HCL 81c75b3b96 Merge branch 'feature/可编辑Routine' into develop ... # Conflicts: # ThirdParty/MECF.Framework/MECF.Framework.Common.dll # ThirdParty/MECF.Framework/MECF.Framework.RT.Core.dll # ThirdParty/MECF.Framework/MECF.Framework.RT.EquipmentLibrary.dll # ThirdParty/MECF.Framework/MECF.Framework.Simulator.Core.dll # ThirdParty/MECF.Framework/MECF.Framework.UI.Client.dll # ThirdParty/MECF.Framework/MECF.Framework.UI.Core.dll		2023-08-24 11:26:21 +08:00
..
Aligners	更新库文件（Commit 90fa346），优化HiWin Aligner执行命令错误后的信息。	2023-08-22 17:56:16 +08:00
Buffers	修改一些Routine的Start方法和Monitor方法，改为重载基类的StartBody方法和MonitorBody方法。	2023-04-20 16:52:42 +08:00
Cassettes	删除久的Coating，修改加热配置项数据类型	2023-06-01 16:56:20 +08:00
Config	1.更新进度	2023-08-23 14:41:54 +08:00
Devices	1.修改Load 旋转电机CCD位置逻辑	2023-08-10 16:35:52 +08:00
EFEMs	更新库文件（Commit 90fa346），优化HiWin Aligner执行命令错误后的信息。	2023-08-22 17:56:16 +08:00
LLs	1.Load Pump时不关闭TM Fast Pump阀	2023-08-10 16:51:27 +08:00
PMs	1.更新进度	2023-08-24 11:23:57 +08:00
Properties	Add project files.	2023-03-03 15:42:13 +08:00
TMs	TM,Load,Unload腔漏检Routine添加延时，参考PM腔漏检的延时调用时机	2023-07-18 15:51:57 +08:00
UnLoads	1.Load和Unload Purge增加Vent超时时间	2023-08-10 14:32:17 +08:00
SicModules.csproj	Merge branch 'feature/可编辑Routine' into develop	2023-08-24 11:26:21 +08:00