPcMode(PcCtrlMode.Normal, out string reason);
|
||
}
|
||
|
||
return true;
|
||
}
|
||
|
||
/// <summary>
|
||
/// 设置PC模式
|
||
/// </summary>
|
||
/// <param name="lstPCID"></param>
|
||
/// <param name="mode"></param>
|
||
/// <returns></returns>
|
||
public bool SetPcModel(List<int> lstPCID, PcCtrlMode mode)
|
||
{
|
||
foreach (int pcID in lstPCID)
|
||
{
|
||
IoPressure device = DEVICE.GetDevice<IoPressure>($"{Module}.Pressure{pcID}");
|
||
if (device == null)
|
||
{
|
||
return false;
|
||
}
|
||
}
|
||
|
||
foreach (int pcID in lstPCID)
|
||
{
|
||
IoPressure device = (IoPressure)DEVICE.GetDevice<IoPressure>($"{Module}.Pressure{pcID}");
|
||
device.SetPcMode(mode, out string reason);
|
||
}
|
||
|
||
return true;
|
||
}
|
||
|
||
/// <summary>
|
||
/// 设置MFC到默认值
|
||
/// </summary>
|
||
/// <param name="lstPCID"></param>
|
||
/// <param name="value"></param>
|
||
/// <returns></returns>
|
||
public bool SetPCValue(List<int> lstPCID, double value)
|
||
{
|
||
foreach (int pcID in lstPCID)
|
||
{
|
||
IoPressure device = DEVICE.GetDevice<IoPressure>($"{Module}.Pressure{pcID}");
|
||
if (device == null)
|
||
{
|
||
return false;
|
||
}
|
||
}
|
||
|
||
foreach (int pcID in lstPCID)
|
||
{
|
||
IoPressure device = (IoPressure)DEVICE.GetDevice<IoPressure>($"{Module}.Pressure{pcID}");
|
||
device.Ramp(value);
|
||
}
|
||
|
||
return true;
|
||
}
|
||
|
||
/// <summary>
|
||
/// 设置MFC到默认值(按百分比)
|
||
/// </summary>
|
||
/// <param name="lstPCID"></param>
|
||
/// <param name="value"></param>
|
||
/// <returns></returns>
|
||
public bool SetPCValueByPercent(int pcID, double percent)
|
||
{
|
||
IoPressure device = DEVICE.GetDevice<IoPressure>($"{Module}.Pressure{pcID}");
|
||
if (device == null)
|
||
{
|
||
return false;
|
||
}
|
||
|
||
double setPoint = device.MaxPressure * percent / 100;
|
||
|
||
device.Ramp(setPoint);
|
||
return true;
|
||
}
|
||
|
||
/// <summary>
|
||
/// 设置IO Value
|
||
/// </summary>
|
||
/// <param name="lstPCID"></param>
|
||
/// <returns></returns>
|
||
public bool SetIoValue(List<string> lstIOID, bool open)
|
||
{
|
||
string reason;
|
||
foreach (string IoID in lstIOID)
|
||
{
|
||
IoValve device = DEVICE.GetDevice<IoValve>($"{Module}.{IoID}");
|
||
if (device == null)
|
||
{
|
||
return false;
|
||
}
|
||
}
|
||
|
||
foreach (string IoID in lstIOID)
|
||
{
|
||
IoValve device = (IoValve)DEVICE.GetDevice<IoValve>($"{Module}.{IoID}");
|
||
if (device.Status != open)
|
||
{
|
||
device.TurnValve(open, out reason);
|
||
}
|
||
}
|
||
|
||
return true;
|
||
}
|
||
|
||
/// <summary>
|
||
/// 设置MFC到默认值
|
||
/// </summary>
|
||
/// <param name="lstPCID"></param>
|
||
/// <param name="value"></param>
|
||
/// <returns></returns>
|
||
public bool CheckIoValue(List<string> lstPCID, bool open)
|
||
{
|
||
foreach (string IoID in lstPCID)
|
||
{
|
||
IoValve device = DEVICE.GetDevice<IoValve>($"{Module}.{IoID}");
|
||
if (device == null)
|
||
{
|
||
return false;
|
||
}
|
||
}
|
||
|
||
foreach (string IoID in lstPCID)
|
||
{
|
||
IoValve device = (IoValve)DEVICE.GetDevice<IoValve>($"{Module}.{IoID}");
|
||
|
||
if (device.Status != open)
|
||
{
|
||
return false;
|
||
}
|
||
}
|
||
|
||
return true;
|
||
}
|
||
|
||
/// <summary>
|
||
/// 按组别名称对开关进行操作
|
||
/// </summary>
|
||
/// <param name="GroupName"></param>
|
||
/// <param name="Open">Open=true</param>
|
||
public bool SetIOValueByGroup(IoGroupName eGroupName, bool open)
|
||
{
|
||
List<string> lst = GetIoListByGroupName(eGroupName);
|
||
return SetIoValue(lst, open);
|
||
}
|
||
|
||
/// <summary>
|
||
/// 按组别名称Check开关的状态
|
||
/// </summary>
|
||
/// <param name="GroupName"></param>
|
||
/// <param name="Open">Open=true</param>
|
||
/// <returns></returns>
|
||
public bool CheckIOValueByGroup(IoGroupName eGroupName, bool open)
|
||
{
|
||
List<string> lst = GetIoListByGroupName(eGroupName);
|
||
return CheckIoValue(lst, open);
|
||
}
|
||
|
||
public void SetMfcModelToNormal(MfcGroupName mfcGroupName)
|
||
{
|
||
List<int> lst = GetMfcListByGroupName(mfcGroupName);
|
||
SetMfcModelToNormal(lst);
|
||
}
|
||
|
||
/// <summary>
|
||
/// 根据组别设置Mfc的值到默认值
|
||
/// </summary>
|
||
/// <param name="open"></param>
|
||
/// <returns></returns>
|
||
public bool SetMfcToDefaultByGroup(MfcGroupName mfcGroupName)
|
||
{
|
||
List<int> lst = GetMfcListByGroupName(mfcGroupName);
|
||
return SetMfcValueToDefault(lst);
|
||
}
|
||
|
||
/// <summary>
|
||
/// 根据组别设置Mfc的值到默认值(Ramp)
|
||
/// </summary>
|
||
/// <param name="open"></param>
|
||
/// <returns></returns>
|
||
public bool SetMfcToDefaultByGroupRamp(MfcGroupName mfcGroupName, int time)
|
||
{
|
||
List<int> lst = GetMfcListByGroupName(mfcGroupName);
|
||
return SetMfcValueToDefaultByRamp(lst, time);
|
||
}
|
||
|
||
/// <summary>
|
||
/// 根据组别设置Mfc,停止Ramp
|
||
/// </summary>
|
||
/// <param name="open"></param>
|
||
/// <returns></returns>
|
||
public bool SetMfcStopRampByGroup(MfcGroupName mfcGroupName)
|
||
{
|
||
List<int> lst = GetMfcListByGroupName(mfcGroupName);
|
||
return SetMfcStopRamp(lst);
|
||
}
|
||
|
||
/// <summary>
|
||
/// 根据组别设置Mfc的值(Ramp)
|
||
/// </summary>
|
||
/// <param name="open"></param>
|
||
/// <returns></returns>
|
||
public bool SetMfcRampByGroupAndPressure(MfcGroupName mfcGroupName, double pressure)
|
||
{
|
||
List<int> lst = GetMfcListByGroupName(mfcGroupName);
|
||
return SetMfcValueRampByPress(lst, pressure);
|
||
}
|
||
|
||
/// <summary>
|
||
/// 设置Mfc的值
|
||
/// </summary>
|
||
/// <param name="open"></param>
|
||
/// <returns></returns>
|
||
public bool SetMfcFlow(string mfcName, double dValue, int time)
|
||
{
|
||
int.TryParse(mfcName.Substring(3), out int index);
|
||
|
||
return SetMfcValue(new List<int>() { index }, dValue, time);
|
||
}
|
||
|
||
/// <summary>
|
||
/// 根据组别设置Mfc的值
|
||
/// </summary>
|
||
/// <param name="open"></param>
|
||
/// <returns></returns>
|
||
public bool SetMfcByGroup(MfcGroupName mfcGroupName, double dValue, int time)
|
||
{
|
||
List<int> lst = GetMfcListByGroupName(mfcGroupName);
|
||
return SetMfcValue(lst, dValue, time);
|
||
}
|
||
|
||
/// <summary>
|
||
/// 根据组别设置Mfc的值
|
||
/// </summary>
|
||
/// <param name="open"></param>
|
||
/// <returns></returns>
|
||
public bool SetMfcForPurgeConfigByGroup(MfcGroupName mfcGroupName, string configName, int time)
|
||
{
|
||
List<int> lst = GetMfcListByGroupName(mfcGroupName);
|
||
return SetMfcPurgeValue(lst, configName, time);
|
||
}
|
||
|
||
public bool SetServoEnable()
|
||
{
|
||
if (_sicServo != null)
|
||
{
|
||
if (_sicServo.ServoEnable == false)
|
||
_sicServo.SetServoEnable(true, out _);
|
||
return true;
|
||
}
|
||
return false;
|
||
}
|
||
|
||
/// <summary>
|
||
/// 设置旋转电机速度(停止)
|
||
/// </summary>
|
||
/// <param name="speed"></param>
|
||
/// <returns></returns>
|
||
public bool SetServoSpeed(float speed, int time)
|
||
{
|
||
//if (_sicServo != null && _sicServo.ServoReady)
|
||
if (_sicServo != null)
|
||
{
|
||
_sicServo.SetActualSpeed(speed);
|
||
return true;
|
||
}
|
||
return false;
|
||
}
|
||
|
||
/// <summary>
|
||
/// Check旋转电机速度是否达到设定以下
|
||
/// </summary>
|
||
/// <param name="speed"></param>
|
||
/// <returns></returns>
|
||
public bool CheckRotationServoOn(double speed, bool bigThanSpeed)
|
||
{
|
||
//if (_sicServo != null && _sicServo.ServoReady)
|
||
if (_sicServo != null)
|
||
{
|
||
if (bigThanSpeed)
|
||
{
|
||
if (_sicServo.ActualSpeedFeedback >= (speed - 2))
|
||
{
|
||
return true;
|
||
}
|
||
}
|
||
else
|
||
{
|
||
if (_sicServo.ActualSpeedFeedback <= speed)
|
||
{
|
||
return true;
|
||
}
|
||
}
|
||
}
|
||
return false;
|
||
}
|
||
|
||
/// <summary>
|
||
/// 加热
|
||
/// </summary>
|
||
/// <param name="enable"></param>
|
||
/// <returns></returns>
|
||
public bool SetHeatEnable(bool enable)
|
||
{
|
||
if (SCR1 != null && SCR2 != null && SCR3 != null && PSU1 != null && PSU2 != null && PSU3 != null)
|
||
{
|
||
string reason = "";
|
||
|
||
//PSU1.SetHeadHeaterEnable(enable, out reason);
|
||
|
||
SCR1.SetEnable(enable, out reason);
|
||
SCR2.SetEnable(enable, out reason);
|
||
SCR3.SetEnable(enable, out reason);
|
||
|
||
PSU1.SetPSUEnable(enable, out reason);
|
||
PSU2.SetPSUEnable(enable, out reason);
|
||
PSU3.SetPSUEnable(enable, out reason);
|
||
|
||
return true;
|
||
}
|
||
return false;
|
||
}
|
||
|
||
/// <summary>
|
||
/// Check加热Enable状态
|
||
/// </summary>
|
||
/// <returns></returns>
|
||
public bool CheckHeatEnable(bool enable)
|
||
{
|
||
if (SCR1 != null && SCR2 != null && SCR3 != null && PSU1 != null && PSU2 != null && PSU3 != null)
|
||
{
|
||
//if (PSU1.AllHeatEnable != enable)
|
||
// return false;
|
||
|
||
if (PSU1.StatusFeedBack != enable)
|
||
return false;
|
||
|
||
if (PSU2.StatusFeedBack != enable)
|
||
return false;
|
||
|
||
if (PSU3.StatusFeedBack != enable)
|
||
return false;
|
||
|
||
if (SCR1.StatusFeedBack != enable)
|
||
return false;
|
||
|
||
if (SCR2.StatusFeedBack != enable)
|
||
return false;
|
||
|
||
if (SCR3.StatusFeedBack != enable)
|
||
return false;
|
||
|
||
return true;
|
||
}
|
||
return false;
|
||
}
|
||
|
||
/// <summary>
|
||
/// 检查总的Enable是否开启
|
||
/// </summary>
|
||
/// <param name="enable"></param>
|
||
/// <returns></returns>
|
||
public bool CheckHeadHeaterEnable(bool enable)
|
||
{
|
||
if (PSU1 != null)
|
||
{
|
||
return PSU1.AllHeatEnable == enable;
|
||
}
|
||
return false;
|
||
}
|
||
|
||
/// <summary>
|
||
/// SCR Reset
|
||
/// </summary>
|
||
/// <returns></returns>
|
||
public bool SetSCRReset()
|
||
{
|
||
if (SCR1 != null && SCR2 != null && SCR3 != null)
|
||
{
|
||
SCR1.SetReset(true, out string reason);
|
||
SCR2.SetReset(true, out reason);
|
||
SCR3.SetReset(true, out reason);
|
||
}
|
||
return true;
|
||
}
|
||
|
||
/// <summary>
|
||
/// TC1和TC2单独设置
|
||
/// </summary>
|
||
/// <param name="enable"></param>
|
||
/// <param name="tc1"></param>
|
||
/// <returns></returns>
|
||
public bool SetHeatEnableTC(bool enable, bool tc1)
|
||
{
|
||
if (tc1 && PSU1 != null && PSU2 != null && PSU3 != null)
|
||
{
|
||
string reason = "";
|
||
PSU1.SetPSUEnable(enable, out reason);
|
||
PSU2.SetPSUEnable(enable, out reason);
|
||
PSU3.SetPSUEnable(enable, out reason);
|
||
return true;
|
||
}
|
||
else if (SCR1 != null && SCR2 != null && SCR3 != null)
|
||
{
|
||
string reason = "";
|
||
SCR1.SetEnable(enable, out reason);
|
||
SCR2.SetEnable(enable, out reason);
|
||
SCR3.SetEnable(enable, out reason);
|
||
return true;
|
||
}
|
||
return false;
|
||
}
|
||
|
||
/// <summary>
|
||
/// Check使能状态 TC1和TC2单独设置
|
||
/// </summary>
|
||
/// <returns></returns>
|
||
public bool CheckHeatEnableTC(bool enable, bool tc1)
|
||
{
|
||
if (tc1 && PSU1 != null && PSU2 != null && PSU3 != null)
|
||
{
|
||
if (PSU1.StatusFeedBack != enable)
|
||
return false;
|
||
|
||
if (PSU2.StatusFeedBack != enable)
|
||
return false;
|
||
|
||
if (PSU3.StatusFeedBack != enable)
|
||
return false;
|
||
|
||
return true;
|
||
}
|
||
else if (SCR1 != null && SCR2 != null && SCR3 != null)
|
||
{
|
||
if (SCR1.StatusFeedBack != enable)
|
||
return false;
|
||
|
||
if (SCR2.StatusFeedBack != enable)
|
||
return false;
|
||
|
||
if (SCR3.StatusFeedBack != enable)
|
||
return false;
|
||
|
||
return true;
|
||
}
|
||
return false;
|
||
}
|
||
|
||
/// <summary>
|
||
/// 获取PM的腔体压力
|
||
/// </summary>
|
||
/// <returns></returns>
|
||
public double GetChamberPressure()
|
||
{
|
||
if (PT1 != null)
|
||
{
|
||
return PT1.FeedBack;
|
||
}
|
||
return 0;
|
||
}
|
||
|
||
/// <summary>
|
||
/// 获取管道压力
|
||
/// </summary>
|
||
/// <returns></returns>
|
||
public double GetForelinePressure()
|
||
{
|
||
if (PT2 != null)
|
||
{
|
||
return PT2.FeedBack;
|
||
}
|
||
return 0;
|
||
}
|
||
|
||
/// <summary>
|
||
/// 初始化Device的委托
|
||
/// </summary>
|
||
private void InitalDeviceFunc()
|
||
{
|
||
if (ChamberMoveBody != null)
|
||
{
|
||
ChamberMoveBody.FuncCheckSwingUnlock = () =>
|
||
{
|
||
if (SHLidSwing != null )
|
||
{
|
||
return SHLidSwing.LidUnlockFaceback ;
|
||
}
|
||
else
|
||
{
|
||
return false;
|
||
}
|
||
};
|
||
|
||
ChamberMoveBody.FuncUpDownEnable = (setValue) =>
|
||
{
|
||
if (setValue)
|
||
{
|
||
if (_pmInterLock != null && SensorPMATMSW != null && SensorDORPressATMSW != null && _sicServo != null)
|
||
{
|
||
if (!CheckIOValueByGroup(IoGroupName.H, false))
|
||
{
|
||
EV.PostWarningLog(Module, "Condition:V51,V52,V58,V37s should be Closed ");
|
||
return false;
|
||
}
|
||
if (!CheckIOValueByGroup(IoGroupName.F, false))
|
||
{
|
||
EV.PostWarningLog(Module, "Condition:V39,V40,V41,V53,V54,V55,V59 should be Closed ");
|
||
return false;
|
||
}
|
||
if (!_pmInterLock.DoLidOpenRoutineSucceed)
|
||
{
|
||
EV.PostWarningLog(Module, "Condition:Purge Routine Succeed DO-172");
|
||
return false;
|
||
}
|
||
if (SensorPMATMSW.Value)
|
||
{
|
||
EV.PostWarningLog(Module, "Condition:DI-9 Chamber At ATM !");
|
||
return false;
|
||
}
|
||
if (SensorDORPressATMSW.Value)
|
||
{
|
||
EV.PostWarningLog(Module, "Condition:DI-7 Dor Press At ATM !");
|
||
return false;
|
||
}
|
||
if (!IsServiceMode)
|
||
{
|
||
EV.PostWarningLog(Module, "Condition:ServiceMode");
|
||
return false;
|
||
}
|
||
if (_sicServo.ActualSpeedFeedback > 0)
|
||
{
|
||
EV.PostWarningLog(Module, "Condition:Rotation stopped AI-118");
|
||
return false;
|
||
}
|
||
if (!SensorSusceptorAtSafeSpeed.Value) //DI-13
|
||
{
|
||
EV.PostWarningLog(Module, "Condition:DI-13 Susceptor Not At Safe Speed");
|
||
return false;
|
||
}
|
||
if (PSU1.AllHeatEnable)
|
||
{
|
||
EV.PostWarningLog(Module, "Condition:PSU should be Disable");
|
||
return false;
|
||
}
|
||
//DI-205->V72,这里没设置条件;DI-14，IO配置文件里面没有定义；所以指添加了一个DI-13;
|
||
}
|
||
else
|
||
{
|
||
EV.PostWarningLog(Module, "Condition:device model is not null");
|
||
return false;
|
||
}
|
||
}
|
||
return true;
|
||
};
|
||
} //Chamber
|
||
|
||
#region Enable Table中起保护作用的内容
|
||
|
||
////4.C (MO Line valve)(DO13 V43 常闭)(DO18 V48 常闭) {V43s,V48s同步增加条件}
|
||
if (V43 != null)
|
||
{
|
||
V43.FuncCheckInterLock = (setValue) =>
|
||
{
|
||
if (setValue)
|
||
{
|
||
if (_pmInterLock != null)
|
||
{
|
||
if (!(_pmInterLock.DoExchangeMoRoutineRunning || _pmInterLock.DoLidCloseRoutineSucceed))
|
||
{
|
||
EV.PostWarningLog(Module, "Condition:ExchangeMo routine running or Clean routine finished!");
|
||
return false;
|
||
}
|
||
}
|
||
else
|
||
{
|
||
return false;
|
||
}
|
||
|
||
// H2 Supply must be opened (V31, V33)
|
||
if (!V31.Status || !V33.Status)
|
||
{
|
||
EV.PostWarningLog(Module, "Due to H2 supply is closed, can not turn V43 on.");
|
||
return false;
|
||
}
|
||
}
|
||
return true;
|
||
};
|
||
|
||
//返回True，表明条件满足，强制关阀
|
||
V43.FuncForceOpen = (curStatue) =>
|
||
{
|
||
if (curStatue)
|
||
{
|
||
if (!_pmInterLock.DoExchangeMoRoutineRunning && !_pmInterLock.DoLidCloseRoutineSucceed)
|
||
{
|
||
return true;
|
||
}
|
||
else
|
||
{
|
||
return false;
|
||
}
|
||
}
|
||
return false;
|
||
};
|
||
}
|
||
if (V43s != null)
|
||
{
|
||
V43s.FuncCheckInterLock = (setValue) =>
|
||
{
|
||
if (setValue)
|
||
{
|
||
if (_pmInterLock != null)
|
||
{
|
||
if (!(_pmInterLock.DoExchangeMoRoutineRunning || _pmInterLock.DoLidCloseRoutineSucceed))
|
||
{
|
||
EV.PostWarningLog(Module, "Condition:ExchangeMo routine running or Clean routine finished!");
|
||
return false;
|
||
}
|
||
}
|
||
else
|
||
{
|
||
return false;
|
||
}
|
||
}
|
||
return true;
|
||
};
|
||
}
|
||
if (V48 != null)
|
||
{
|
||
V48.FuncCheckInterLock = (setValue) =>
|
||
{
|
||
if (setValue)
|
||
{
|
||
if (_pmInterLock != null)
|
||
{
|
||
if (!(_pmInterLock.DoExchangeMoRoutineRunning || _pmInterLock.DoLidCloseRoutineSucceed))
|
||
{
|
||
EV.PostWarningLog(Module, "Condition:ExchangeMo routine running or Clean routine finished!");
|
||
return false;
|
||
}
|
||
}
|
||
else
|
||
{
|
||
return false;
|
||
}
|
||
|
||
// H2 Supply must be opened (V31, V33)
|
||
if (!V31.Status || !V33.Status)
|
||
{
|
||
EV.PostWarningLog(Module, "Due to H2 supply is closed, can not turn V48 on.");
|
||
return false;
|
||
}
|
||
}
|
||
return true;
|
||
};
|
||
|
||
//返回True，表明条件满足，强制关阀
|
||
V48.FuncForceOpen = (curStatue) =>
|
||
{
|
||
if (curStatue)
|
||
{
|
||
if (!_pmInterLock.DoExchangeMoRoutineRunning && !_pmInterLock.DoLidCloseRoutineSucceed)
|
||
{
|
||
return true;
|
||
}
|
||
}
|
||
return false;
|
||
};
|
||
}
|
||
if (V48s != null)
|
||
{
|
||
V48s.FuncCheckInterLock = (setValue) =>
|
||
{
|
||
if (setValue)
|
||
{
|
||
if (_pmInterLock != null)
|
||
{
|
||
if (!(_pmInterLock.DoExchangeMoRoutineRunning || _pmInterLock.DoLidCloseRoutineSucceed))
|
||
{
|
||
EV.PostWarningLog(Module, "Condition:ExchangeMo routine running or Clean routine finished!");
|
||
return false;
|
||
}
|
||
}
|
||
else
|
||
{
|
||
return false;
|
||
}
|
||
}
|
||
return true;
|
||
};
|
||
}
|
||
|
||
//5.IsolateValve2 (DO50 EPV2)
|
||
if (EPV2 != null)
|
||
{
|
||
EPV2.FuncCheckInterLock = (setValue) =>
|
||
{
|
||
if (PT1 != null && PT2 != null && _ioThrottleValve != null)
|
||
{
|
||
if (!setValue)
|
||
{
|
||
if (_ioThrottleValve.TVValveEnable)
|
||
{
|
||
EV.PostWarningLog(Module, "Condition:TV should be disable!");
|
||
return false;
|
||
}
|
||
}
|
||
return true;
|
||
}
|
||
else
|
||
{
|
||
return false;
|
||
}
|
||
};
|
||
}
|
||
|
||
//6.GasBox.Vent.Pump (DO45 V72常闭)
|
||
//if (V72 != null)
|
||
//{
|
||
// V72.FuncCheckInterLock = (setValue) =>
|
||
// {
|
||
// if (setValue)
|
||
// {
|
||
// if (EPV2 != null && _ioThrottleValve != null)
|
||
// {
|
||
// if (!EPV2.Status)
|
||
// {
|
||
// EV.PostWarningLog(Module, "Condition:EPV2 should be open!");
|
||
// return false;
|
||
// }
|
||
// if (!_ioThrottleValve.TVValveEnable)
|
||
// {
|
||
// EV.PostWarningLog(Module, "Condition:TV should be enable!");
|
||
// return false;
|
||
// }
|
||
// }
|
||
// else
|
||
// {
|
||
// return false;
|
||
// }
|
||
// }
|
||
// return true;
|
||
// };
|
||
|
||
// //返回True，表明条件满足，强制关阀
|
||
// V72.FuncForceOpen = (curStatue) =>
|
||
// {
|
||
// if (curStatue)
|
||
// {
|
||
// //满足条件，强制执行
|
||
// if (EPV2 != null && _ioThrottleValve != null)
|
||
// {
|
||
// if (!EPV2.Status || !_ioThrottleValve.TVValveEnable)
|
||
// {
|
||
// return true;
|
||
// }
|
||
// }
|
||
// else
|
||
// {
|
||
// return false;
|
||
// }
|
||
// }
|
||
// return false;
|
||
// };
|
||
//}
|
||
|
||
//13.MO Source.VAc (DO16 V46常闭,DO20 V50常闭) [DI206 V73 常闭] {V46s,V50s同步增加条件}
|
||
//if (V46 != null)
|
||
//{
|
||
// V46.FuncCheckInterLock = (setValue) =>
|
||
// {
|
||
// if (setValue)
|
||
// {
|
||
// if (V73 != null && V43 != null && _pmInterLock != null)
|
||
// {
|
||
// if (V43.Status)
|
||
// {
|
||
// EV.PostWarningLog(Module, "Condition:V43 should be closed");
|
||
// return false;
|
||
// }
|
||
// if (!IsServiceMode)
|
||
// {
|
||
// EV.PostWarningLog(Module, "Condition:PM should in service mode");
|
||
// return false;
|
||
// }
|
||
// if (!(V73.Status || !_pmInterLock.DoExchangeMoRoutineRunning))
|
||
// {
|
||
// EV.PostWarningLog(Module, "Condition:V73 is open or Not ExchangeMo routine running ");
|
||
// return false;
|
||
// }
|
||
// }
|
||
// else
|
||
// {
|
||
// EV.PostWarningLog(Module, "Condition:V43,V73,V48 is not null!");
|
||
// return false;
|
||
// }
|
||
// }
|
||
// return true;
|
||
// };
|
||
|
||
// //返回True，表明条件满足，强制关阀
|
||
// //V46.FuncForceOpen = (curStatue) =>
|
||
// //{
|
||
// // if (curStatue)
|
||
// // {
|
||
// // //满足条件，强制执行
|
||
// // if (V73 != null && V43 != null && _pmInterLock != null)
|
||
// // {
|
||
// // if (V43.Status || !IsServiceMode || (!(V73.Status || !_pmInterLock.DoExchangeMoRoutineRunning)))
|
||
// // {
|
||
// // return true;
|
||
// // }
|
||
// // }
|
||
// // else
|
||
// // {
|
||
// // return false;
|
||
// // }
|
||
// // }
|
||
// // return false;
|
||
// //};
|
||
//}
|
||
//if (V46s != null)
|
||
//{
|
||
// V46s.FuncCheckInterLock = (setValue) =>
|
||
// {
|
||
// if (setValue)
|
||
// {
|
||
// if (V73 != null && V43 != null && _pmInterLock != null)
|
||
// {
|
||
// if (V43.Status)
|
||
// {
|
||
// EV.PostWarningLog(Module, "Condition:V43 should be closed");
|
||
// return false;
|
||
// }
|
||
// if (!IsServiceMode)
|
||
// {
|
||
// EV.PostWarningLog(Module, "Condition:PM should in service mode");
|
||
// return false;
|
||
// }
|
||
// if (!(V73.Status || !_pmInterLock.DoExchangeMoRoutineRunning))
|
||
// {
|
||
// EV.PostWarningLog(Module, "Condition:V73 is open or Not ExchangeMo routine running ");
|
||
// return false;
|
||
// }
|
||
// }
|
||
// else
|
||
// {
|
||
// EV.PostWarningLog(Module, "Condition:V43,V73,V48 is not null!");
|
||
// return false;
|
||
// }
|
||
// }
|
||
// return true;
|
||
// };
|
||
//}
|
||
//if (V50 != null)
|
||
//{
|
||
// V50.FuncCheckInterLock = (setValue) =>
|
||
// {
|
||
// if (setValue)
|
||
// {
|
||
// if (V73 != null && V48 != null && _pmInterLock != null)
|
||
// {
|
||
// if (V48.Status)
|
||
// {
|
||
// EV.PostWarningLog(Module, "Condition:V48 should be closed");
|
||
// return false;
|
||
// }
|
||
// if (!IsServiceMode)
|
||
// {
|
||
// EV.PostWarningLog(Module, "Condition:PM should in service mode");
|
||
// return false;
|
||
// }
|
||
// if (!(V73.Status || !_pmInterLock.DoExchangeMoRoutineRunning))
|
||
// {
|
||
// EV.PostWarningLog(Module, "Condition:V73 be open or Not ExchangeMo routine running ");
|
||
// return false;
|
||
// }
|
||
// }
|
||
// else
|
||
// {
|
||
// EV.PostWarningLog(Module, "Condition:V73,V43,V48 is not null!");
|
||
// return false;
|
||
// }
|
||
// }
|
||
// return true;
|
||
// };
|
||
|
||
// //返回True，表明条件满足，强制关阀
|
||
// //V50.FuncForceOpen = (curStatue) =>
|
||
// //{
|
||
// // if (curStatue)
|
||
// // {
|
||
// // //满足条件，强制执行
|
||
// // if (V73 != null && V48 != null && _pmInterLock != null)
|
||
// // {
|
||
// // if (V48.Status || !IsServiceMode || (!(V73.Status || !_pmInterLock.DoExchangeMoRoutineRunning)))
|
||
// // {
|
||
// // return true;
|
||
// // }
|
||
// // }
|
||
// // else
|
||
// // {
|
||
// // return false;
|
||
// // }
|
||
// // }
|
||
// // return false;
|
||
// //};
|
||
//}
|
||
//if (V50s != null)
|
||
//{
|
||
// V50s.FuncCheckInterLock = (setValue) =>
|
||
// {
|
||
// if (setValue)
|
||
// {
|
||
// if (V73 != null && V48 != null && _pmInterLock != null)
|
||
// {
|
||
// if (V48.Status)
|
||
// {
|
||
// EV.PostWarningLog(Module, "Condition:V48 should be closed");
|
||
// return false;
|
||
// }
|
||
// if (!IsServiceMode)
|
||
// {
|
||
// EV.PostWarningLog(Module, "Condition:PM should in service mode");
|
||
// return false;
|
||
// }
|
||
// if (!(V73.Status || !_pmInterLock.DoExchangeMoRoutineRunning))
|
||
// {
|
||
// EV.PostWarningLog(Module, "Condition:V73 be open or Not ExchangeMo routine running ");
|
||
// return false;
|
||
// }
|
||
// }
|
||
// else
|
||
// {
|
||
// EV.PostWarningLog(Module, "Condition:V73,V43,V48 should not be null!");
|
||
// return false;
|
||
// }
|
||
// }
|
||
// return true;
|
||
// };
|
||
//}
|
||
|
||
//if (V64 != null)
|
||
//{
|
||
// V64.FuncCheckInterLock = (setValue) =>
|
||
// {
|
||
// if (setValue)
|
||
// {
|
||
// if (PT1 != null)
|
||
// {
|
||
// if (PT1.FeedBack > SC.GetValue<double>($"PM.{Module}.PressureForV27ForceClose") && !IsServiceMode) //if (!IsServiceMode && SensorPMATMSW.Value)
|
||
// {
|
||
// EV.PostWarningLog(Module, "Condition:React below atm while in non-service mode!");
|
||
// return false;
|
||
// }
|
||
// }
|
||
// else
|
||
// {
|
||
// return false;
|
||
// }
|
||
// }
|
||
// return true;
|
||
// };
|
||
|
||
// //返回True，表明条件满足，强制关阀
|
||
// V64.FuncForceOpen = (curStatue) =>
|
||
// {
|
||
// if (curStatue)
|
||
// {
|
||
// //满足条件，强制执行
|
||
// if (PT1 != null)
|
||
// {
|
||
// if (PT1.FeedBack > SC.GetValue<double>($"PM.{Module}.PressureForV27ForceClose") && !IsServiceMode) //if (!IsServiceMode && SensorPMATMSW.Value)
|
||
// {
|
||
// return true;
|
||
// }
|
||
// }
|
||
// else
|
||
// {
|
||
// return false;
|
||
// }
|
||
// }
|
||
// return false;
|
||
// };
|
||
//}
|
||
|
||
////Lid Ar Purge (DO36 V65常开)[V64常闭]
|
||
//if (V65 != null)
|
||
//{
|
||
// V65.FuncCheckInterLock = (setValue) =>
|
||
// {
|
||
// if (setValue)
|
||
// {
|
||
// if (V64 != null)
|
||
// {
|
||
// if (!(!V64.Status || IsServiceMode))
|
||
// {
|
||
// EV.PostWarningLog(Module, "Condition:V64 should be Closed or ServiceMode");
|
||
// return false;
|
||
// }
|
||
|
||
// }
|
||
// else
|
||
// {
|
||
// EV.PostWarningLog(Module, "Condition:V64 is not null!");
|
||
// return false;
|
||
// }
|
||
// }
|
||
// return true;
|
||
// };
|
||
|
||
// //返回True，表明条件满足，强制关阀
|
||
// V65.FuncForceOpen = (curStatue) =>
|
||
// {
|
||
// if (curStatue)
|
||
// {
|
||
// //满足条件，强制执行
|
||
// if (V64 != null)
|
||
// {
|
||
// if (!(!V64.Status || IsServiceMode))/* || (!IsServiceMode && !SensorPMATMSW.Value))*/
|
||
// {
|
||
// return true;
|
||
// }
|
||
// }
|
||
// else
|
||
// {
|
||
// return false;
|
||
// }
|
||
// }
|
||
// return false;
|
||
// };
|
||
//}
|
||
|
||
//14.DOR Vac (DO48 V75常闭)[V76常闭]
|
||
//if (V75 != null)
|
||
//{
|
||
// V75.FuncCheckInterLock = (setValue) =>
|
||
// {
|
||
// if (setValue)
|
||
// {
|
||
// if (V76 != null)
|
||
// {
|
||
// if (V76.Status)
|
||
// {
|
||
// EV.PostWarningLog(Module, "Condition:V76 should be closed");
|
||
// return false;
|
||
// }
|
||
// }
|
||
// else
|
||
// {
|
||
// EV.PostWarningLog(Module, "Condition:V76 should be not null");
|
||
// return false;
|
||
// }
|
||
// }
|
||
// return true;
|
||
// };
|
||
|
||
// //返回True，表明条件满足，强制关阀
|
||
// V75.FuncForceOpen = (curStatue) =>
|
||
// {
|
||
// if (curStatue)
|
||
// {
|
||
// //满足条件，强制执行
|
||
// if (V76 != null)
|
||
// {
|
||
// if (V76.Status)
|
||
// {
|
||
// return true;
|
||
// }
|
||
// }
|
||
// else
|
||
// {
|
||
// return false;
|
||
// }
|
||
// }
|
||
// return false;
|
||
// };
|
||
//}
|
||
|
||
//15.DOR Refill (DO49 V76常闭)
|
||
//if (V76 != null)
|
||
//{
|
||
// V76.FuncCheckInterLock = (setValue) =>
|
||
// {
|
||
// if (setValue)
|
||
// {
|
||
// if (SensorPMATMSW != null && _pmInterLock != null && V75 != null)
|
||
// {
|
||
// if (SensorPMATMSW.Value) //DI9=1
|
||
// {
|
||
// EV.PostWarningLog(Module, "Condition:DI-4 PM AT ATM ");
|
||
// return false;
|
||
// }
|
||
// if (!_pmInterLock.DoLidOpenRoutineSucceed)
|
||
// {
|
||
// EV.PostWarningLog(Module, "Condition:Purge Routine Succeed should be on ");
|
||
// return false;
|
||
// }
|
||
// if (V75.Status)
|
||
// {
|
||
// EV.PostWarningLog(Module, "Condition:V75 should be Closed!");
|
||
// return false;
|
||
// }
|
||
// }
|
||
// else
|
||
// {
|
||
// EV.PostWarningLog(Module, "Condition:SensorPMATMSW should be not null");
|
||
// return false;
|
||
// }
|
||
// }
|
||
// return true;
|
||
// };
|
||
|
||
// //返回True，表明条件满足，强制关阀
|
||
// V76.FuncForceOpen = (curStatue) =>
|
||
// {
|
||
// if (curStatue)
|
||
// {
|
||
// //满足条件，强制执行
|
||
// if (SensorPMATMSW != null)
|
||
// {
|
||
// if (SensorPMATMSW.Value)
|
||
// {
|
||
// return true;
|
||
// }
|
||
// }
|
||
// //V76和V75只能开一个
|
||
// if (V75 != null)
|
||
// {
|
||
// if (V75.Status)
|
||
// {
|
||
// return true;
|
||
// }
|
||
// }
|
||
// else
|
||
// {
|
||
// return false;
|
||
// }
|
||
// }
|
||
// return false;
|
||
// };
|
||
//}
|
||
|
||
//16.17.PM pump bypass valve force open (DO52 V27) Checked
|
||
if (V27 != null)
|
||
{
|
||
//返回False,表明条件不满足,限制住不开阀
|
||
//V27.FuncCheckInterLock = (setValue) =>
|
||
//{
|
||
// if (setValue)
|
||
// {
|
||
// if (PT1 != null)
|
||
// {
|
||
// if (PT1.FeedBack <= SC.GetValue<double>($"PM.{Module}.PressureForV27ForceClose"))
|
||
// {
|
||
// EV.PostWarningLog(Module, $"Condition:Chamber Pressure should larger than {SC.GetValue<double>($"PM.{Module}.PressureForV27ForceClose")}mabr");
|
||
// return false;
|
||
// }
|
||
// }
|
||
// else
|
||
// {
|
||
// EV.PostWarningLog(Module, "Condition:SensorPMATMSW is not null");
|
||
// return false;
|
||
// }
|
||
// }
|
||
// return true;
|
||
//};
|
||
|
||
//返回True，表明条件满足，强制开阀
|
||
//V27.FuncForceOpen = (curStatue) =>
|
||
//{
|
||
// if (!curStatue)
|
||
// {
|
||
// //满足条件，强制执行
|
||
// if (SensorChamPressAboveATMSW != null && PT1 != null)
|
||
// {
|
||
// if (!SensorChamPressAboveATMSW.Value || PT1.FeedBack > SC.GetValue<double>($"PM.{Module}.PressureForV27ForceOpen"))
|
||
// {
|
||
// return true;
|
||
// }
|
||
// }
|
||
// else
|
||
// {
|
||
// return false;
|
||
// }
|
||
// }
|
||
// if (curStatue)
|
||
// {
|
||
// //满足条件，强制执行
|
||
// if (PT1 != null)
|
||
// {
|
||
// if (PT1.FeedBack <= SC.GetValue<double>($"PM.{Module}.PressureForV27ForceClose"))
|
||
// {
|
||
// return true;
|
||
// }
|
||
// }
|
||
// else
|
||
// {
|
||
// return false;
|
||
// }
|
||
// }
|
||
|
||
// return false;
|
||
//};
|
||
}
|
||
|
||
//23.Reactor Leak Check (DO42)
|
||
if (V69 != null)
|
||
{
|
||
//返回False,表明条件不满足,限制住不开阀
|
||
V69.FuncCheckInterLock = (setValue) =>
|
||
{
|
||
if (setValue)
|
||
{
|
||
if (V27 != null)
|
||
{
|
||
if (V27.Status)
|
||
{
|
||
EV.PostWarningLog(Module, $"Condition:V27 should be closed");
|
||
return false;
|
||
}
|
||
if (!CheckIOValueByGroup(IoGroupName.E, false))
|
||
{
|
||
EV.PostWarningLog(Module, $"Condition:E valves should be closed");
|
||
return false;
|
||
}
|
||
}
|
||
else
|
||
{
|
||
return false;
|
||
}
|
||
}
|
||
return true;
|
||
};
|
||
|
||
//返回True，表明条件满足，强制开阀
|
||
V69.FuncForceOpen = (curStatue) =>
|
||
{
|
||
if (curStatue)
|
||
{
|
||
//满足条件，强制执行
|
||
if (V27 != null)
|
||
{
|
||
if (V27.Status || !CheckIOValueByGroup(IoGroupName.E, false))
|
||
{
|
||
return true;
|
||
}
|
||
}
|
||
else
|
||
{
|
||
return false;
|
||
}
|
||
}
|
||
|
||
return false;
|
||
};
|
||
}
|
||
|
||
//24.H valvas
|
||
|
||
//25.GasBox.Vent.Bypass open enable（DO50）
|
||
if (V25 != null)
|
||
{
|
||
//返回False,表明条件不满足,限制住不开阀
|
||
V25.FuncCheckInterLock = (setValue) =>
|
||
{
|
||
if (setValue)
|
||
{
|
||
if (V72 != null)
|
||
{
|
||
if (V72.Status)
|
||
{
|
||
EV.PostWarningLog(Module, "Condition:V72 should be closed");
|
||
return false;
|
||
}
|
||
}
|
||
else
|
||
{
|
||
EV.PostWarningLog(Module, "Condition:V72 is not null");
|
||
return false;
|
||
}
|
||
}
|
||
return true;
|
||
};
|
||
|
||
//返回True，表明条件满足，强制开阀
|
||
V25.FuncForceOpen = (curStatue) =>
|
||
{
|
||
if (!curStatue)
|
||
{
|
||
//满足条件，强制执行
|
||
if (_pmInterLock != null && V72 != null)
|
||
{
|
||
if (!V72.Status && (_pmInterLock.DoPreprocessRunning || _pmInterLock.DoProcessRunning || _pmInterLock.DoProcessIdleRunning))
|
||
{
|
||
return true;
|
||
}
|
||
}
|
||
else
|
||
{
|
||
return false;
|
||
}
|
||
}
|
||
if (curStatue)
|
||
{
|
||
//满足条件，强制执行
|
||
if (_pmInterLock != null && V72 != null)
|
||
{
|
||
if (V72.Status)
|
||
{
|
||
return true;
|
||
}
|
||
}
|
||
else
|
||
{
|
||
return false;
|
||
}
|
||
}
|
||
|
||
return false;
|
||
};
|
||
}
|
||
|
||
#endregion Enable Table中起保护作用的内容
|
||
|
||
#region 以下内容为InterLock表中复合条件内容
|
||
|
||
//10.TMA.Vent (DO12 V42常闭)[V41常闭]
|
||
//V42动作时判断V41状态，但不反向控制
|
||
//if (V42 != null)
|
||
//{
|
||
// V42.FuncCheckInterLock = (setValue) =>
|
||
// {
|
||
// if (setValue)
|
||
// {
|
||
// if (V41 != null)
|
||
// {
|
||
// if (V41.Status && !_pmInterLock.DoProcessRunning)
|
||
// {
|
||
// EV.PostWarningLog(Module, "Condition:V41 is Closed while process running");
|
||
// return false;
|
||
// }
|
||
// }
|
||
// else
|
||
// {
|
||
// EV.PostWarningLog(Module, "Condition:V41 is not null!");
|
||
// return false;
|
||
// }
|
||
// }
|
||
// return true;
|
||
// };
|
||
|
||
// //返回True，表明条件满足，强制关阀
|
||
// //V42.FuncForceOpen = (curStatue) =>
|
||
// //{
|
||
// // if (curStatue)
|
||
// // {
|
||
// // //满足条件，强制执行
|
||
// // if (V41 != null)
|
||
// // {
|
||
// // if (V41.Status && !_pmInterLock.DoProcessRunning)
|
||
// // {
|
||
// // return true;
|
||
// // }
|
||
// // }
|
||
// // else
|
||
// // {
|
||
// // return false;
|
||
// // }
|
||
// // }
|
||
// // return false;
|
||
// //};
|
||
//}
|
||
|
||
////11.SiH4.Vent(DO26 V56常开)[V55常闭]
|
||
////V56动作时判断V55状态，但不反向控制
|
||
//if (V56 != null)
|
||
//{
|
||
// V56.FuncCheckInterLock = (setValue) =>
|
||
// {
|
||
// if (setValue)
|
||
// {
|
||
// if (V55 != null)
|
||
// {
|
||
// if (V55.Status && !_pmInterLock.DoProcessRunning)
|
||
// {
|
||
// EV.PostWarningLog(Module, "Condition:V55 is Closed while process running");
|
||
// return false;
|
||
// }
|
||
// }
|
||
// else
|
||
// {
|
||
// EV.PostWarningLog(Module, "Condition:V55 is not null!");
|
||
// return false;
|
||
// }
|
||
// }
|
||
// return true;
|
||
// };
|
||
|
||
// //返回True，表明条件满足，强制关阀
|
||
// //V56.FuncForceOpen = (curStatue) =>
|
||
// //{
|
||
// // if (curStatue)
|
||
// // {
|
||
// // //满足条件，强制执行
|
||
// // if (V55 != null)
|
||
// // {
|
||
// // if (V55.Status && !_pmInterLock.DoProcessRunning)
|
||
// // {
|
||
// // return true;
|
||
// // }
|
||
// // }
|
||
// // else
|
||
// // {
|
||
// // return false;
|
||
// // }
|
||
// // }
|
||
// // return false;
|
||
// //};
|
||
//}
|
||
|
||
////12.C2H4.Vent (DO30 V60常开)[V59常闭]
|
||
////V60动作时判断V59状态，但不反向控制
|
||
//if (V60 != null)
|
||
//{
|
||
// V60.FuncCheckInterLock = (setValue) =>
|
||
// {
|
||
// if (setValue)
|
||
// {
|
||
// if (V59 != null)
|
||
// {
|
||
// if (V59.Status && !_pmInterLock.DoProcessRunning)
|
||
// {
|
||
// EV.PostWarningLog(Module, "Condition:V59 is Closed while process running");
|
||
// return false;
|
||
// }
|
||
// }
|
||
// else
|
||
// {
|
||
// EV.PostWarningLog(Module, "Condition:V59 is not null!");
|
||
// return false;
|
||
// }
|
||
// }
|
||
// return true;
|
||
// };
|
||
|
||
// //返回True，表明条件满足，强制关阀
|
||
// //V60.FuncForceOpen = (curStatue) =>
|
||
// //{
|
||
// // if (curStatue)
|
||
// // {
|
||
// // //满足条件，强制执行
|
||
// // if (V59 != null)
|
||
// // {
|
||
// // if (V59.Status && !_pmInterLock.DoProcessRunning)
|
||
// // {
|
||
// // return true;
|
||
// // }
|
||
// // }
|
||
// // else
|
||
// // {
|
||
// // return false;
|
||
// // }
|
||
// // }
|
||
// // return false;
|
||
// //};
|
||
//}
|
||
|
||
////InterLock Only in non-service mode
|
||
//if (V33 != null)
|
||
//{
|
||
// V33.FuncCheckInterLock = (setValue) =>
|
||
// {
|
||
// if (setValue)
|
||
// {
|
||
// if (SensorPMATMSW != null)
|
||
// {
|
||
// if (!IsServiceMode && SensorPMATMSW.Value)
|
||
// {
|
||
// EV.PostWarningLog(Module, "Condition:React below atm while in non-service mode!");
|
||
// return false;
|
||
// }
|
||
// }
|
||
// else
|
||
// {
|
||
// return false;
|
||
// }
|
||
// }
|
||
// return true;
|
||
// };
|
||
|
||
// //返回True，表明条件满足，强制关阀
|
||
// V33.FuncForceOpen = (curStatue) =>
|
||
// {
|
||
// if (curStatue)
|
||
// {
|
||
// //满足条件，强制执行
|
||
// if (SensorPMATMSW != null)
|
||
// {
|
||
// if (!IsServiceMode && SensorPMATMSW.Value)
|
||
// {
|
||
// return true;
|
||
// }
|
||
// }
|
||
// else
|
||
// {
|
||
// return false;
|
||
// }
|
||
// }
|
||
// return false;
|
||
// };
|
||
//}
|
||
|
||
//InterLock Only in non-service mode
|
||
//if (V37s != null)
|
||
//{
|
||
// V37s.FuncCheckInterLock = (setValue) =>
|
||
// {
|
||
// if (setValue)
|
||
// {
|
||
// if (CleanRoutineSucceed != null)
|
||
// {
|
||
// if (!CleanRoutineSucceed.Value)
|
||
// {
|
||
// EV.PostWarningLog(Module, "Condition:CleanRoutineSucceed(DO-173) is False!");
|
||
// return false;
|
||
// }
|
||
// }
|
||
// else
|
||
// {
|
||
// return false;
|
||
// }
|
||
// }
|
||
// return true;
|
||
// };
|
||
|
||
// //返回True，表明条件满足，强制关阀
|
||
// //V37s.FuncForceOpen = (curStatue) =>
|
||
// //{
|
||
// // if (curStatue)
|
||
// // {
|
||
// // //满足条件，强制执行
|
||
// // if (SensorPMATMSW != null)
|
||
// // {
|
||
// // if (!IsServiceMode && SensorPMATMSW.Value)
|
||
// // {
|
||
// // return true;
|
||
// // }
|
||
// // }
|
||
// // else
|
||
// // {
|
||
// // return false;
|
||
// // }
|
||
// // }
|
||
// // return false;
|
||
// //};
|
||
//}
|
||
|
||
////InterLock Only in non-service mode
|
||
//if (V51 != null)
|
||
//{
|
||
// V51.FuncCheckInterLock = (setValue) =>
|
||
// {
|
||
// if (setValue)
|
||
// {
|
||
// if (CleanRoutineSucceed != null)
|
||
// {
|
||
// if (!CleanRoutineSucceed.Value)
|
||
// {
|
||
// EV.PostWarningLog(Module, "Condition:CleanRoutineSucceed(DO-173) is False!");
|
||
// return false;
|
||
// }
|
||
// }
|
||
// else
|
||
// {
|
||
// return false;
|
||
// }
|
||
// }
|
||
// return true;
|
||
// };
|
||
|
||
// //返回True，表明条件满足，强制关阀
|
||
// //V51.FuncForceOpen = (curStatue) =>
|
||
// //{
|
||
// // if (curStatue)
|
||
// // {
|
||
// // //满足条件，强制执行
|
||
// // if (SensorPMATMSW != null)
|
||
// // {
|
||
// // if (!IsServiceMode && SensorPMATMSW.Value)
|
||
// // {
|
||
// // return true;
|
||
// // }
|
||
// // }
|
||
// // else
|
||
// // {
|
||
// // return false;
|
||
// // }
|
||
// // }
|
||
// // return false;
|
||
// //};
|
||
//}
|
||
|
||
////InterLock Only in non-service mode
|
||
//if (V52 != null)
|
||
//{
|
||
// V52.FuncCheckInterLock = (setValue) =>
|
||
// {
|
||
// if (setValue)
|
||
// {
|
||
// if (CleanRoutineSucceed != null)
|
||
// {
|
||
// if (!CleanRoutineSucceed.Value)
|
||
// {
|
||
// EV.PostWarningLog(Module, "Condition:CleanRoutineSucceed(DO-173) is False!");
|
||
// return false;
|
||
// }
|
||
// }
|
||
// else
|
||
// {
|
||
// return false;
|
||
// }
|
||
// }
|
||
// return true;
|
||
// };
|
||
|
||
// //返回True，表明条件满足，强制关阀
|
||
// //V52.FuncForceOpen = (curStatue) =>
|
||
// //{
|
||
// // if (curStatue)
|
||
// // {
|
||
// // //满足条件，强制执行
|
||
// // if (SensorPMATMSW != null)
|
||
// // {
|
||
// // if (!IsServiceMode && SensorPMATMSW.Value)
|
||
// // {
|
||
// // return true;
|
||
// // }
|
||
// // }
|
||
// // else
|
||
// // {
|
||
// // return false;
|
||
// // }
|
||
// // }
|
||
// // return false;
|
||
// //};
|
||
//}
|
||
|
||
//////InterLock Only in non-service mode
|
||
//if (V58 != null)
|
||
//{
|
||
// V58.FuncCheckInterLock = (setValue) =>
|
||
// {
|
||
// if (setValue)
|
||
// {
|
||
// if (CleanRoutineSucceed != null)
|
||
// {
|
||
// if (!CleanRoutineSucceed.Value)
|
||
// {
|
||
// EV.PostWarningLog(Module, "Condition:CleanRoutineSucceed(DO-173) is False!");
|
||
// return false;
|
||
// }
|
||
// }
|
||
// else
|
||
// {
|
||
// return false;
|
||
// }
|
||
// }
|
||
// return true;
|
||
// };
|
||
|
||
// //返回True，表明条件满足，强制关阀
|
||
// //V58.FuncForceOpen = (curStatue) =>
|
||
// //{
|
||
// // if (curStatue)
|
||
// // {
|
||
// // //满足条件，强制执行
|
||
// // if (SensorPMATMSW != null)
|
||
// // {
|
||
// // if (!IsServiceMode && SensorPMATMSW.Value)
|
||
// // {
|
||
// // return true;
|
||
// // }
|
||
// // }
|
||
// // else
|
||
// // {
|
||
// // return false;
|
||
// // }
|
||
// // }
|
||
// // return false;
|
||
// //};
|
||
//}
|
||
|
||
#endregion 以下内容为InterLock表中复合条件内容
|
||
}
|
||
|
||
public void SetHeaterStopRamp()
|
||
{
|
||
TC1.StopRamp();
|
||
TC2.StopRamp();
|
||
}
|
||
|
||
public void SetTVStopRamp()
|
||
{
|
||
_ioThrottleValve.StopRamp();
|
||
}
|
||
|
||
public void SetRotationStopRamp()
|
||
{
|
||
_sicServo.StopRamp();
|
||
}
|
||
|
||
public override bool CheckPreProcessCondition(Dictionary<string, string> recipeCommands, out string reason)
|
||
{
|
||
reason = string.Empty;
|
||
|
||
double.TryParse(recipeCommands["TV.SetPressure"], out double pressure);
|
||
double maxDiffPressure = SC.GetValue<double>($"PM.{Module}.ThrottlePressureMaxDiff");
|
||
|
||
if ((PT1.FeedBack > pressure + maxDiffPressure) || (PT1.FeedBack < pressure - maxDiffPressure))
|
||
{
|
||
reason = $"Current chamber pressure is {PT1.FeedBack} mbar, set pressure is {pressure} mbar";
|
||
return false;
|
||
}
|
||
|
||
//double.TryParse(recipeCommands["PMServo.SetActualSpeed"], out double servoSpeed);
|
||
//if ((_sicServo.ActualSpeedFeedback > servoSpeed + 2) || (_sicServo.ActualSpeedFeedback < servoSpeed - 2))
|
||
//{
|
||
// reason = $"Current Servo speed is {_sicServo.ActualSpeedFeedback}, set Servo speed is {servoSpeed}";
|
||
// return false;
|
||
//}
|
||
|
||
//string heaterControlMode = recipeCommands["HeaterControlMode"];
|
||
|
||
//if (heaterControlMode == HeaterControlMode.Power.ToString())
|
||
//{
|
||
// //double.TryParse(recipeCommands[""], out double x);
|
||
//}
|
||
//else if (heaterControlMode == HeaterControlMode.Pyro.ToString())
|
||
//{
|
||
// //double.TryParse(recipeCommands[""], out double x);
|
||
//}
|
||
//else if (heaterControlMode == HeaterControlMode.TC.ToString())
|
||
//{
|
||
// //double.TryParse(recipeCommands[""], out double x);
|
||
//}
|
||
|
||
return true;
|
||
}
|
||
|
||
public override bool CloseHeaterEnable(out string reason)
|
||
{
|
||
reason = string.Empty;
|
||
|
||
if (!PSU1.SetPSUEnable(false, out reason))
|
||
return false;
|
||
|
||
if (!PSU2.SetPSUEnable(false, out reason))
|
||
return false;
|
||
|
||
if (!PSU3.SetPSUEnable(false, out reason))
|
||
return false;
|
||
|
||
if (!SCR1.SetEnable(false, out reason))
|
||
return false;
|
||
|
||
if (!SCR2.SetEnable(false, out reason))
|
||
return false;
|
||
|
||
if (!SCR3.SetEnable(false, out reason))
|
||
return false;
|
||
|
||
return true;
|
||
}
|
||
|
||
public override bool ClosePSUEnable(out string reason)
|
||
{
|
||
reason = string.Empty;
|
||
|
||
if (!PSU1.SetPSUEnable(false, out reason))
|
||
return false;
|
||
|
||
if (!PSU2.SetPSUEnable(false, out reason))
|
||
return false;
|
||
|
||
if (!PSU3.SetPSUEnable(false, out reason))
|
||
return false;
|
||
|
||
return true;
|
||
}
|
||
|
||
public override bool CloseSCREnable(out string reason)
|
||
{
|
||
reason = string.Empty;
|
||
|
||
if (!SCR1.SetEnable(false, out reason))
|
||
return false;
|
||
|
||
if (!SCR2.SetEnable(false, out reason))
|
||
return false;
|
||
|
||
if (!SCR3.SetEnable(false, out reason))
|
||
return false;
|
||
|
||
return true;
|
||
}
|
||
|
||
public override bool EnableHeater(bool enable, out string reason)
|
||
{
|
||
reason = string.Empty;
|
||
|
||
//如果之前开启过了就不需要归0
|
||
if (!enable || !PSU1.CheckPSUEnable() || !PSU2.CheckPSUEnable() || !PSU3.CheckPSUEnable())
|
||
{
|
||
if (!TC1.SetTargetSP("L1", 0, 0) ||
|
||
!TC1.SetTargetSP("L2", 0, 0) ||
|
||
!TC1.SetTargetSP("L3", 0, 0))
|
||
return false;
|
||
|
||
TC1.RecipeSetPowerRef(0, 1);
|
||
|
||
if (!TC1.RecipeSetRatio("L1", 0, 1))
|
||
return false;
|
||
|
||
if (!TC1.RecipeSetRatio("L2", 0, 1))
|
||
return false;
|
||
|
||
if (!TC1.RecipeSetRatio("L3", 0, 1))
|
||
return false;
|
||
}
|
||
|
||
if (!enable || !SCR1.CheckSCREnable() || !SCR2.CheckSCREnable() || !SCR3.CheckSCREnable())
|
||
{
|
||
if (!TC2.SetTargetSP("L1", 0, 0) ||
|
||
!TC2.SetTargetSP("L2", 0, 0) ||
|
||
!TC2.SetTargetSP("L3", 0, 0))
|
||
return false;
|
||
|
||
TC2.RecipeSetPowerRef(0, 1);
|
||
|
||
if (!TC2.RecipeSetRatio("L1", 0, 1))
|
||
return false;
|
||
|
||
if (!TC2.RecipeSetRatio("L2", 0, 1))
|
||
return false;
|
||
|
||
if (!TC2.RecipeSetRatio("L3", 0, 1))
|
||
return false;
|
||
}
|
||
|
||
//if (!PSU1.SetHeadHeaterEnable(true, out reason))
|
||
// return false;
|
||
|
||
if (!PSU1.SetPSUEnable(true, out reason))
|
||
return false;
|
||
|
||
if (!PSU2.SetPSUEnable(true, out reason))
|
||
return false;
|
||
|
||
if (!PSU3.SetPSUEnable(true, out reason))
|
||
return false;
|
||
|
||
if (!SCR1.SetReset(true, out reason))
|
||
return false;
|
||
|
||
if (!SCR2.SetReset(true, out reason))
|
||
return false;
|
||
|
||
if (!SCR3.SetReset(true, out reason))
|
||
return false;
|
||
|
||
if (!SCR1.SetEnable(true, out reason))
|
||
return false;
|
||
|
||
if (!SCR2.SetEnable(true, out reason))
|
||
return false;
|
||
|
||
if (!SCR3.SetEnable(true, out reason))
|
||
return false;
|
||
|
||
return true;
|
||
}
|
||
|
||
public override bool CheckHeaterEnable()
|
||
{
|
||
if (!PSU1.AllHeatEnable)
|
||
return false;
|
||
|
||
if (!PSU1.StatusFeedBack)
|
||
return false;
|
||
|
||
if (!PSU2.StatusFeedBack)
|
||
return false;
|
||
|
||
if (!PSU3.StatusFeedBack)
|
||
return false;
|
||
|
||
if (!SCR1.StatusFeedBack)
|
||
return false;
|
||
|
||
if (!SCR2.StatusFeedBack)
|
||
return false;
|
||
|
||
if (!SCR3.StatusFeedBack)
|
||
return false;
|
||
|
||
return true;
|
||
}
|
||
|
||
public override bool CheckPickFromPMTemp()
|
||
{
|
||
if (TC1.MiddleTemp <= SC.GetValue<double>($"PM.{_module}.Heater.PickPVTempLimit"))
|
||
{
|
||
return true;
|
||
}
|
||
|
||
return false;
|
||
}
|
||
|
||
public override bool CheckPlacetoPMTemp()
|
||
{
|
||
if (TC1.MiddleTemp <= SC.GetValue<double>($"PM.{_module}.Heater.PlacePVTempLimit"))
|
||
{
|
||
return true;
|
||
}
|
||
|
||
return false;
|
||
}
|
||
|
||
public override bool SetRotationEnable(bool enable, out string reason)
|
||
{
|
||
reason = string.Empty;
|
||
|
||
if (!_sicServo.SetServoEnable(enable, out reason))
|
||
return false;
|
||
|
||
return true;
|
||
}
|
||
|
||
public override bool CheckRotationEnable()
|
||
{
|
||
//if (!_sicServo.ServoEnable || !_sicServo.ServoReady || _sicServo.ServoError)
|
||
if (!_sicServo.ServoEnable || !_sicServo.ServoError)
|
||
return false;
|
||
|
||
return true;
|
||
}
|
||
}
|
||
} |