282 lines
8.3 KiB
C#
282 lines
8.3 KiB
C#
using System;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Routine;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.Common.SubstrateTrackings;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Aligners.HiWinAligner;
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namespace SicModules.Aligners.Routines.Base
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{
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public class AlignerBaseRoutine : ModuleRoutine, IRoutine
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{
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private HwAlignerGuide _alignerDevice = null;
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protected AlignerBaseRoutine() : base(ModuleName.Aligner.ToString())
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{
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_alignerDevice = DEVICE.GetDevice<HwAlignerGuide>($"Aligner.HiWinAligner");
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}
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public override void Abort()
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{
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}
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//清除Aligner报警
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protected void AlignerERS(int id,int timeout)
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{
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Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
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{
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Notify($"Aligner ERS");
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_alignerDevice.Set("ERS");
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return true;
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}, () =>
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{
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return !_alignerDevice.IsBusy;
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}, timeout * 1000);
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else if (ret.Item2 == Result.TIMEOUT)
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{
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Stop($"Aligner ERS Timeout, over {timeout} seconds");
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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}
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}
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//初始化变量
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protected void ResetVar(int id)
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{
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Tuple<bool, Result> ret = Execute(id, () =>
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{
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Notify($"Aligner Reset Variate ");
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_alignerDevice.Reset();
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return true;
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});
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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Stop($"Sensor[DI-32] check no tray");
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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}
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}
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//电机回原点
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protected void Home(int id, int timeout)
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{
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Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
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{
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Notify($"Aligner Home Msg");
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_alignerDevice.Set("HOM");
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return true;
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}, () =>
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{
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return !_alignerDevice.IsBusy;
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}, timeout * 1000);
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else if (ret.Item2 == Result.TIMEOUT) //timeout
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{
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Stop($"Aligner home Timeout, over {timeout} seconds");
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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}
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}
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//移动到测量中心
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protected void AlignerMoveToMeasure(int id, int timeout)
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{
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Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
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{
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Notify($"Move to Measure position");
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_alignerDevice.Set("MTM");
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return true;
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}, () =>
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{
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return !_alignerDevice.IsBusy;
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}, timeout * 1000);
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else if (ret.Item2 == Result.TIMEOUT)
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{
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Stop($"Aligner Move to Measure position Timeout, over {timeout} seconds");
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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}
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}
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//检查是否有Wafer
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protected void CheckHaveWafer(int id, int timeout)
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{
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Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
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{
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Notify($"check wafer exist or not");
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_alignerDevice.Set("DOC");
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return true;
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}, () =>
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{
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if (!_alignerDevice.IsBusy)
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{
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if (_alignerDevice.HaveWafer)
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{
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if (WaferManager.Instance.CheckNoWafer(Module, 0))
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{
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WaferManager.Instance.CreateWafer(ModuleHelper.Converter(Module), 0,Aitex.Core.Common.WaferStatus.Normal);
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}
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return true;
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}
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else
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{
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if (WaferManager.Instance.CheckHasWafer(Module, 0))
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{
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WaferManager.Instance.DeleteWafer(ModuleHelper.Converter(Module), 0);
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}
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return true;
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}
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}
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return false;
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}, timeout * 1000);
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else if (ret.Item2 == Result.TIMEOUT)
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{
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Stop($"Aligner Check Wafer Timeout, over {timeout} seconds");
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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}
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}
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//寻边
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protected void DoAliger(int id, int timeout)
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{
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Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
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{
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Notify($"Alinger");
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_alignerDevice.Set("BAL");
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return true;
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}, () =>
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{
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return !_alignerDevice.IsBusy;
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}, timeout * 1000);
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else if (ret.Item2 == Result.TIMEOUT)
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{
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Stop($"Aligner Alinger Timeout, over {timeout} seconds");
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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}
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}
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//打开真空
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protected void OpenVacuum(int id, int timeout)
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{
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Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
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{
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Notify($"Open Vacuum");
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_alignerDevice.Set("CVN");
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return true;
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}, () =>
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{
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return !_alignerDevice.IsBusy;
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}, timeout * 1000);
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else if (ret.Item2 == Result.TIMEOUT)
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{
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Stop($"Aligner Open Vacuum Timeout, over {timeout} seconds");
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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}
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}
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//关闭真空
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protected void CloseVacuum(int id, int timeout)
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{
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Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
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{
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Notify($"Close Vacuum");
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_alignerDevice.Set("CVF");
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return true;
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}, () =>
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{
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return !_alignerDevice.IsBusy;
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}, timeout * 1000);
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else if (ret.Item2 == Result.TIMEOUT)
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{
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Stop($"Aligner Close Vacuum Timeout, over {timeout} seconds");
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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}
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}
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}
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}
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