120 lines
3.3 KiB
C#
120 lines
3.3 KiB
C#
using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Log;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using MECF.Framework.Common.Equipment;
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using SicModules.EFEMs.Routines.Base;
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namespace SicModules.EFEMs.Routines
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{
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public class WaferRobotMapRoutine : EfemBaseRoutine
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{
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/* Pick From Cassette,LoadLock(需要开门),Aligner/Unload(需要开门)
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* 1.判断目标是否有Wafer
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* 2.判断是否需要开门(包括气压等)
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* 3.判断顶针是否上升
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* 4.伸出,吸住
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* 5.ActionDone
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* 6.关门
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*
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*/
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private ModuleName _source;
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private int _pickTimeout;
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enum RoutineStep
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{
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OpenSlitValve,
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SetClawOpen,
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SetLiftUp,
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CheckRobotReady,
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SetClawOpen2,
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SetClaw,
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PickComplete,
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SetLiftDown,
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SetLiftDown2,
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TimeDelay1,
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ExtendForPick,
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Pick,
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}
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public WaferRobotMapRoutine()
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{
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Module = ModuleName.EFEM.ToString();
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Name = "WaferRobortMap";
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}
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public void Init(ModuleName sourseMod)
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{
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_source = sourseMod;
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}
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public override Result Start(params object[] objs)
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{
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Reset();
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if (!ModuleHelper.IsCassette(_source))
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{
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return Result.DONE;
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}
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if (_source == ModuleName.CassAL)
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{
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//检测凸片Sensor和有无Sensor
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if (_cassALWaferConvex.Value)
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{
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EV.PostWarningLog(Module, $"Can not map,{_source} check wafer convex");
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return Result.FAIL;
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}
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if (!_cassAL6Inch.Value)
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{
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EV.PostWarningLog(Module, $"Can not map,{_source} sensor check no cassette");
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return Result.FAIL;
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}
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}
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else if (_source == ModuleName.CassAR)
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{
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//检测凸片Sensor和有无Sensor
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if (_cassARWaferConvex.Value)
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{
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EV.PostWarningLog(Module, $"Can not map,{_source} check wafer convex");
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return Result.FAIL;
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}
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if (!_cassAR6Inch.Value)
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{
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EV.PostWarningLog(Module, $"Can not map,{_source} sensor check no cassette");
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return Result.FAIL;
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}
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}
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_pickTimeout = SC.GetConfigItem($"{ModuleName.WaferRobot}.MotionTimeout").IntValue;
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return Result.RUN;
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}
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public override Result Monitor()
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{
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try
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{
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CheckRobotReady((int)RoutineStep.CheckRobotReady, WaferRobot, _pickTimeout); //判断机械手当前是否空闲
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Map((int)RoutineStep.Pick, WaferRobot, _source, _pickTimeout); //机械手吸住,收回
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}
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catch (RoutineBreakException)
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{
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return Result.RUN;
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}
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catch (RoutineFaildException ex)
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{
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LOG.Error(ex.ToString());
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return Result.FAIL;
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}
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Notify($"Finish");
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return Result.DONE;
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}
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}
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}
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