SicMultiplate/Modules/Mainframe/Aligners/AlignerBaseRoutine.cs

282 lines
8.3 KiB
C#

using Aitex.Core.RT.Device;
using Aitex.Core.RT.Routine;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.SubstrateTrackings;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Aligners.HwAligner;
using System;
namespace Mainframe.Aligners
{
public class AlignerBaseRoutine : ModuleRoutine, IRoutine
{
private HwAlignerGuide _alignerDevice = null;
protected AlignerBaseRoutine() : base(ModuleName.Aligner.ToString())
{
_alignerDevice = DEVICE.GetDevice<HwAlignerGuide>($"Aligner.HiWinAligner");
}
public override void Abort()
{
}
//清除Aligner报警
protected void AlignerERS(int id,int timeout)
{
Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
{
Notify($"Aligner ERS");
_alignerDevice.Set("ERS", "ERS");
return true;
}, () =>
{
return !_alignerDevice.IsBusy;
}, timeout * 1000);
if (ret.Item1)
{
if (ret.Item2 == Result.FAIL)
{
throw (new RoutineFaildException());
}
else if (ret.Item2 == Result.TIMEOUT)
{
Stop($"Aligner ERS Timeout, over {timeout} seconds");
throw (new RoutineFaildException());
}
else
throw (new RoutineBreakException());
}
}
//初始化变量
protected void ResetVar(int id)
{
Tuple<bool, Result> ret = Execute(id, () =>
{
Notify($"Aligner Reset Variate ");
_alignerDevice.Reset();
return true;
});
if (ret.Item1)
{
if (ret.Item2 == Result.FAIL)
{
Stop($"Sensor[DI-32] check no tray");
throw (new RoutineFaildException());
}
else
throw (new RoutineBreakException());
}
}
//电机回原点
protected void Home(int id, int timeout)
{
Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
{
Notify($"Aligner Home Msg");
_alignerDevice.Set("HOM", "HOM");
return true;
}, () =>
{
return !_alignerDevice.IsBusy;
}, timeout * 1000);
if (ret.Item1)
{
if (ret.Item2 == Result.FAIL)
{
throw (new RoutineFaildException());
}
else if (ret.Item2 == Result.TIMEOUT) //timeout
{
Stop($"Aligner home Timeout, over {timeout} seconds");
throw (new RoutineFaildException());
}
else
throw (new RoutineBreakException());
}
}
//移动到测量中心
protected void AlignerMoveToMeasure(int id, int timeout)
{
Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
{
Notify($"Move to Measure position");
_alignerDevice.Set("MTM","MTM");
return true;
}, () =>
{
return !_alignerDevice.IsBusy;
}, timeout * 1000);
if (ret.Item1)
{
if (ret.Item2 == Result.FAIL)
{
throw (new RoutineFaildException());
}
else if (ret.Item2 == Result.TIMEOUT)
{
Stop($"Aligner Move to Measure position Timeout, over {timeout} seconds");
throw (new RoutineFaildException());
}
else
throw (new RoutineBreakException());
}
}
//检查是否有Wafer
protected void CheckHaveWafer(int id, int timeout)
{
Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
{
Notify($"check wafer exist or not");
_alignerDevice.Set("DOC", "DOC");
return true;
}, () =>
{
if (!_alignerDevice.IsBusy)
{
if (_alignerDevice.HaveWafer)
{
if (WaferManager.Instance.CheckNoWafer(Module, 0))
{
WaferManager.Instance.CreateWafer(ModuleHelper.Converter(Module), 0,Aitex.Core.Common.WaferStatus.Normal);
}
return true;
}
else
{
if (WaferManager.Instance.CheckHasWafer(Module, 0))
{
WaferManager.Instance.DeleteWafer(ModuleHelper.Converter(Module), 0);
}
return true;
}
}
return false;
}, timeout * 1000);
if (ret.Item1)
{
if (ret.Item2 == Result.FAIL)
{
throw (new RoutineFaildException());
}
else if (ret.Item2 == Result.TIMEOUT)
{
Stop($"Aligner Check Wafer Timeout, over {timeout} seconds");
throw (new RoutineFaildException());
}
else
throw (new RoutineBreakException());
}
}
//寻边
protected void DoAliger(int id, int timeout)
{
Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
{
Notify($"Alinger");
_alignerDevice.Set("BAL", "BAL");
return true;
}, () =>
{
return !_alignerDevice.IsBusy;
}, timeout * 1000);
if (ret.Item1)
{
if (ret.Item2 == Result.FAIL)
{
throw (new RoutineFaildException());
}
else if (ret.Item2 == Result.TIMEOUT)
{
Stop($"Aligner Alinger Timeout, over {timeout} seconds");
throw (new RoutineFaildException());
}
else
throw (new RoutineBreakException());
}
}
//打开真空
protected void OpenVacuum(int id, int timeout)
{
Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
{
Notify($"Open Vacuum");
_alignerDevice.Set("CVN", "CVN");
return true;
}, () =>
{
return !_alignerDevice.IsBusy;
}, timeout * 1000);
if (ret.Item1)
{
if (ret.Item2 == Result.FAIL)
{
throw (new RoutineFaildException());
}
else if (ret.Item2 == Result.TIMEOUT)
{
Stop($"Aligner Open Vacuum Timeout, over {timeout} seconds");
throw (new RoutineFaildException());
}
else
throw (new RoutineBreakException());
}
}
//关闭真空
protected void CloseVacuum(int id, int timeout)
{
Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
{
Notify($"Close Vacuum");
_alignerDevice.Set("CVF", "CVF");
return true;
}, () =>
{
return !_alignerDevice.IsBusy;
}, timeout * 1000);
if (ret.Item1)
{
if (ret.Item2 == Result.FAIL)
{
throw (new RoutineFaildException());
}
else if (ret.Item2 == Result.TIMEOUT)
{
Stop($"Aligner Close Vacuum Timeout, over {timeout} seconds");
throw (new RoutineFaildException());
}
else
throw (new RoutineBreakException());
}
}
}
}