SicMultiplate/Modules/Mainframe/UnLoads/Routines/UnLoadSeparateRoutine.cs

86 lines
2.3 KiB
C#

using Aitex.Core.RT.Event;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.UnLoad;
using SicModules.UnLoads.Routines.Base;
using System;
namespace SicModules.UnLoads.Routines
{
public class UnLoadSeparateRoutine : UnLoadBaseRoutine
{
/*
* 1、Unload伺服到传盘压力
2、夹爪打开
3、顶升晶圆
4、夹爪闭合
5、顶升缩回
6、打开闸板阀
7、Robot开始取托盘到TM
8、关闭闸板阀
*
*/
enum RoutineStep
{
ClawOpen,
LiftUp,
Clawing,
LiftDown,
TimeDelay1,
CheckSensor
}
private int _clawMoveTimeOut = 30;
private int _liftMoveTimeOut = 30;
private string message = "UnLoad wafer presence sensor check error";
private string SeparationLog;
public UnLoadSeparateRoutine()
{
Name = "Separate";
}
public override Result Start(params object[] objs)
{
Reset();
_liftMoveTimeOut = SC.GetValue<int>("UnLoad.LiftMoveTimeOut");
_clawMoveTimeOut = SC.GetValue<int>("UnLoad.ClawMoveTimeOut");
SeparationLog = SC.GetStringValue("UnLoad.SeparationLog");
Notify("Start");
return Result.RUN;
}
public override Result Monitor()
{
try
{
ClawMove((int)RoutineStep.ClawOpen, WaferClaw, false, _clawMoveTimeOut);
LiftMove((int)RoutineStep.LiftUp, true, _liftMoveTimeOut);
ClawMove((int)RoutineStep.Clawing, WaferClaw, true, _clawMoveTimeOut);
LiftMove((int)RoutineStep.LiftDown, false, _liftMoveTimeOut);
//根据感应检查分离结果
CheckSensor((int)RoutineStep.CheckSensor, _unLoadWaferPresence, SeparationLog);
}
catch (RoutineBreakException)
{
return Result.RUN;
}
catch (RoutineFaildException)
{
return Result.FAIL;
}
Notify("Finished");
return Result.DONE;
}
public override void Abort()
{
}
}
}