Base
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1修改气阀打开不对应问题
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2024-05-28 11:17:00 +08:00 |
EFEMHomeRoutine.cs
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Mainframe工程更名为SicModules。
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2023-04-13 15:35:13 +08:00 |
TrayRobotHomeRoutine.cs
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Mainframe工程更名为SicModules。
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2023-04-13 15:35:13 +08:00 |
TrayRobotMapRoutine.cs
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1.Cassette不存在由Warning改为Alarm
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2024-01-11 14:55:22 +08:00 |
TrayRobotPickRoutine.cs
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1.Cassette不存在由Warning改为Alarm
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2024-01-11 14:55:22 +08:00 |
TrayRobotPlaceRoutine.cs
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自动传盘流程添加
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2024-06-13 18:13:59 +08:00 |
WaferRobotHomeRoutine.cs
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Mainframe工程更名为SicModules。
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2023-04-13 15:35:13 +08:00 |
WaferRobotMapRoutine.cs
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1.Cassette不存在由Warning改为Alarm
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2024-01-11 14:55:22 +08:00 |
WaferRobotPickRoutine.cs
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自动传盘流程添加
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2024-06-13 18:13:59 +08:00 |
WaferRobotPlaceRoutine.cs
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1.Cassette不存在由Warning改为Alarm
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2024-01-11 14:55:22 +08:00 |