SicMultiplate/Modules/Mainframe/UnLoads/Routines/UnLoadPrepareTransferRoutine.cs

using Aitex.Core.RT.Event;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.Equipment;
using SicModules.UnLoads.Routines.Base;

namespace SicModules.UnLoads.Routines
{
    public class UnLoadPrepareTransferRoutine : UnLoadBaseRoutine
    {
        enum RoutineStep
        {
            CheckForelinePressure,
            RequestPump,
            RequestPumpDelay,
            SlowPump,
            CloseSlowValve,
            FastPump,
            PumpDelay,
            CloseFastValve,
            Delay,
            SlowVent,
            CloseSlowVentValve,

            TimeDelay1,
            TimeDelay2,
            TimeDelay3
        }

        private double _pumpSwitchPressure = 100;

        private int _slowPumpTimeout = 100;
        private int _fastPumpTimeout = 100;
        private int _slowVentTimeout = 100;

        private double _targetPressure;
        private double _llVacPressure = 0;
        private double _balancePressureDiff = 0;

        private double _pumpBasePressure = 0;
        private int _pumpDelayTime;

        private bool _isAtmMode;

        public UnLoadPrepareTransferRoutine()
        {
            Module = ModuleName.UnLoad.ToString();
            Name = "PrepareTransfer";
        }


        public override Result Start(params object[] objs)
        {
             Reset();
            _targetPressure = SC.GetValue<double>("TM.PressureBalance.BalancePressure");
            _llVacPressure = SC.GetValue<double>("UnLoad.VacuumPressureBase");

            _pumpBasePressure = SC.GetValue<double>("UnLoad.Purge.PumpBasePressure");
            _balancePressureDiff = SC.GetValue<double>("TM.PressureBalance.BalanceMaxDiffPressure");
            _pumpSwitchPressure = SC.GetValue<double>("UnLoad.Pump.SlowFastPumpSwitchPressure");
            _slowPumpTimeout = SC.GetValue<int>("UnLoad.Pump.SlowPumpTimeout");
            _fastPumpTimeout = SC.GetValue<int>("UnLoad.Pump.FastPumpTimeout");
            _slowVentTimeout = SC.GetValue<int>("UnLoad.Vent.SlowVentTimeout");

            _pumpDelayTime = SC.GetValue<int>("UnLoad.Purge.PumpDelayTime");

            _isAtmMode = SC.GetValue<bool>("System.IsATMMode");

            ////PrepareTrasfer需要把压力调到VacuumBasePressure以下
            //if (_targetPressure > _llVacPressure)
            //{
            //    _targetPressure = _llVacPressure;
            //}

            string reason;
            if (!UnLoadDevice.SetFastVentValve(false, out reason) || !UnLoadDevice.SetSlowVentValve(false, out reason))
            {
                EV.PostAlarmLog(Module, $"Can not turn off valves, {reason}");
                return Result.FAIL;
            }
            if (!UnLoadDevice.SetFastPumpValve(false, out reason) || !UnLoadDevice.SetSlowPumpValve(false, out reason))
            {
                EV.PostAlarmLog(Module, $"Can not turn off valves, {reason}");
                return Result.FAIL;
            }

            if (!UnLoadDevice.CheckLidClose())
            {
                EV.PostAlarmLog(Module, $"Can not pump, door is open");
                return Result.FAIL;
            }

            if (!TMDevice.CheckSlitValveClose(ModuleHelper.Converter(UnLoadDevice.Module)))
            {
                EV.PostAlarmLog(Module, $"LoadLock Can not servo to pressure, slit valve is open");
                return Result.FAIL;
            }

            //决定TargetPressure
            if (_isAtmMode)
            {
                _targetPressure = SC.GetValue<double>("UnLoad.Vent.VentBasePressure");
            }
            else
            {
                ModuleName moduleName = (ModuleName)objs[0];

                if (moduleName == ModuleName.WaferRobot)
                {
                    _targetPressure = SC.GetValue<double>("UnLoad.Vent.VentBasePressure");
                }
                else if (moduleName == ModuleName.TMRobot)
                {
                    _targetPressure = SC.GetValue<double>("TM.PressureBalance.BalancePressure");
                }
            }

            Notify("Start");
            return Result.RUN;
        }


        public override Result Monitor()
        {
            try
            {
                TimeDelay((int)RoutineStep.TimeDelay1, 1);

                SlowPump((int)RoutineStep.SlowPump, _pumpSwitchPressure, _slowPumpTimeout);

                FastPump((int)RoutineStep.FastPump, _pumpBasePressure, _fastPumpTimeout);

                TimeDelay((int)RoutineStep.TimeDelay2, _pumpDelayTime);

                CloseFastPumpValve((int)RoutineStep.CloseFastValve);

                CloseSlowPumpValve((int)RoutineStep.CloseSlowValve);

                // 模拟器运行时由于以上动作刷新DI不及时导致触发Interlock，增加一些延时
                //TODO IoValue类中检查相关DI状态。
                TimeDelay((int)RoutineStep.TimeDelay3, 2);

                SlowVent((int)RoutineStep.SlowVent, _targetPressure, _slowVentTimeout);

                CloseVentValveAndWait((int)RoutineStep.CloseSlowVentValve);
            }
            catch (RoutineBreakException)
            {
                return Result.RUN;
            }
            catch (RoutineFaildException)
            {
                //UnlockPump2();
                return Result.FAIL;
            }

            //UnlockPump2();

            Notify("Finished");

            return Result.DONE;
        }

        public override void Abort()
        {
            base.Abort();
        }
    }
}