487 lines
18 KiB
C#
487 lines
18 KiB
C#
using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Device.Devices;
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using Aitex.Core.RT.Device.Unit;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using MECF.Framework.Common.Equipment;
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using System;
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using System.Collections.Generic;
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using System.Diagnostics;
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namespace SicPM2.Routines
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{
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public class PMPurgeRoutine : PMBaseRoutine
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{
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private enum RoutineStep
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{
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RotationEnable,
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HeatEnable,
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VentPumpClose,
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ArSupply,
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SetGroupA,
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SetGroupB,
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SetGroupC,
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SetGroupE,
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SetGroupF,
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SetGroupH,
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SetGroupD,
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SetGroupG,
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SetGroupK,
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SetMFCMode,
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SetPCMode,
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SetM1to16,
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SetPC,
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SetGroupJ,
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CloseGroupJ,
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SetM291519to38,
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SetGasOut,
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SetTv,
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SetGasIn1, //V68
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OpenFinal1, //V91-96
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SetMfcFinal1, //M32-38
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SetMfc19to26,
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SetTVCloseMode,
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SetTvPositionToZero,
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SetGasIn2,
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SetGroupJOpen,
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SetM291519to26,
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SetM291519to26_1,
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OpenFinal2,
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IsOpenFinal1,
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IsOpenFinal2,
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IsCloseFinal1,
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IsCloseFinal2,
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SetMfcFinal2,
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SetEPV1,
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SetEPV2,
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SetTvMode,
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SetTVEnable,
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SetTVPressMode,
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SetTVPressMode1,
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SetTv1,
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WaitTv1,
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SetTVPositionMode,
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SetTVPositionMode_1,
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SetTVPositionMax,
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SetTVPositionMax_1,
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SetTvOpen,
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SetTvModeToPress,
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SetTVtoCurrent,
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RoutinePre,
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SetPressureUp,
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SetPressureDown,
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WaitPressureDown,
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WaitPressureUp,
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VentPumpOpen,
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PressureToMax,
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PressureToMin,
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StartLoop,
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EndLoop,
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SetMfc28to31,
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SetReactorPress,
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CloseFinanl1,
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CloseFinanl2,
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CloseEPV2,
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SetTVCloseMode2,
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CLoseTvvvv,
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SetEPVVV2,
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CLoseEPV1,
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CheckPM1000,
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WaitPressUpTo1000,
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WaitPressUpTo1020,
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SetPressUpOrDown1,
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SetPressUpOrDown2,
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SetMfc28to40Special,
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WaitPmPressureUp,
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SetMfc27to40Default,
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SetV75,
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SetV76,
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SetV31,
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SetV32,
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SetV35V36,
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SetV65,
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SetV751,
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SetV761,
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SetM2toM40,
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SetM2toM40_1,
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SetM2TOM40Default,
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SetV92V93V95,
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SetV94,
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SetV96,
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SetV68,
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SetM32M35M37,
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SetM36,
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SetM38,
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SetPC567Close,
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SetPC567Mode,
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SetPC567Default,
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OpenEPV2,
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WaitPressUpTo20,
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SetMfc291519to38,
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WaitPressUpTo0,
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SetMfc291519to38ToDefault,
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WaitPressDownTo20,
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SetPmPressureTo20,
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CloseMfcFinal1,
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CloseMfcFinal2,
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CloseMfc2915,
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CheckFinal1Open,
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SetGroupV25,
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Mfc36,
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SetM39,
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CloseMfc1to16, CloseMfc2to26, CloseJ,
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CheckTVOpen1,
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CheckTVOpen2,
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CheckEPV1Open1,
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CheckEPV2Open1,
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CheckEPV2Open2,
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CloseM32M35M37,
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CloseM36,
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CloseM38,
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CloseGasIn1,
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WaitPmPressureUp1,
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TimeDelay1,
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TimeDelay2,
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TimeDelay3,
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TimeDelay4,
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TimeDelay5,
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TimeDelay6,
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TimeDelay7,
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TimeDelay8,
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TimeDelay9,
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TimeDelay10,
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TimeDelay11,
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TimeDelay12,
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TimeDelay14,
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TimeDelay18,
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TimeDelay19,
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TimeDelay20,
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TimeDelay21,
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TimeDelay22,
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Notify1,
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Notify2
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}
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private ModuleName moduleName;
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private PM2Module _pm1Module;
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private IoThrottleValve2 _IoThrottle;
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private IoInterLock _pmIoInterLock;
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List<int> _lstPcList = new List<int> { 1, 2, 3, 4, 5, 6, 7 };
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private int _rotationCheckSpeed =0 ; //设置旋转速度为0后检查是否转速低于此数值
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private int _rotationCloseTimeout; //旋转停止超时
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private int _heatTimeOut = 5; //Heat关闭等待Di反馈超时时间
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private int _EPV2OpenTimeDelay = 10;
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private double _ventBasePressure;
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private double _pumpBasePressure;
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private int _pressureLoopCount; //Loop次数
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private int _pressureMinDelay;
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private int _pressureMaxDelay;
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private int _pressureMinTimeout;
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private int _pressureMaxTimeout;
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private int _IoValueOpenCloseTimeout = 10; //开关阀门超时时间
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private double _pmPressureMaxDiff; //蝶阀与目标压力的差值范围(认为调整到位了)
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private int _throttleTimeout; //蝶阀调整到指定压力的超时时间
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private int _EPV12TimeSapn = 10;
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private int _waitChamberTo1000TimeOut = 300; //等待腔体压力上升到1000的超时时间
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private bool _needFinalValveOpen = false;
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private Stopwatch _swTimer = new Stopwatch();
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public PMPurgeRoutine(ModuleName module, PM2Module pm) : base(module, pm)
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{
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moduleName = module;
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_pm1Module = pm;
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Name = "Purge";
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_IoThrottle = DEVICE.GetDevice<IoThrottleValve2>($"{Module}.TV");
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_pmIoInterLock = DEVICE.GetDevice<IoInterLock>($"{Module}.PMInterLock");
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}
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public override Result Start(params object[] objs)
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{
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Reset();
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_rotationCloseTimeout = SC.GetValue<int>($"PM.{Module}.RotationCloseTimeout");
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_pmPressureMaxDiff = SC.GetValue<double>($"PM.{Module}.ThrottlePressureMaxDiff");
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_throttleTimeout = SC.GetValue<int>($"PM.{Module}.ThrottlePressureTimeout");
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_pressureLoopCount = SC.GetValue<int>($"PM.{Module}.Purge.CyclePurgeCount");
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_pumpBasePressure = SC.GetValue<double>($"PM.{Module}.Purge.PumpBasePressure");
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_pressureMinDelay = SC.GetValue<int>($"PM.{Module}.Purge.PumpDelayTime");
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_pressureMinTimeout = SC.GetValue<int>($"PM.{Module}.Purge.PumpTimeout");
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_ventBasePressure = SC.GetValue<double>($"PM.{Module}.Purge.VentBasePressure");
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_pressureMaxDelay = SC.GetValue<int>($"PM.{Module}.Purge.VentDelayTime");
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_pressureMaxTimeout = SC.GetValue<int>($"PM.{Module}.Purge.VentTimeout");
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//_routineTimeOut = SC.GetValue<int>($"PM.{Module}.Purge.RoutineTimeOut");
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_needFinalValveOpen = SC.GetValue<bool>($"PM.{Module}.Purge.NeedFinalValveOpen");
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//Clean succeed 清掉
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_pmIoInterLock.DoLidCloseRoutineSucceed = false;
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_pmIoInterLock.DoLidOpenRoutineSucceed = false;
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if (!_pmIoInterLock.SetPMPurgeRoutineRunning(true, out string reason))
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{
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EV.PostAlarmLog(Module, $"can not Purge,{reason}");
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return Result.FAIL;
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}
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currentPressureUpOrDown = PressureUpOrDown.None;
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_finalOpen = false;
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_swTimer.Restart();
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Notify($"Start LoopCount:{_pressureLoopCount}");
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return Result.RUN;
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}
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public override Result Monitor()
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{
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try
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{
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//CheckRoutineTimeOut();
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//关闭V76,打开V75
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SetIoValueByGroup((int)RoutineStep.SetV76, IoGroupName.V76, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetV75, IoGroupName.V75, true, _IoValueOpenCloseTimeout);
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//旋转停止,加热停止
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SetHeatEnable((int)RoutineStep.HeatEnable, false, _heatTimeOut);
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SetRotationValve((int)RoutineStep.RotationEnable, _rotationCheckSpeed, false, _rotationCloseTimeout);
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//关闭V72,打开V25
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SetIoValueByGroup((int)RoutineStep.VentPumpClose, IoGroupName.VentPump, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupV25, IoGroupName.V25, true, _IoValueOpenCloseTimeout);
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//打开V31,打开V32
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SetIoValueByGroup((int)RoutineStep.SetV31, IoGroupName.V31, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetV32, IoGroupName.V32, true, _IoValueOpenCloseTimeout);
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//打开V35,打开V36
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SetIoValueByGroup((int)RoutineStep.SetV35V36, IoGroupName.V35V36, true, _IoValueOpenCloseTimeout);
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//关闭B/C/E/F/H/K 阀门
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SetIoValueByGroup((int)RoutineStep.SetGroupB, IoGroupName.B, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupC, IoGroupName.C, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupE, IoGroupName.E, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupF, IoGroupName.F, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupH, IoGroupName.H, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout);
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//打开D/G 阀门
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SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout);
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////打开V65
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//SetIoValueByGroup((int)RoutineStep.SetV65, IoGroupName.V65, true, _IoValueOpenCloseTimeout);
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//设置MFC和PC的模式
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SetMfcModeToNormalByGroup((int)RoutineStep.SetMFCMode, MfcGroupName.All);
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SetPcModeToNormal((int)RoutineStep.SetPCMode, _lstPcList);
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//打开J阀门
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SetIoValueByGroup((int)RoutineStep.SetGroupJ, IoGroupName.J, true, _IoValueOpenCloseTimeout);
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//M1-M16设定为default值(M2、M9、M15除外)
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SetMfcToDefaultByGroup((int)RoutineStep.SetM1to16, MfcGroupName.M1to16, 0);
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//设置所有PC到默认值
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SetPcToDefault((int)RoutineStep.SetPC, _lstPcList);
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//设置M2,M9,M15,M19-M26 3s ramp 到default 值
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SetMfcToDefaultByGroup((int)RoutineStep.SetM291519to26, MfcGroupName.M2toM26, 3);
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//打开EPV2
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SetIoValueByGroup((int)RoutineStep.SetEPV2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout);
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TimeDelay((int)RoutineStep.TimeDelay1, 3);
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//设置蝶阀Enable
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SetThrottleEnableAndWait((int)RoutineStep.SetTVEnable, _IoThrottle, 5);
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//设置蝶阀为压力模式
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SetThrottleToPressModeAndWait((int)RoutineStep.SetTVPressMode, _IoThrottle, 5);
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//伺服压力设定值到0mbar
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SetThrottlePressureAndWaitSetPoint((int)RoutineStep.SetTv1, _IoThrottle, _pumpBasePressure, _pmPressureMaxDiff, _throttleTimeout);
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//M2、M9、M15、M19-M40 MFC 5s ramp 到0
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SetMfcByGroup((int)RoutineStep.SetM2toM40, MfcGroupName.M2toM40,0, 5);
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//等待腔体压力Pump到设定值
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WaitChamberPressDownTo((int)RoutineStep.WaitTv1, _pumpBasePressure, _pmPressureMaxDiff, _throttleTimeout);
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TimeDelay((int)RoutineStep.TimeDelay2, 3);
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//蝶阀设置为位置模式,开度设置为最大
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SetThrottleToPositionMode((int)RoutineStep.SetTVPositionMode, _IoThrottle, _throttleTimeout);
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SetThrottleSetPosition((int)RoutineStep.SetTVPositionMax, _IoThrottle, 100, _throttleTimeout);
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//Final2阀对应的MFC 3s Ramp到Default值
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SetMfcToDefaultByGroup((int)RoutineStep.SetMfcFinal2, MfcGroupName.Final2, 3);
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//打开Final2阀
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SetIoValueByGroup((int)RoutineStep.OpenFinal2, IoGroupName.Final2, true, _IoValueOpenCloseTimeout);
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//打开V68
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SetIoValueByGroup((int)RoutineStep.SetV68, IoGroupName.GasIn1, true, _IoValueOpenCloseTimeout);
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TimeDelay((int)RoutineStep.TimeDelay3, 1);
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//打开V92,V93和V95,再打开V94,在打开V96
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SetMfcToDefaultByGroup((int)RoutineStep.SetM32M35M37, MfcGroupName.M32M35M37, 1);
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SetMfcToDefaultByGroup((int)RoutineStep.SetM36, MfcGroupName.M36, 1);
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SetMfcToDefaultByGroup((int)RoutineStep.SetM38, MfcGroupName.M38, 1);
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TimeDelay((int)RoutineStep.TimeDelay4, 3);
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SetIoValueByGroup((int)RoutineStep.SetV92V93V95, IoGroupName.V92V93V95, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetV94, IoGroupName.V94, true, _IoValueOpenCloseTimeout);
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TimeDelay((int)RoutineStep.TimeDelay5, 3);
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SetIoValueByGroup((int)RoutineStep.SetV96, IoGroupName.V96, true, _IoValueOpenCloseTimeout);
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//循环开始
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Loop((int)RoutineStep.StartLoop, _pressureLoopCount);
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//M2、M9、M15、M19-M40 MFC 3s ramp 到 default 值
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SetMfcToDefaultByGroup((int)RoutineStep.SetM2TOM40Default, MfcGroupName.M2toM40, 3);
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//设置蝶阀为压力模式
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SetThrottleToPressModeAndWait((int)RoutineStep.SetTVPressMode1, _IoThrottle, 5);
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//使用动态流量伺服到300mbar
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SetPressureUpOrDown((int)RoutineStep.SetPressUpOrDown1, PressureUpOrDown.Uping);
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SetThrottleToTargetAndNoWait((int)RoutineStep.SetPressureUp, _IoThrottle, _ventBasePressure);
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WaitThrottleToPressureAndSetMfcSpecial((int)RoutineStep.WaitPressureUp, _IoThrottle, _ventBasePressure, _pmPressureMaxDiff, _pressureMaxTimeout);
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TimeDelay((int)RoutineStep.TimeDelay6, _pressureMaxDelay);
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//M2、M9、M15、M19-M40 MFC 3s ramp 0
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SetMfcByGroup((int)RoutineStep.SetM2toM40_1, MfcGroupName.M2toM40, 0, 3);
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//伺服到0mbar
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SetThrottlePressureAndWait((int)RoutineStep.SetPressureDown, _IoThrottle, _pumpBasePressure, _pmPressureMaxDiff, _throttleTimeout);
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TimeDelay((int)RoutineStep.TimeDelay7, 3);
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//蝶阀设置为位置模式,开度设置为最大
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SetThrottleToPositionMode((int)RoutineStep.SetTVPositionMode_1, _IoThrottle, _throttleTimeout);
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SetThrottleSetPositionNoWait((int)RoutineStep.SetTVPositionMax_1, _IoThrottle, 100, _throttleTimeout);
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TimeDelay((int)RoutineStep.TimeDelay8, _pressureMinDelay);
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EndLoop((int)RoutineStep.EndLoop);
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//M2,M9,M15,M19-M26 3s ramp 到0
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SetMfcByGroup((int)RoutineStep.SetM291519to26_1, MfcGroupName.M2toM26, 0,3);
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//M27-M40 MFC 3s ramp 到 default 值
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SetMfcToDefaultByGroup((int)RoutineStep.SetMfc27to40Default, MfcGroupName.M27toM40, 3);
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//关闭J阀门
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SetIoValueByGroup((int)RoutineStep.CloseGroupJ, IoGroupName.J, false, _IoValueOpenCloseTimeout);
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//关闭先关蝶阀,再EPV2
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SetThrottleToCloseMode((int)RoutineStep.SetTVCloseMode2, _IoThrottle, 8);
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SetThrottleDisable((int)RoutineStep.CLoseTvvvv, _IoThrottle, 8);
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TimeDelay((int)RoutineStep.TimeDelay9, 1);
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SetIoValueByGroup((int)RoutineStep.SetEPVVV2, IoGroupName.EPV2, false, _IoValueOpenCloseTimeout);
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//等待反应腔压力到达1020
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NotifyInfo((int)RoutineStep.Notify1, $"Wait pm pressure to {_ventBasePressure} mbar!");
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WaitChamberPressUpTo((int)RoutineStep.WaitPressUpTo1000, _ventBasePressure, _waitChamberTo1000TimeOut);
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if (_needFinalValveOpen)
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{
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//打开Final1阀
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SetIoValueByGroup((int)RoutineStep.IsOpenFinal1, IoGroupName.Final1WithOutV94, true, _IoValueOpenCloseTimeout);
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//打开Final2阀
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SetIoValueByGroup((int)RoutineStep.IsOpenFinal2, IoGroupName.Final2, true, _IoValueOpenCloseTimeout);
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}
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else
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{
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//关闭Final1阀
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SetIoValueByGroup((int)RoutineStep.IsCloseFinal1, IoGroupName.Final1WithOutV94, false, _IoValueOpenCloseTimeout);
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//关闭Final2阀
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SetIoValueByGroup((int)RoutineStep.IsCloseFinal2, IoGroupName.Final2, false, _IoValueOpenCloseTimeout);
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}
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}
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catch (RoutineBreakException)
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{
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return Result.RUN;
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}
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catch (RoutineFaildException)
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{
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return Result.FAIL;
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}
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Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s");
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_swTimer.Stop();
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SetRoutineSuccessedDo();
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return Result.DONE;
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}
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public override void Abort()
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{
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_pmIoInterLock.DoLidOpenRoutineRunning = false;
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PmDevice._ioThrottleValve.StopRamp();
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PmDevice.SetMfcStopRamp(PmDevice.GetMfcListByGroupName(MfcGroupName.All));
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PmDevice.SetRotationServo(0, 0);
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base.Abort();
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}
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private void SetRoutineSuccessedDo()
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{
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_pmIoInterLock.DoLidOpenRoutineRunning = false;
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_pmIoInterLock.SetLidOpenRoutineSucceed(true, out string reason);
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_pmIoInterLock.DoLidCloseRoutineSucceed = false;
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}
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//private void CheckRoutineTimeOut()
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//{
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// if (_routineTimeOut > 10)
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// {
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// if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut)
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|
// {
|
|
// EV.PostAlarmLog(Module,$"Routine TimeOut! over {_routineTimeOut} s");
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// throw (new RoutineFaildException());
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|
// }
|
|
// }
|
|
//}
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|
}
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|
}
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