313 lines
12 KiB
C#
313 lines
12 KiB
C#
using System;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using Aitex.Sorter.Common;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.Common.Schedulers;
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using MECF.Framework.Common.SubstrateTrackings;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots;
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using Aitex.Core.RT.Log;
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using Mainframe.LLs;
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using Aitex.Core.RT.Device.Unit;
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namespace Mainframe.TMs
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{
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public class TMRobotPlaceRoutine : TMBaseRoutine
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{
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enum RoutineStep
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{
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WaitOpenSlitValveInterlock,
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OpenSlitValve,
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CheckBeforePlace,
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Place,
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PrepareTransfer,
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Extend,
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Handoff,
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HandoffDelay,
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Retract,
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UpdateWaferInfoByHandoff,
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RequestWaferPresent,
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BeforePlaceRequestWaferPresent,
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AfterPlaceRequestWaferPresent,
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CheckWaferInfoByRobotSensor,
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BeforePlaceCheckWaferInfoByRobotSensor,
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AfterPlaceCheckWaferInfoByRobotSensor,
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RequestAWCData,
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SetRobortExtendToDo,
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ClearRobortExtendToDo,
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WaitCloseSlitValveInterlock,
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CloseSlitValve,
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WaitPMSensor,
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PostTransfer,
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OpenShutter,
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CloseShutter,
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Delay1,
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Delay2,
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VceMoveToSlot,
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RobotGotoNotWait,
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PrepareTransferNotWait,
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CheckRobotReady,
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CheckTransferPrepared,
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LoadRatation,
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TrayClamp,
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TrayUnClamp,
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TimeDelay1,
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TimeDelay2,
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TimeDelay3,
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SuspectorCheck
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}
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private ModuleName _target;
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private int _targetSlot;
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private RobotArmEnum _blade;
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private int _placeTimeout;
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private bool _requestAWCData;
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private bool _autoHand;
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private TMSlitValveRoutine _openSlitValveRoutine = new TMSlitValveRoutine();
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private TMSlitValveRoutine _closeSlitValveRoutine = new TMSlitValveRoutine();
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//private VCEMoveToSlotRoutine _vceMoveToSlotRoutine;
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private LoadLockTrayClawRoutine _trayClamp = new LoadLockTrayClawRoutine();
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private LoadLockTrayClawRoutine _trayUnClamp = new LoadLockTrayClawRoutine();
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private SicTM _tm;
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public TMRobotPlaceRoutine()
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{
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Module = "TMRobot";
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Name = "Place";
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_tm = DEVICE.GetDevice<SicTM>($"{ ModuleName.System.ToString()}.{ ModuleName.TM.ToString()}");
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}
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public void Init(ModuleName target, int targetSlot, RobotArmEnum blade)
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{
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Init(target, targetSlot, blade, false);
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}
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public void Init(ModuleName target, int targetSlot, int blade)
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{
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Init(target, targetSlot, blade == 0 ? RobotArmEnum.Blade1 : RobotArmEnum.Blade2, false);
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}
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public void Init(ModuleName target, int targetSlot)
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{
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Init(target, targetSlot, RobotArmEnum.Blade1, true);
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}
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private void Init(ModuleName target, int targetSlot, RobotArmEnum blade, bool autoHand)
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{
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_autoHand = autoHand;
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_target = target;
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_targetSlot = targetSlot;
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_blade = blade;
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_openSlitValveRoutine.Init(target.ToString(), true);
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_closeSlitValveRoutine.Init(target.ToString(), false);
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}
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public override Result Start(params object[] objs)
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{
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Reset();
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if (RobotDevice.RobotState != RobotStateEnum.Idle)
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{
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EV.PostWarningLog(Module, $"Can not place, TMRobot Is Not IDLE");
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return Result.FAIL;
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}
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_placeTimeout = SC.GetValue<int>("TMRobot.PlaceTimeout");
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_requestAWCData = SC.GetValue<bool>("System.RequestAWCDataAfterPlace");
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if (!WaferManager.Instance.CheckNoTray(_target, _targetSlot))
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{
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EV.PostWarningLog(Module, $"Can not place, should no tray at {_target}, {_targetSlot + 1}");
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return Result.FAIL;
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}
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if (_autoHand)
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{
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if (WaferManager.Instance.CheckHasWafer(Module, 0))
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{
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_blade = RobotArmEnum.Blade1;
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}
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else if (WaferManager.Instance.CheckHasWafer(Module, 1))
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{
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_blade = RobotArmEnum.Blade2;
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}
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else
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{
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EV.PostWarningLog(Module, $"Can not place, Robot both arm no wafer");
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return Result.FAIL;
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}
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}
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int slot = _blade == RobotArmEnum.Blade1 ? 0 : 1;
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if (WaferManager.Instance.CheckNoTray(ModuleHelper.Converter(Module), slot))
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{
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EV.PostWarningLog(Module, $"Can not place, Robot arm {slot + 1} no tray");
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return Result.FAIL;
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}
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//顶针必须在低位
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if (_target == ModuleName.LoadLock || _target == ModuleName.Load)
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{
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if (!LoadLift.IsDown)
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{
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EV.PostWarningLog(Module, $"Can not place, Load Lift must in down Position!");
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return Result.FAIL;
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}
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}
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else if (_target == ModuleName.UnLoad)
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{
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if (!UnLoadLift.IsDown)
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{
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EV.PostWarningLog(Module, $"Can not place, UnLoad Lift must in down Position!");
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return Result.FAIL;
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}
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}
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//Place之前先,根据Sensor检测是否有盘
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if (!SC.GetValue<bool>("System.IsSimulatorMode"))
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{
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if (_target ==ModuleName.LoadLock&& SensorLLTrayPresence.Value)
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{
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EV.PostWarningLog(Module, $"Can not place, LLTrayPresence sensor has tray");
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return Result.FAIL;
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}
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if (_target == ModuleName.UnLoad && SensorUnloadWaferPresence.Value)
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{
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EV.PostWarningLog(Module, $"Can not place, UnloadWaferPresence sensor has wafer");
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return Result.FAIL;
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}
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if (ModuleHelper.IsBuffer(_target) && _targetSlot == 2&& SensorBufferHighWaferPresence.Value)
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{
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EV.PostWarningLog(Module, $"Can not place,BufferHighWaferPresence sensor check has wafer");
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return Result.FAIL;
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}
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if (ModuleHelper.IsBuffer(_target) && _targetSlot == 1&& SensorBufferMiddleWaferPresence.Value)
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{
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EV.PostWarningLog(Module, $"Can not place,BufferMiddleWaferPresence sensor check has wafer");
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return Result.FAIL;
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}
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if (ModuleHelper.IsBuffer(_target) && _targetSlot == 0&& SensorBufferLowWaferPresence.Value)
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{
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EV.PostWarningLog(Module, $"Can not place,BufferLowWaferPresence sensor check has wafer");
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return Result.FAIL;
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}
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}
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_trayClamp.Init(true);
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_trayUnClamp.Init(false);
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Notify($"Start, Place to {_target} slot {_targetSlot + 1}, by {(_blade == RobotArmEnum.Blade1 ? "Blade1" : "Blade2")}");
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return Result.RUN;
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}
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public override void Abort()
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{
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_tm.CloseAllVentPumpValue();
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if (!IsPicking)
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{
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RobotDevice.Stop();
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}
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Notify("Abort");
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}
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public override Result Monitor()
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{
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try
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{
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WaitSlitValveOpenInterlock((int)RoutineStep.WaitOpenSlitValveInterlock, TMDevice.GetSlitValve(_target), _placeTimeout);
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RobotGotoNotWait((int)RoutineStep.RobotGotoNotWait, RobotDevice, _target, _targetSlot, _blade, _placeTimeout);
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//如果是Buffer腔，则不需要打开闸板阀动作
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if (_target != ModuleName.Buffer)
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{
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ExecuteRoutine((int)RoutineStep.OpenSlitValve, _openSlitValveRoutine);
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}
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//如果是PM腔，放盘前检查传感器DI_ReactorSuspectorCheck
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//如果有，则不能放盘
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if (ModuleHelper.IsPm(_target))
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{
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CheckReactorSuspector((int)RoutineStep.SuspectorCheck, _target);
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}
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CheckRobotReady((int)RoutineStep.CheckRobotReady, RobotDevice, _placeTimeout);
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CheckBeforePlace((int)RoutineStep.CheckBeforePlace, _target, _targetSlot, _blade);
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RobotRequestWaferPresent((int)RoutineStep.BeforePlaceRequestWaferPresent, RobotDevice, _blade, _placeTimeout);
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CheckWaferInfoByRobotRQ((int)RoutineStep.BeforePlaceCheckWaferInfoByRobotSensor, RobotDevice, _blade, 10);
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WaitPMReadySensor((int)RoutineStep.WaitPMSensor, _target, 5);
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SetRobortExtendToDO((int)RoutineStep.SetRobortExtendToDo, _target, 2);
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CheckRobotReady((int)RoutineStep.CheckRobotReady, RobotDevice, _placeTimeout);
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Place((int)RoutineStep.Place, RobotDevice, _target, _targetSlot, _blade, _placeTimeout);
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IsPicking = false;
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TimeDelay((int)RoutineStep.TimeDelay1, 1);
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RobotRequestWaferPresent((int)RoutineStep.RequestWaferPresent, RobotDevice, _blade, _placeTimeout);
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CheckWaferInfoByRobotRQ((int)RoutineStep.CheckWaferInfoByRobotSensor, RobotDevice, _blade, 10);
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if (_requestAWCData)
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{
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RobotRequestWaferAWCData((int)RoutineStep.RequestAWCData, RobotDevice, _placeTimeout);
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}
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ClearRobortExtendToDO((int)RoutineStep.ClearRobortExtendToDo);
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TimeDelay((int)RoutineStep.TimeDelay2, 1);
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if (_target == ModuleName.Load || _target == ModuleName.LoadLock)
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{
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//对中
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ExecuteRoutine((int)RoutineStep.TrayClamp, _trayClamp); //夹爪关闭
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TimeDelay((int)RoutineStep.TimeDelay3, 1);//延迟1s
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ExecuteRoutine((int)RoutineStep.TrayUnClamp, _trayUnClamp); //夹爪打开
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//ExecuteRoutine((int)RoutineStep.LoadRatation, loadRotationHomeRoutine);
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}
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////如果是PM腔，放完盘后检查传感器DI_ReactorSuspectorCheck
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//if (ModuleHelper.IsPm(_target))
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//{
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// CheckReactorSuspector((int)RoutineStep.SuspectorCheck);
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//}
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//如果是Buffer腔，则不需要打开闸板阀动作
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if (_target != ModuleName.Buffer)
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{
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ExecuteRoutine((int)RoutineStep.CloseSlitValve, _closeSlitValveRoutine);
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}
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}
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catch (RoutineBreakException)
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{
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return Result.RUN;
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}
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catch (RoutineFaildException ex)
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{
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LOG.Error(ex.ToString());
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RobotDevice.Stop();
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return Result.FAIL;
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}
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Notify($"Finish, Place to {_target} slot {_targetSlot + 1}, by {_blade}");
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return Result.DONE;
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}
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}
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}
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