214 lines
7.3 KiB
C#
214 lines
7.3 KiB
C#
using System.Collections.Generic;
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namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.TDK
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{
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public enum CommandType
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{
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SET, // Initialization setting command
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MOD, // Operation mode setting command
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GET, // Status acquisition command
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FIN, // Normal reception command
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MOV, // Operation command
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EVT, // Start/Stop event report command
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RST, // Resend initialization setting command comman
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RFN, // Resend normal reception command
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RMV, // Resend operation command
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}
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public enum RespType
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{
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NAK, // Initialization setting command
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ACK, // Operation mode setting command
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INF, // Status acquisition command
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ABS, // Normal reception command
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}
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//顺序不能变!!!
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public enum Indicator
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{
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LOAD = 0x01,
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UNLOAD = 0x02,
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ACCESSMANUL = 0x03,
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PRESENCE = 0x04,
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PLACEMENT = 0x05,
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ACCESSAUTO = 0x06,
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RESERVE1 = 0x07,
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ALARM = 0x08,
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RESERVE2 = 0x9,
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CLAMP,
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DOCK,
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ACCESS_SW,
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}
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//public enum IndicatorState
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//{
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// ON,
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// BLINK,
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// OFF,
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//}
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public enum Mode
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{
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ONMGV, //Changes to the online mode
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MENTE,
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}
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public enum QueryType
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{
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STATE, //Checks the status.
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VERSN, //Checks the version.
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LEDST, //Reports the indicator status.
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MAPDT, //Wafer search data (descending order)
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MAPRD, //Wafer search data (ascending order)
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WFCNT, //Wafer quantity check
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FSBxx //Checks whether the FOSB Mode is ON/OFF
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}
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public enum EvtType
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{
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EVTON, //Starts reporting all events.(FOUP events is excluded)
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EVTOF, //Stops reporting all events. (FOUP events is excluded)
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FPEON, //Starts reporting FOUP events.
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FPEOF, //Stops reporting FOUP events.
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}
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public enum MovType
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{
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ORGSH, //Moves the FOUP to the initial position.
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ABORG, //Aborts the operation and moves the FOUP to the initial position.
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CLOAD, //Loads the FOUP (transfers the FOUP to the process unit).
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CLDDK, //Loads the FOUP (same as CLOAD) to the point where the system is ready to open the door.
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CLDYD, //Clamps the FOUP and moves the FOUP to the Y-axis docking position.
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CLDOP, //Continues loading the FOUP after CLDDK.
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CLDMP, //Maps and loads the FOUP.
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CLMPO, //Continues mapping and loading the FOUP after CLDDK.
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CULOD, //Unloads the FOUP (at the ejection position).
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CULDK, //Closes the door (same as CULOD).
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CUDCL, //Undocks the FOUP (while being clamped) after CULDK.
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CUDNC, //Unloads the FOUP after CULDK.
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CULYD, //Unloads the FOUP to the docking status.
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CULFC, //Unloads the FOUP to the point where the system can release (unclamp) the FOUP.
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CUDMP, //Maps and unloads the FOUP from the loaded status.
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CUMDK, //Maps the FOUP and closes the door from the loaded status.
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CUMFC, //Maps the FOUP to the before-unclamp status from the loaded status.
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MAPDO, //Maps the FOUP while being loaded.
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REMAP, //Resumes the interrupted mapping.
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PODOP, //FOUP clamp: Open
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PODCL, //FOUP clamp: Close
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VACON, //Vacuum on
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VACOF, //Vacuum off
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DOROP, //Latch key: Open (Unlatches the FOUP door.)
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DORCL, //Latch key: Close (Latches the FOUP door.)
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MAPOP, //Mapper arm: Open
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MAPCL, //Mapper arm: Close
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ZDRUP, //Move to Z-axis up position (door open position)
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ZDRDW, //Move to Z-axis down position (transport unit handover possible position)
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ZDRMP, //Lower to Z-axis mapping end position and conduct mapping
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ZMPST, //Move the mapper to the start position
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YWAIT, //Move to Y-axis undock position
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YDOOR, //Move to Y-axis dock position
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DORBK, //Move to door open position
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DORFW, //Move to door close position
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RETRY, //Retry during recoverable error
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STOP_, //Immediate stop and command abort
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PAUSE, //Immediate stop
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ABORT, //Command abort
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RESUM, //Resume operation
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}
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public class ErrorCode
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{
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private Dictionary<string, string> dict = new Dictionary<string, string>
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{
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{"02","Z-axis position: NG (Down)"},
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{"42","Z-axis position: NG (Up)"},
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{"04","Y-axis position: NG (Dock)"},
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{"44","Y-axis position: NG (Undock)"},
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{"07","Wafer protrusion"},
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{"47","Grass wafer protrusion (Option)"},
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{"08","Door forward/backward position: NG(Open)"},
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{"48","Door forward/backward position: NG(Close)"},
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{"F2","FOUP door close error."},
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{"09","Mapper arm position: NG (Open)"},
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{"49","Mapper arm position: NG (Close)"},
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{"11","Mapper stopper position: NG (On)"},
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{"51","Mapper stopper position: NG (Off)"},
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{"12","Mapping end position: NG"},
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{"61","FOUP clamp open error (Up)"},
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{"21","FOUP clamp open error (Back)"},
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{"62","FOUP clamp open error (Down)"},
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{"22","FOUP clamp close error (Front)"},
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{"63","FOUP clamp close error (Middle)"},
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{"23","Latch key open error"},
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{"24","Latch key close error"},
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{"25","Vacuum on error"},
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{"26","Vacuum off error"},
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{"27","Main air error "},
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{"A1","Normal position error at FOUP open"},
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{"A2","Normal position error at FOUP close"},
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{"A3","Mapper storage error when Z-axis lowered"},
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{"A4","Parallel signal error from upper machine"},
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{"FD","Interlock relay failure"},
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{"FE","Communication failure"},
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{"FF","Obstacle detection sensor failure"},
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{"FC","Fan operation error"},
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{"EE","Mapping mechanical(Adjustment) error"},
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{"EF","Mapping mechanical(Sensor) error"},
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{"F1","Door detection error during dock"},
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{"31","Door detection error except dock"},
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};
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public ErrorCode()
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{
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}
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public string Code2Msg(string code)
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{
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if (dict.ContainsKey(code))
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{
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return string.Format("Code:{0},Message:{1}", code, dict[code]);
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}
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return code;
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}
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}
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/*
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public enum LoadportCassetteState
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{
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None, //Load sensor/Position sensor: All OFF
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Normal, //Load sensor/Position sensor: All ON
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Absent, //Load sensor: ON, Position sensor: 1 or 2: ON
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Unknown,//Load sensor: ON, Position sensor: All OFF
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//or Load sensor: OFF, Except Position sensor: All OFF
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}
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public enum FoupDoorState
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{
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Open,
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Close,
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Unknown,
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}
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public enum FoupClampState
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{
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Open,
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Close,
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Unknown,
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}
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*/
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}
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