1996 lines
95 KiB
XML
1996 lines
95 KiB
XML
<UserControl
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x:Class="SicUI.Models.Maintenances.TM.EFEMView"
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xmlns="http://schemas.microsoft.com/winfx/2006/xaml/presentation"
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xmlns:x="http://schemas.microsoft.com/winfx/2006/xaml"
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xmlns:cal="http://www.caliburn.org"
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xmlns:controls="clr-namespace:SicUI.Controls.Mainframe"
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xmlns:ctrl="http://OpenSEMI.Ctrlib.com/presentation"
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xmlns:d="http://schemas.microsoft.com/expression/blend/2008"
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xmlns:deviceControl="clr-namespace:Aitex.Core.UI.DeviceControl;assembly=MECF.Framework.UI.Core"
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xmlns:i="http://schemas.microsoft.com/expression/2010/interactivity"
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xmlns:local="clr-namespace:SicUI.Models.Maintenances.TM"
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xmlns:mc="http://schemas.openxmlformats.org/markup-compatibility/2006"
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xmlns:unitControls="clr-namespace:MECF.Framework.UI.Client.Ctrlib.UnitControls;assembly=MECF.Framework.UI.Client"
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d:DesignHeight="800"
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d:DesignWidth="1980"
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mc:Ignorable="d">
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<ScrollViewer
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HorizontalScrollBarVisibility="Auto"
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IsEnabled="{Binding IsPermission}"
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VerticalScrollBarVisibility="Auto">
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<Grid>
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<Grid.ColumnDefinitions>
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<ColumnDefinition Width="330" />
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<ColumnDefinition Width="1100" />
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<ColumnDefinition Width="1*" />
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</Grid.ColumnDefinitions>
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<Grid.RowDefinitions>
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<RowDefinition Height="520" />
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<RowDefinition Height="240" />
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</Grid.RowDefinitions>
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<!-- 左侧Casstte -->
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<TabControl
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Grid.RowSpan="2"
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Grid.Column="0"
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Margin="20,0,0,30"
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HorizontalAlignment="Stretch"
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VerticalAlignment="Stretch"
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FontSize="12">
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<TabItem Header="Wafer Cassette">
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<StackPanel
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Margin="10,5"
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HorizontalAlignment="Left"
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VerticalAlignment="Top"
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Orientation="Horizontal">
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<StackPanel>
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<unitControls:FOUPFrontView
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Margin="0,0,0,0"
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UnitData="{Binding CassAL}"
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Visibility="{Binding IsLP1Installed, Converter={StaticResource BoolVisibilityConverter}}" />
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</StackPanel>
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<StackPanel Margin="5,0,0,0">
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<unitControls:FOUPFrontView
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Margin="0,0,0,0"
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UnitData="{Binding CassAR}"
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Visibility="{Binding IsLP1Installed, Converter={StaticResource BoolVisibilityConverter}}" />
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</StackPanel>
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</StackPanel>
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</TabItem>
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</TabControl>
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<!-- 显示EFEM控件 -->
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<Grid Grid.Column="1">
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<controls:EFEMControl Margin="50,80,0,0" />
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<StackPanel Margin="840,20,0,0">
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<TabControl
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HorizontalAlignment="Left"
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VerticalAlignment="Stretch"
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FontSize="12">
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<TabItem Header="Tray Cassette">
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<unitControls:FOUPFrontView UnitData="{Binding CassBL}" />
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</TabItem>
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</TabControl>
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</StackPanel>
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<Canvas>
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<TextBlock
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Canvas.Left="228"
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Canvas.Top="96"
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FontFamily="Arial"
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FontSize="18"
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Text="UnLoad"
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Visibility="{Binding IsBufferInstalled, Converter={StaticResource BoolVisibilityConverter}}" />
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<TextBlock
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Canvas.Left="77"
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Canvas.Top="270"
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FontFamily="Arial"
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FontSize="18"
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Text="Aligner"
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Visibility="{Binding IsBufferInstalled, Converter={StaticResource BoolVisibilityConverter}}" />
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<TextBlock
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Canvas.Left="412"
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Canvas.Top="334"
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FontFamily="Arial"
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FontSize="18"
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Text="Load"
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Visibility="{Binding IsBufferInstalled, Converter={StaticResource BoolVisibilityConverter}}" />
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<TextBlock
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Canvas.Left="388"
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Canvas.Top="430"
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FontFamily="Arial"
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FontSize="18"
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Text="CassAR"
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Visibility="{Binding IsBufferInstalled, Converter={StaticResource BoolVisibilityConverter}}" />
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<TextBlock
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Canvas.Left="164"
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Canvas.Top="430"
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FontFamily="Arial"
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FontSize="18"
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Text="CassAL"
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Visibility="{Binding IsBufferInstalled, Converter={StaticResource BoolVisibilityConverter}}" />
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<TextBlock
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Canvas.Left="590"
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Canvas.Top="430"
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FontFamily="Arial"
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FontSize="18"
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Text="CassB"
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Visibility="{Binding IsBufferInstalled, Converter={StaticResource BoolVisibilityConverter}}" />
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</Canvas>
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</Grid>
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<!-- 右侧操作栏 -->
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<StackPanel
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Grid.RowSpan="1"
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Grid.Column="2"
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HorizontalAlignment="Left"
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VerticalAlignment="Top">
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<Grid Width="420" Margin="0,10">
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<Grid.ColumnDefinitions>
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<ColumnDefinition Width="80" />
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<ColumnDefinition Width="*" />
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<ColumnDefinition Width="100" />
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<ColumnDefinition Width="100" />
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</Grid.ColumnDefinitions>
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<Grid.RowDefinitions>
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<RowDefinition Height="24" />
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<RowDefinition Height="32" />
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<RowDefinition Height="32" />
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</Grid.RowDefinitions>
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<Label
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Grid.Row="0"
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Grid.ColumnSpan="4"
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HorizontalContentAlignment="Center"
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VerticalContentAlignment="Center"
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Content="EFEM"
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Style="{DynamicResource Table_TitleStyle}" />
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<Border
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Grid.Row="1"
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Padding="5,1"
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Background="{DynamicResource Table_BG_Title}"
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BorderBrush="{DynamicResource Table_BD}"
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BorderThickness="1,0,1,1">
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<TextBlock
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VerticalAlignment="Center"
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FontFamily="Arial"
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FontSize="12"
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Foreground="{DynamicResource FG_Black}"
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Text="Status"
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TextWrapping="Wrap" />
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</Border>
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<Border
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Grid.Row="1"
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Grid.Column="1"
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Padding="5,1"
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Background="{DynamicResource Table_BG_Content}"
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BorderBrush="{DynamicResource Table_BD}"
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BorderThickness="0,0,0,1">
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<TextBlock
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HorizontalAlignment="Center"
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VerticalAlignment="Center"
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FontFamily="Arial"
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FontSize="12"
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Foreground="{DynamicResource FG_Black}"
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Text="{Binding EFEMStatus}"
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TextWrapping="Wrap" />
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</Border>
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<Border
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Grid.Row="1"
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Grid.Column="2"
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Padding="0,1,0,1"
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Background="{DynamicResource Table_BG_Content}"
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BorderBrush="{DynamicResource Table_BD}"
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BorderThickness="1,0,0,1">
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<StackPanel Orientation="Horizontal">
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<Button
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Width="80"
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Height="25"
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Margin="10,0"
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Content="Online">
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<i:Interaction.Triggers>
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<i:EventTrigger EventName="Click">
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<cal:ActionMessage MethodName="Online">
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<cal:Parameter Value="EFEM" />
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</cal:ActionMessage>
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</i:EventTrigger>
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</i:Interaction.Triggers>
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</Button>
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</StackPanel>
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</Border>
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<Border
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Grid.Row="1"
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Grid.Column="3"
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Padding="0,1,0,1"
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Background="{DynamicResource Table_BG_Content}"
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BorderBrush="{DynamicResource Table_BD}"
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BorderThickness="1,0,1,1">
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<StackPanel Orientation="Horizontal">
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<Button
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Width="80"
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Height="25"
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Margin="10,0"
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Content="Offline">
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<i:Interaction.Triggers>
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<i:EventTrigger EventName="Click">
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<cal:ActionMessage MethodName="Offline">
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<cal:Parameter Value="EFEM" />
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</cal:ActionMessage>
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</i:EventTrigger>
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</i:Interaction.Triggers>
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</Button>
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</StackPanel>
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</Border>
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<Border
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Grid.Row="2"
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Grid.Column="0"
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Padding="0,1,0,1"
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Background="{DynamicResource Table_BG_Title}"
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BorderBrush="{DynamicResource Table_BD}"
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BorderThickness="1,0,0,1" />
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<Border
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Grid.Row="2"
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Grid.Column="1"
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Padding="0,1,0,1"
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Background="{DynamicResource Table_BG_Content}"
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BorderBrush="{DynamicResource Table_BD}"
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BorderThickness="1,0,0,1">
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<StackPanel HorizontalAlignment="Center" Orientation="Horizontal">
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<Button
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Width="80"
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Height="25"
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Content="Home">
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<i:Interaction.Triggers>
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<i:EventTrigger EventName="Click">
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<cal:ActionMessage MethodName="Home">
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<cal:Parameter Value="EFEM" />
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</cal:ActionMessage>
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</i:EventTrigger>
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</i:Interaction.Triggers>
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</Button>
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</StackPanel>
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</Border>
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<Border
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Grid.Row="2"
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Grid.Column="2"
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Padding="0,1,0,1"
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Background="{DynamicResource Table_BG_Content}"
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BorderBrush="{DynamicResource Table_BD}"
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BorderThickness="1,0,0,1">
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<StackPanel Orientation="Horizontal">
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<Button
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Width="80"
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Height="25"
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Margin="10,0"
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Content="Abort">
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<i:Interaction.Triggers>
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<i:EventTrigger EventName="Click">
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<cal:ActionMessage MethodName="Abort">
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<cal:Parameter Value="EFEM" />
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</cal:ActionMessage>
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</i:EventTrigger>
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</i:Interaction.Triggers>
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</Button>
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</StackPanel>
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</Border>
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<Border
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Grid.Row="2"
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Grid.Column="3"
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Padding="0,1,0,1"
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Background="{DynamicResource Table_BG_Content}"
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BorderBrush="{DynamicResource Table_BD}"
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BorderThickness="1,0,1,1">
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<StackPanel Orientation="Horizontal">
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<Button
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Width="80"
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Height="25"
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Margin="10,0"
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Content="Reset">
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<i:Interaction.Triggers>
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<i:EventTrigger EventName="Click">
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<cal:ActionMessage MethodName="Reset">
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<cal:Parameter Value="EFEM" />
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</cal:ActionMessage>
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</i:EventTrigger>
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</i:Interaction.Triggers>
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</Button>
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</StackPanel>
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</Border>
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</Grid>
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<Grid Width="420" Margin="0,10">
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<Grid.ColumnDefinitions>
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<ColumnDefinition Width="80" />
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<ColumnDefinition Width="*" />
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<ColumnDefinition Width="100" />
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<ColumnDefinition Width="100" />
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</Grid.ColumnDefinitions>
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<Grid.RowDefinitions>
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<RowDefinition Height="24" />
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<RowDefinition Height="32" />
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<RowDefinition Height="32" />
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<RowDefinition Height="32" />
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</Grid.RowDefinitions>
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<Label
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Grid.Row="0"
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Grid.ColumnSpan="4"
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HorizontalContentAlignment="Center"
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VerticalContentAlignment="Center"
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Content="WaferRobot"
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Style="{DynamicResource Table_TitleStyle}" />
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<Border
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Grid.Row="1"
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Padding="5,1"
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Background="{DynamicResource Table_BG_Title}"
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BorderBrush="{DynamicResource Table_BD}"
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BorderThickness="1,0,1,1">
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<TextBlock
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VerticalAlignment="Center"
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FontFamily="Arial"
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FontSize="12"
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Foreground="{DynamicResource FG_Black}"
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Text="Status"
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TextWrapping="Wrap" />
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</Border>
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<Border
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Grid.Row="2"
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Padding="5,1"
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Background="{DynamicResource Table_BG_Title}"
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BorderBrush="{DynamicResource Table_BD}"
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BorderThickness="1,0,1,1">
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<TextBlock
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VerticalAlignment="Center"
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FontFamily="Arial"
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FontSize="12"
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Foreground="{DynamicResource FG_Black}"
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Text="Module"
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TextWrapping="Wrap" />
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</Border>
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<Border
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Grid.Row="3"
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Padding="5,1"
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Background="{DynamicResource Table_BG_Title}"
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BorderBrush="{DynamicResource Table_BD}"
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BorderThickness="1,0,1,1">
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<TextBlock
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VerticalAlignment="Center"
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FontFamily="Arial"
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FontSize="12"
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Foreground="{DynamicResource FG_Black}"
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Text="Slot"
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TextWrapping="Wrap" />
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</Border>
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<Border
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Grid.Row="1"
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Grid.Column="1"
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Padding="5,1"
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Background="{DynamicResource Table_BG_Content}"
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BorderBrush="{DynamicResource Table_BD}"
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BorderThickness="0,0,0,1">
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<TextBlock
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HorizontalAlignment="Center"
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VerticalAlignment="Center"
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FontFamily="Arial"
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FontSize="12"
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Foreground="{DynamicResource FG_Black}"
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Text="{Binding WaferRobotState}"
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TextWrapping="Wrap" />
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</Border>
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<Border
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Grid.Row="1"
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Grid.Column="2"
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Padding="0,1,0,1"
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Background="{DynamicResource Table_BG_Content}"
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BorderBrush="{DynamicResource Table_BD}"
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BorderThickness="1,0,0,1">
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<Button
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Width="80"
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Height="25"
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Margin="5,0,0,0"
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Content="Reset">
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<i:Interaction.Triggers>
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<i:EventTrigger EventName="Click">
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<cal:ActionMessage MethodName="Reset">
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<cal:Parameter Value="WaferRobot" />
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</cal:ActionMessage>
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</i:EventTrigger>
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</i:Interaction.Triggers>
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</Button>
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</Border>
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<Border
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Grid.Row="1"
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Grid.Column="3"
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Padding="0,0,1,1"
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Background="{DynamicResource Table_BG_Content}"
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BorderBrush="{DynamicResource Table_BD}"
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BorderThickness="1,0,1,1">
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<Button
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Width="80"
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Height="25"
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Margin="5,0,0,0"
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Content="Abort"
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ToolTip="Abort the motions in queue.">
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<i:Interaction.Triggers>
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<i:EventTrigger EventName="Click">
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<cal:ActionMessage MethodName="Abort">
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<cal:Parameter Value="WaferRobot" />
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</cal:ActionMessage>
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</i:EventTrigger>
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</i:Interaction.Triggers>
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</Button>
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</Border>
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<Border
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Grid.Row="2"
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Grid.Column="1"
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Padding="5,1,0,1"
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Background="{DynamicResource Table_BG_Content}"
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BorderBrush="{DynamicResource Table_BD}"
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BorderThickness="0,0,0,1">
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<ComboBox
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Width="90"
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Height="25"
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ItemsSource="{Binding WaferModules}"
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SelectedItem="{Binding WaferSelectedModule}" />
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</Border>
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<Border
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Grid.Row="3"
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Grid.Column="1"
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Padding="5,1,0,1"
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Background="{DynamicResource Table_BG_Content}"
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BorderBrush="{DynamicResource Table_BD}"
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BorderThickness="0,0,0,1">
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<ComboBox
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Width="90"
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Height="25"
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Margin="2.5,2"
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ItemsSource="{Binding WaferSlots}"
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SelectedItem="{Binding WaferSelectedSlot}" />
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</Border>
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<Border
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Grid.Row="2"
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Grid.Column="2"
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Padding="0,1,0,1"
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Background="{DynamicResource Table_BG_Content}"
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BorderBrush="{DynamicResource Table_BD}"
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BorderThickness="1,0,0,1">
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<StackPanel Orientation="Horizontal">
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<Button
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Width="80"
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Height="25"
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Margin="11,0,0,0"
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Content="Home">
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<i:Interaction.Triggers>
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<i:EventTrigger EventName="Click">
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<cal:ActionMessage MethodName="WaferRobotHome" />
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</i:EventTrigger>
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</i:Interaction.Triggers>
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</Button>
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</StackPanel>
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</Border>
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<Border
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Grid.Row="2"
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Grid.Column="3"
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Padding="0,1,0,1"
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Background="{DynamicResource Table_BG_Content}"
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BorderBrush="{DynamicResource Table_BD}"
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BorderThickness="1,0,1,1">
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<Button
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Width="80"
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Height="25"
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Margin="5,0,0,0"
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Content="Map"
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IsEnabled="{Binding IsWaferRobotEnableManualOperation}">
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<i:Interaction.Triggers>
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<i:EventTrigger EventName="Click">
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<cal:ActionMessage MethodName="WaferRobotMapRoutine" />
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</i:EventTrigger>
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</i:Interaction.Triggers>
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</Button>
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</Border>
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<Border
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Grid.Row="3"
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Grid.Column="2"
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Padding="0,1,0,1"
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Background="{DynamicResource Table_BG_Content}"
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BorderBrush="{DynamicResource Table_BD}"
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BorderThickness="1,0,0,1">
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<Button
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Width="80"
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Height="25"
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Margin="5,0,0,0"
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Content="Pick"
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IsEnabled="{Binding IsWaferRobotEnableManualOperation}">
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<i:Interaction.Triggers>
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<i:EventTrigger EventName="Click">
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<cal:ActionMessage MethodName="WaferRobotPickRoutine" />
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</i:EventTrigger>
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</i:Interaction.Triggers>
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</Button>
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</Border>
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<Border
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Grid.Row="3"
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Grid.Column="3"
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Padding="0,1,0,1"
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Background="{DynamicResource Table_BG_Content}"
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BorderBrush="{DynamicResource Table_BD}"
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BorderThickness="1,0,1,1">
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<Button
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Width="80"
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Height="25"
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Margin="5,0,0,0"
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Content="Place"
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IsEnabled="{Binding IsWaferRobotEnableManualOperation}">
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<i:Interaction.Triggers>
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<i:EventTrigger EventName="Click">
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<cal:ActionMessage MethodName="WaferRobotPlaceRoutine" />
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</i:EventTrigger>
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</i:Interaction.Triggers>
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</Button>
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</Border>
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</Grid>
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<Grid Width="420" Margin="0,10">
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<Grid.ColumnDefinitions>
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<ColumnDefinition Width="80" />
|
|
<ColumnDefinition Width="*" />
|
|
<ColumnDefinition Width="100" />
|
|
<ColumnDefinition Width="100" />
|
|
</Grid.ColumnDefinitions>
|
|
<Grid.RowDefinitions>
|
|
<RowDefinition Height="24" />
|
|
<RowDefinition Height="32" />
|
|
<RowDefinition Height="32" />
|
|
<RowDefinition Height="32" />
|
|
</Grid.RowDefinitions>
|
|
<Label
|
|
Grid.Row="0"
|
|
Grid.ColumnSpan="4"
|
|
HorizontalContentAlignment="Center"
|
|
VerticalContentAlignment="Center"
|
|
Content="TrayRobot"
|
|
Style="{DynamicResource Table_TitleStyle}" />
|
|
<Border
|
|
Grid.Row="1"
|
|
Padding="5,1"
|
|
Background="{DynamicResource Table_BG_Title}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<TextBlock
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text="Status"
|
|
TextWrapping="Wrap" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="2"
|
|
Padding="5,1"
|
|
Background="{DynamicResource Table_BG_Title}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<TextBlock
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text="Module"
|
|
TextWrapping="Wrap" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="3"
|
|
Padding="5,1"
|
|
Background="{DynamicResource Table_BG_Title}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<TextBlock
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text="Slot"
|
|
TextWrapping="Wrap" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="1"
|
|
Grid.Column="1"
|
|
Padding="5,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="0,0,0,1">
|
|
<TextBlock
|
|
HorizontalAlignment="Center"
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text="{Binding TrayRobotState}"
|
|
TextWrapping="Wrap" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="1"
|
|
Grid.Column="2"
|
|
Padding="0,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,0,1">
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="5,0,0,0"
|
|
Content="Reset">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="Reset">
|
|
<cal:Parameter Value="TrayRobot" />
|
|
</cal:ActionMessage>
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</Border>
|
|
<Border
|
|
Grid.Row="1"
|
|
Grid.Column="3"
|
|
Padding="0,0,1,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="5,0,0,0"
|
|
Content="Abort"
|
|
ToolTip="Abort the motions in queue.">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="Abort">
|
|
<cal:Parameter Value="TrayRobot" />
|
|
</cal:ActionMessage>
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</Border>
|
|
<Border
|
|
Grid.Row="2"
|
|
Grid.Column="1"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="0,0,0,1">
|
|
<ComboBox
|
|
Width="90"
|
|
Height="25"
|
|
ItemsSource="{Binding TrayModules}"
|
|
SelectedItem="{Binding TraySelectedModule}" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="3"
|
|
Grid.Column="1"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="0,0,0,1">
|
|
<ComboBox
|
|
Width="90"
|
|
Height="25"
|
|
Margin="2.5,2"
|
|
ItemsSource="{Binding TraySlots}"
|
|
SelectedItem="{Binding TraySelectedSlot}" />
|
|
</Border>
|
|
|
|
<Border
|
|
Grid.Row="2"
|
|
Grid.Column="2"
|
|
Padding="0,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,0,1">
|
|
<StackPanel Orientation="Horizontal">
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="10,0"
|
|
Content="Home">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="TrayRobotHome" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</StackPanel>
|
|
</Border>
|
|
<Border
|
|
Grid.Row="2"
|
|
Grid.Column="3"
|
|
Padding="0,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="5,0,0,0"
|
|
Content="Map"
|
|
IsEnabled="{Binding IsTrayRobotEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="TrayRobotMapRoutine" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</Border>
|
|
|
|
<Border
|
|
Grid.Row="3"
|
|
Grid.Column="2"
|
|
Padding="0,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,0,1">
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="5,0,0,0"
|
|
Content="Pick"
|
|
IsEnabled="{Binding IsTrayRobotEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="TrayRobotPickRoutine" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</Border>
|
|
<Border
|
|
Grid.Row="3"
|
|
Grid.Column="3"
|
|
Padding="0,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="5,0,0,0"
|
|
Content="Place"
|
|
IsEnabled="{Binding IsTrayRobotEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="TrayRobotPlaceRoutine" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
|
|
</Border>
|
|
</Grid>
|
|
|
|
</StackPanel>
|
|
|
|
<!-- 下方Load和UnLoad -->
|
|
|
|
<StackPanel
|
|
Grid.Row="1"
|
|
Grid.Column="1"
|
|
Grid.ColumnSpan="2"
|
|
Margin="30,-30,0,0"
|
|
HorizontalAlignment="Left"
|
|
Orientation="Horizontal">
|
|
<Grid Margin="10,0" Visibility="{Binding IsLLInstalled, Converter={StaticResource BoolVisibilityConverter}}">
|
|
<Grid.RowDefinitions>
|
|
<RowDefinition Height="24" />
|
|
<RowDefinition Height="32" />
|
|
<RowDefinition Height="32" />
|
|
<RowDefinition Height="32" />
|
|
<RowDefinition Height="32" />
|
|
<RowDefinition Height="32" />
|
|
<RowDefinition Height="32" />
|
|
<RowDefinition Height="32" />
|
|
<RowDefinition />
|
|
</Grid.RowDefinitions>
|
|
<Grid.ColumnDefinitions>
|
|
<ColumnDefinition Width="90" />
|
|
<ColumnDefinition Width="100" />
|
|
<ColumnDefinition Width="*" />
|
|
|
|
</Grid.ColumnDefinitions>
|
|
|
|
<Label
|
|
Grid.Row="0"
|
|
Grid.ColumnSpan="3"
|
|
HorizontalContentAlignment="Center"
|
|
VerticalContentAlignment="Center"
|
|
Content="Load"
|
|
Style="{DynamicResource Table_TitleStyle}" />
|
|
|
|
<Border
|
|
Grid.Row="1"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Title}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<TextBlock
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text="Status"
|
|
TextWrapping="Wrap" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="1"
|
|
Grid.Column="1"
|
|
Padding="5,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="0,0,0,1">
|
|
<TextBlock
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text="{Binding LLStatus}"
|
|
TextAlignment="Center"
|
|
TextWrapping="Wrap" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="1"
|
|
Grid.Column="2"
|
|
Padding="5,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
|
|
<StackPanel Orientation="Horizontal">
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="10,0"
|
|
Content="Home">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="Home">
|
|
<cal:Parameter Value="LoadLock" />
|
|
</cal:ActionMessage>
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="10,0"
|
|
Content="Abort">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="Abort">
|
|
<cal:Parameter Value="LoadLock" />
|
|
</cal:ActionMessage>
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="10,0"
|
|
Content="Reset">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="Reset">
|
|
<cal:Parameter Value="LoadLock" />
|
|
</cal:ActionMessage>
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</StackPanel>
|
|
</Border>
|
|
|
|
<Border
|
|
Grid.Row="2"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Title}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<TextBlock
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text="Pressure"
|
|
TextWrapping="Wrap" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="2"
|
|
Grid.Column="1"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="0,0,0,1">
|
|
<TextBlock
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text="{Binding LoadPressure, StringFormat=\{0:F1\}}"
|
|
TextAlignment="Center"
|
|
TextWrapping="Wrap" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="2"
|
|
Grid.Column="2"
|
|
Padding="5,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<StackPanel HorizontalAlignment="Left" Orientation="Horizontal">
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="10,0"
|
|
Content="Pump"
|
|
IsEnabled="{Binding IsLLEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="Pump">
|
|
<cal:Parameter Value="LoadLock" />
|
|
</cal:ActionMessage>
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="10,0"
|
|
Content="Vent"
|
|
IsEnabled="{Binding IsLLEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="Vent">
|
|
<cal:Parameter Value="LoadLock" />
|
|
</cal:ActionMessage>
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
|
|
|
|
</StackPanel>
|
|
</Border>
|
|
|
|
<Border
|
|
Grid.Row="3"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Title}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<TextBlock
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text="Door"
|
|
TextWrapping="Wrap" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="3"
|
|
Grid.Column="1"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="0,0,0,1">
|
|
<ComboBox
|
|
Width="90"
|
|
Height="25"
|
|
ItemsSource="{Binding LoadDoors}"
|
|
SelectedItem="{Binding SelectedLLDoor}" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="3"
|
|
Grid.Column="2"
|
|
Padding="5,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<StackPanel Orientation="Horizontal">
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="10,0"
|
|
HorizontalAlignment="Left"
|
|
Content="Open"
|
|
IsEnabled="{Binding IsLLEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="OpenSlitValve" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="10,0"
|
|
HorizontalAlignment="Left"
|
|
Content="Close"
|
|
IsEnabled="{Binding IsLLEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="CloseSlitValve" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</StackPanel>
|
|
</Border>
|
|
|
|
<Border
|
|
Grid.Row="4"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Title}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<TextBlock
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text="Lift"
|
|
TextWrapping="Wrap" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="4"
|
|
Grid.Column="1"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="0,0,0,1">
|
|
<TextBlock
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text=""
|
|
TextAlignment="Center"
|
|
TextWrapping="Wrap" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="4"
|
|
Grid.Column="2"
|
|
Padding="5,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<StackPanel Orientation="Horizontal">
|
|
<deviceControl:AITSensor
|
|
Margin="10,0,0,0"
|
|
HorizontalAlignment="Center"
|
|
GreenColor="True"
|
|
LightOnValue="{Binding LoadLiftUpSensor}" />
|
|
<Button
|
|
Width="80"
|
|
Height="24"
|
|
Margin="10,0"
|
|
HorizontalAlignment="Left"
|
|
Content="Up"
|
|
IsEnabled="{Binding IsLLEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="LLLiftUp" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
<deviceControl:AITSensor
|
|
Margin="60,0,0,0"
|
|
HorizontalAlignment="Center"
|
|
GreenColor="True"
|
|
LightOnValue="{Binding LoadLiftDownSensor}" />
|
|
<Button
|
|
Width="80"
|
|
Height="24"
|
|
Margin="10,0"
|
|
HorizontalAlignment="Left"
|
|
Content="Down"
|
|
IsEnabled="{Binding IsLLEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="LLLiftDown" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</StackPanel>
|
|
</Border>
|
|
|
|
<Border
|
|
Grid.Row="5"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Title}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<TextBlock
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text="WaferClaw"
|
|
TextWrapping="Wrap" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="5"
|
|
Grid.Column="1"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="0,0,0,1">
|
|
<TextBlock
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text="{Binding LLWaferClawState}"
|
|
TextAlignment="Center"
|
|
TextWrapping="Wrap" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="5"
|
|
Grid.Column="2"
|
|
Padding="5,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<StackPanel Orientation="Horizontal">
|
|
<Button
|
|
Width="80"
|
|
Height="24"
|
|
Margin="10,0"
|
|
HorizontalAlignment="Left"
|
|
Content="Open"
|
|
IsEnabled="{Binding IsLLEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="LLWaferOpen" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
<Button
|
|
Width="80"
|
|
Height="24"
|
|
Margin="10,0"
|
|
HorizontalAlignment="Left"
|
|
Content="Clamp"
|
|
IsEnabled="{Binding IsLLEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="LLWaferClamped" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</StackPanel>
|
|
</Border>
|
|
|
|
|
|
<Border
|
|
Grid.Row="6"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Title}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<TextBlock
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text="TrayClaw"
|
|
TextWrapping="Wrap" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="6"
|
|
Grid.Column="1"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="0,0,0,1">
|
|
<TextBlock
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text="{Binding LLTrayClawState}"
|
|
TextAlignment="Center"
|
|
TextWrapping="Wrap" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="6"
|
|
Grid.Column="2"
|
|
Padding="5,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<StackPanel Orientation="Horizontal">
|
|
<Button
|
|
Width="80"
|
|
Height="24"
|
|
Margin="10,0"
|
|
HorizontalAlignment="Left"
|
|
Content="Open"
|
|
IsEnabled="{Binding IsLLEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="LLTrayOpen" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
<Button
|
|
Width="80"
|
|
Height="24"
|
|
Margin="10,0"
|
|
HorizontalAlignment="Left"
|
|
Content="Clamp"
|
|
IsEnabled="{Binding IsLLEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="LLTrayClamped" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</StackPanel>
|
|
</Border>
|
|
|
|
<Border
|
|
Grid.Row="7"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Title}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<TextBlock
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text="Routine"
|
|
TextWrapping="Wrap" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="7"
|
|
Grid.Column="1"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="0,0,0,1" />
|
|
<Border
|
|
Grid.Row="7"
|
|
Grid.Column="2"
|
|
Padding="5,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<StackPanel Orientation="Horizontal">
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="10,0"
|
|
Content="Group"
|
|
IsEnabled="{Binding IsLLEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="LoadGroup" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="10,0"
|
|
Content="Separate"
|
|
IsEnabled="{Binding IsLLEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="LoadSeparate" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</StackPanel>
|
|
</Border>
|
|
|
|
|
|
|
|
</Grid>
|
|
|
|
<Grid Margin="10,0" Visibility="{Binding IsUnLoadInstalled, Converter={StaticResource BoolVisibilityConverter}}">
|
|
<Grid.RowDefinitions>
|
|
<RowDefinition Height="24" />
|
|
<RowDefinition Height="32" />
|
|
<RowDefinition Height="32" />
|
|
<RowDefinition Height="32" />
|
|
<RowDefinition Height="32" />
|
|
<RowDefinition Height="32" />
|
|
<RowDefinition Height="32" />
|
|
<RowDefinition Height="32" />
|
|
<RowDefinition />
|
|
</Grid.RowDefinitions>
|
|
<Grid.ColumnDefinitions>
|
|
<ColumnDefinition Width="90" />
|
|
<ColumnDefinition Width="100" />
|
|
<ColumnDefinition Width="*" />
|
|
|
|
</Grid.ColumnDefinitions>
|
|
|
|
<Label
|
|
Grid.Row="0"
|
|
Grid.ColumnSpan="3"
|
|
HorizontalContentAlignment="Center"
|
|
VerticalContentAlignment="Center"
|
|
Content="UnLoad"
|
|
Style="{DynamicResource Table_TitleStyle}" />
|
|
|
|
<Border
|
|
Grid.Row="1"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Title}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<TextBlock
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text="Status"
|
|
TextWrapping="Wrap" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="1"
|
|
Grid.Column="1"
|
|
Padding="5,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="0,0,0,1">
|
|
<TextBlock
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text="{Binding UnLoadStatus}"
|
|
TextAlignment="Center"
|
|
TextWrapping="Wrap" />
|
|
</Border>
|
|
|
|
<Border
|
|
Grid.Row="1"
|
|
Grid.Column="2"
|
|
Padding="5,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
|
|
<StackPanel Orientation="Horizontal">
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="10,0"
|
|
Content="Home">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="Home">
|
|
<cal:Parameter Value="UnLoad" />
|
|
</cal:ActionMessage>
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="10,0"
|
|
Content="Abort">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="Abort">
|
|
<cal:Parameter Value="UnLoad" />
|
|
</cal:ActionMessage>
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="10,0"
|
|
Content="Reset">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="Reset">
|
|
<cal:Parameter Value="UnLoad" />
|
|
</cal:ActionMessage>
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</StackPanel>
|
|
</Border>
|
|
|
|
|
|
<Border
|
|
Grid.Row="2"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Title}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<TextBlock
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text="Pressure"
|
|
TextWrapping="Wrap" />
|
|
</Border>
|
|
|
|
<Border
|
|
Grid.Row="2"
|
|
Grid.Column="1"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="0,0,0,1">
|
|
<TextBlock
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text="{Binding UnLoadPressure, StringFormat=\{0:F1\}}"
|
|
TextAlignment="Center"
|
|
TextWrapping="Wrap" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="2"
|
|
Grid.Column="2"
|
|
Padding="5,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<StackPanel HorizontalAlignment="Left" Orientation="Horizontal">
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="10,0"
|
|
Content="Pump"
|
|
IsEnabled="{Binding IsUnLoadEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="Pump">
|
|
<cal:Parameter Value="UnLoad" />
|
|
</cal:ActionMessage>
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="10,0"
|
|
Content="Vent"
|
|
IsEnabled="{Binding IsUnLoadEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="Vent">
|
|
<cal:Parameter Value="UnLoad" />
|
|
</cal:ActionMessage>
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</StackPanel>
|
|
</Border>
|
|
|
|
<Border
|
|
Grid.Row="3"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Title}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<TextBlock
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text="Door"
|
|
TextWrapping="Wrap" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="3"
|
|
Grid.Column="1"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="0,0,0,1">
|
|
<ComboBox
|
|
Width="90"
|
|
Height="25"
|
|
ItemsSource="{Binding UnLoadDoors}"
|
|
SelectedItem="{Binding SelectedUnLoadDoor}" />
|
|
</Border>
|
|
|
|
<Border
|
|
Grid.Row="3"
|
|
Grid.Column="2"
|
|
Padding="5,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<StackPanel Orientation="Horizontal">
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="10,0"
|
|
HorizontalAlignment="Left"
|
|
Content="Open"
|
|
IsEnabled="{Binding IsUnLoadEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="OpenSlitValveUnLoad" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="10,0"
|
|
HorizontalAlignment="Left"
|
|
Content="Close"
|
|
IsEnabled="{Binding IsUnLoadEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="CloseSlitValveUnLoad" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</StackPanel>
|
|
</Border>
|
|
|
|
<Border
|
|
Grid.Row="5"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Title}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<TextBlock
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text="WaferClaw"
|
|
TextWrapping="Wrap" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="5"
|
|
Grid.Column="1"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="0,0,0,1">
|
|
<TextBlock
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text="{Binding UnLoadWaferClawState}"
|
|
TextAlignment="Center"
|
|
TextWrapping="Wrap" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="5"
|
|
Grid.Column="2"
|
|
Padding="5,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<StackPanel Orientation="Horizontal">
|
|
<Button
|
|
Width="80"
|
|
Height="24"
|
|
Margin="10,0"
|
|
HorizontalAlignment="Left"
|
|
Content="Open"
|
|
IsEnabled="{Binding IsUnLoadEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="UnLoadWaferOpen" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
<Button
|
|
Width="80"
|
|
Height="24"
|
|
Margin="10,0"
|
|
HorizontalAlignment="Left"
|
|
Content="Clamp"
|
|
IsEnabled="{Binding IsUnLoadEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="UnLoadWaferClamped" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</StackPanel>
|
|
</Border>
|
|
|
|
|
|
<Border
|
|
Grid.Row="6"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Title}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<TextBlock
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text="Routine"
|
|
TextWrapping="Wrap" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="6"
|
|
Grid.Column="1"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="0,0,0,1" />
|
|
<Border
|
|
Grid.Row="6"
|
|
Grid.Column="2"
|
|
Padding="5,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<StackPanel Orientation="Horizontal">
|
|
<Button
|
|
Width="80"
|
|
Height="24"
|
|
Margin="10,0"
|
|
HorizontalAlignment="Left"
|
|
Content="Separate"
|
|
IsEnabled="{Binding IsUnLoadEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="UnLoadSeparate" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
|
|
</StackPanel>
|
|
</Border>
|
|
|
|
<Border
|
|
Grid.Row="4"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Title}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<TextBlock
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text="Lift"
|
|
TextWrapping="Wrap" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="4"
|
|
Grid.Column="1"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="0,0,0,1">
|
|
<TextBlock
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text=""
|
|
TextAlignment="Center"
|
|
TextWrapping="Wrap" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="4"
|
|
Grid.Column="2"
|
|
Padding="5,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<StackPanel Orientation="Horizontal">
|
|
<deviceControl:AITSensor
|
|
Margin="10,0,0,0"
|
|
HorizontalAlignment="Center"
|
|
GreenColor="True"
|
|
LightOnValue="{Binding UnLoadLiftUpSensor}" />
|
|
<Button
|
|
Width="80"
|
|
Height="24"
|
|
Margin="10,0"
|
|
HorizontalAlignment="Left"
|
|
Content="Up"
|
|
IsEnabled="{Binding IsUnLoadEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="UnLoadLiftUp" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
<deviceControl:AITSensor
|
|
Margin="60,0,0,0"
|
|
HorizontalAlignment="Center"
|
|
GreenColor="True"
|
|
LightOnValue="{Binding UnLoadLiftDownSensor}" />
|
|
<Button
|
|
Width="80"
|
|
Height="24"
|
|
Margin="10,0"
|
|
HorizontalAlignment="Left"
|
|
Content="Down"
|
|
IsEnabled="{Binding IsUnLoadEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="UnLoadLiftDown" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</StackPanel>
|
|
</Border>
|
|
|
|
</Grid>
|
|
</StackPanel>
|
|
<StackPanel
|
|
Grid.Row="1"
|
|
Grid.Column="2"
|
|
Grid.ColumnSpan="1"
|
|
Margin="0,-30,0,0"
|
|
HorizontalAlignment="Left"
|
|
Orientation="Horizontal">
|
|
<Grid Width="420" Margin="0,0">
|
|
<Grid.ColumnDefinitions>
|
|
<ColumnDefinition Width="80" />
|
|
<ColumnDefinition Width="*" />
|
|
<ColumnDefinition Width="100" />
|
|
<ColumnDefinition Width="100" />
|
|
</Grid.ColumnDefinitions>
|
|
<Grid.RowDefinitions>
|
|
<RowDefinition Height="24" />
|
|
<RowDefinition Height="32" />
|
|
<RowDefinition Height="32" />
|
|
<RowDefinition Height="32" />
|
|
<RowDefinition Height="32" />
|
|
</Grid.RowDefinitions>
|
|
<!-- Row 1 -->
|
|
<Label
|
|
Grid.Row="0"
|
|
Grid.ColumnSpan="4"
|
|
HorizontalContentAlignment="Center"
|
|
VerticalContentAlignment="Center"
|
|
Content="Aligner"
|
|
Style="{DynamicResource Table_TitleStyle}" />
|
|
<Border
|
|
Grid.Row="1"
|
|
Grid.RowSpan="2"
|
|
Padding="5,1"
|
|
Background="{DynamicResource Table_BG_Title}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,0,1">
|
|
<TextBlock
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text="Status"
|
|
TextWrapping="Wrap" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="1"
|
|
Grid.RowSpan="2"
|
|
Grid.Column="1"
|
|
Padding="5,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,0,1">
|
|
<TextBlock
|
|
HorizontalAlignment="Center"
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text="{Binding AlignerStatus}"
|
|
TextWrapping="Wrap" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="1"
|
|
Grid.Column="2"
|
|
Padding="0,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<StackPanel Orientation="Horizontal">
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="10,0"
|
|
Content="Home"
|
|
IsEnabled="{Binding IsEnableAligner}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="AlignerHome" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</StackPanel>
|
|
</Border>
|
|
<Border
|
|
Grid.Row="1"
|
|
Grid.Column="3"
|
|
Padding="0,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="0,0,1,1">
|
|
<StackPanel Orientation="Horizontal">
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="10,0"
|
|
Content="Abort"
|
|
ToolTip="Abort the motions in queue.">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="Abort">
|
|
<cal:Parameter Value="Aligner" />
|
|
</cal:ActionMessage>
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</StackPanel>
|
|
</Border>
|
|
<!-- Row 2 -->
|
|
<Border
|
|
Grid.Row="2"
|
|
Grid.Column="2"
|
|
Padding="0,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<StackPanel Orientation="Horizontal">
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="10,0"
|
|
Content="Align"
|
|
IsEnabled="{Binding IsEnableAligner}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="AlignerAlignerRoutine" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</StackPanel>
|
|
</Border>
|
|
<Border
|
|
Grid.Row="2"
|
|
Grid.Column="3"
|
|
Padding="0,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="0,0,1,1">
|
|
<StackPanel Orientation="Horizontal" />
|
|
</Border>
|
|
|
|
<!-- Row 3 -->
|
|
<Border
|
|
Grid.Row="3"
|
|
Grid.Column="0"
|
|
Grid.ColumnSpan="4"
|
|
Padding="0,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<StackPanel Orientation="Horizontal">
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="10,0"
|
|
Content="开真空"
|
|
IsEnabled="{Binding IsEnableAligner}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="Aligner_CVN" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="10,0"
|
|
Content="寻边"
|
|
IsEnabled="{Binding IsEnableAligner}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="Aligner_BAL" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="10,0"
|
|
Content="关真空"
|
|
IsEnabled="{Binding IsEnableAligner}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="Aligner_CVF" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="10,0"
|
|
Content="读取真空"
|
|
IsEnabled="{Binding IsEnableAligner}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="Aligner_CVD" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</StackPanel>
|
|
</Border>
|
|
|
|
<!-- Row 4 -->
|
|
<Border
|
|
Grid.Row="4"
|
|
Grid.Column="0"
|
|
Grid.ColumnSpan="4"
|
|
Padding="0,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<StackPanel Orientation="Horizontal">
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="10,0"
|
|
Content="量测中心"
|
|
IsEnabled="{Binding IsEnableAligner}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="Aligner_MTM" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="10,0"
|
|
Content="错误信息"
|
|
IsEnabled="{Binding IsEnableAligner}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="Aligner_PER" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="10,0"
|
|
Content="清除报警"
|
|
IsEnabled="{Binding IsEnableAligner}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="Aligner_ERS" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</StackPanel>
|
|
</Border>
|
|
|
|
</Grid>
|
|
</StackPanel>
|
|
</Grid>
|
|
</ScrollViewer>
|
|
</UserControl>
|