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SicMultiplate/Modules/Mainframe/SicModules.csproj

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<?xml version="1.0" encoding="utf-8"?>
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<RootNamespace>SicModules</RootNamespace>
<AssemblyName>SicModules</AssemblyName>
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<Reference Include="MECF.Framework.RT.EquipmentLibrary">
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<Reference Include="System.Data" />
<Reference Include="System.Net.Http" />
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<ItemGroup>
<Compile Include="Aligners\AlignerModule.cs" />
<Compile Include="Aligners\AlignerModuleBase.cs" />
<Compile Include="Aligners\Routines\AlignerAlignRoutine.cs" />
<Compile Include="Aligners\Routines\AlignerHomeRoutine.cs" />
<Compile Include="Aligners\Routines\Base\AlignerBaseRoutine.cs" />
<Compile Include="Buffers\BufferModule.cs" />
<Compile Include="Buffers\BufferModuleBase.cs" />
<Compile Include="Buffers\Routines\BufferCoolingRoutine.cs" />
<Compile Include="Buffers\Routines\BufferHomeRoutine.cs" />
<Compile Include="Buffers\SicBuffer.cs" />
<Compile Include="Cassettes\CassetteModule.cs" />
<Compile Include="Cassettes\CassetteModuleBase.cs" />
<Compile Include="Cassettes\SicCassette.cs" />
<Compile Include="Devices\AkOpticsViper.cs" />
<Compile Include="Devices\IoInterLock.cs" />
<Compile Include="Devices\IoLoadRotation.cs" />
<Compile Include="Devices\IoPump.cs" />
<Compile Include="Devices\SicAds.cs" />
<Compile Include="Devices\SiemensIoProvider.cs" />
<Compile Include="Devices\TcAds.cs" />
<Compile Include="EFEMs\Routines\Base\EfemBaseRoutine.cs" />
<Compile Include="EFEMs\Routines\EFEMHomeRoutine.cs" />
<Compile Include="EFEMs\Routines\EfemSlitValveRoutine.cs" />
<Compile Include="EFEMs\Routines\TrayRobotHomeRoutine.cs" />
<Compile Include="EFEMs\Routines\TrayRobotMapRoutine.cs" />
<Compile Include="EFEMs\Routines\TrayRobotPickRoutine.cs" />
<Compile Include="EFEMs\Routines\TrayRobotPlaceRoutine.cs" />
<Compile Include="EFEMs\Routines\WaferRobotHomeRoutine.cs" />
<Compile Include="EFEMs\Routines\WaferRobotMapRoutine.cs" />
<Compile Include="EFEMs\Routines\WaferRobotPickRoutine.cs" />
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<Compile Include="EFEMs\SicTrayRobot.cs" />
<Compile Include="EFEMs\SicWaferRobot.cs" />
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<Compile Include="EFEMs\WaferRobotModule.cs" />
<Compile Include="EFEMs\EFEMModule.cs" />
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<Compile Include="EFEMs\SicEFEM.cs" />
<Compile Include="LLs\LoadLockModule.cs" />
<Compile Include="LLs\LoadLockModuleBase.cs" />
<Compile Include="LLs\Routines\Base\LoadLockBaseRoutine.cs" />
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<Compile Include="LLs\Routines\LoadLockGroupRoutine.cs" />
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<Compile Include="LLs\Routines\LoadLockTrayAlignerRoutine.cs" />
<Compile Include="LLs\Routines\LoadLockTrayClawRoutine.cs" />
<Compile Include="LLs\Routines\LoadLockVentRoutine.cs" />
<Compile Include="LLs\Routines\LoadRotationHomeOffsetRoutine.cs" />
<Compile Include="LLs\Routines\LoadSeparateRoutine.cs" />
<Compile Include="LLs\SicLoadLock.cs" />
<Compile Include="PMs\PM1.cs" />
<Compile Include="PMs\PM2.cs" />
<Compile Include="PMs\PMModule.cs" />
<Compile Include="PMs\PMModuleDevice.cs" />
<Compile Include="PMs\PMModuleInterlock.cs" />
<Compile Include="PMs\RecipeExecutions\CleanRecipe.cs" />
<Compile Include="PMs\RecipeExecutions\Fdc.cs" />
<Compile Include="PMs\RecipeExecutions\IRecipeDBCallback.cs" />
<Compile Include="PMs\RecipeExecutions\IRecipeExecutor.cs" />
<Compile Include="PMs\RecipeExecutions\PostProcess.cs" />
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<Compile Include="PMs\RecipeExecutions\ProcessCalculate.cs" />
<Compile Include="PMs\RecipeExecutions\RecipeDBCallback.cs" />
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<Compile Include="PMs\RecipeExecutions\RecipeRunningInfo.cs" />
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<Compile Include="PMs\RecipeExecutions\SicRecipeFileContext.cs" />
<Compile Include="PMs\Routines\Base\PMBaseRoutine.cs" />
<Compile Include="PMs\Routines\PMButttomSectionMoveRoutine.cs" />
<Compile Include="PMs\Routines\PMChamberMoveBodyRoutine.cs" />
<Compile Include="PMs\Routines\PMCleanRoutine.cs" />
<Compile Include="PMs\Routines\PMExchangeMoRoutine.cs" />
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<Compile Include="PMs\Routines\PMLeakCheckRoutine.cs" />
<Compile Include="PMs\Routines\PMMfcRorRoutine.cs" />
<Compile Include="PMs\Routines\PMMfcValueTestRoutine.cs" />
<Compile Include="PMs\Routines\PMPcCalibrationRoutine.cs" />
<Compile Include="PMs\Routines\PMPostTransferRoutine.cs" />
<Compile Include="PMs\Routines\PMPrepareTransferRoutine.cs" />
<Compile Include="PMs\Routines\PMProcessAbortRoutine.cs" />
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<Compile Include="PMs\Routines\PMPurgeRoutine.cs" />
<Compile Include="PMs\Routines\PMServoToPressure.cs" />
<Compile Include="PMs\Routines\PMStopHeatEnableRoutine.cs" />
<Compile Include="PMs\Routines\PMToAtmIdleRoutine.cs" />
<Compile Include="PMs\Routines\PMToIsolationRoutine.cs" />
<Compile Include="PMs\Routines\PMToProcessIdleRoutine.cs" />
<Compile Include="PMs\Routines\PMVacIdleRoutine.cs" />
<Compile Include="PMs\Routines\PMVentRoutine.cs" />
<Compile Include="PMs\Routines\EditableRoutine\EditableRoutine.cs" />
<Compile Include="PMs\Routines\EditableRoutine\EditableRoutineParser.cs" />
<Compile Include="PMs\Utilities\UnitAlarmItem.cs" />
<Compile Include="PMs\Utilities\XmlConfig.cs" />
<Compile Include="Properties\AssemblyInfo.cs" />
<Compile Include="TMs\Routines\Base\TMBaseRoutine.cs" />
<Compile Include="TMs\Routines\TMHomeRoutine.cs" />
<Compile Include="TMs\Routines\TMLeakcheckRoutine.cs" />
<Compile Include="TMs\Routines\TMPressureBalancePidRoutine.cs" />
<Compile Include="TMs\Routines\TMPressureBalanceRoutine.cs" />
<Compile Include="TMs\Routines\TMPumpRoutine.cs" />
<Compile Include="TMs\Routines\TMPurgeRoutine.cs" />
<Compile Include="TMs\Routines\TMRobotExtendRoutine.cs" />
<Compile Include="TMs\Routines\TMRobotGoToRoutine.cs" />
<Compile Include="TMs\Routines\TMRobotHomeRoutine.cs" />
<Compile Include="TMs\Routines\TMRobotPickAndPlaceRoutine.cs" />
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<Compile Include="TMs\Routines\TMRobotRetractRoutine.cs" />
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<Compile Include="UnLoads\Routines\Base\UnLoadBaseRoutine.cs" />
<Compile Include="UnLoads\Routines\UnLoadClawRoutine.cs" />
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<Compile Include="UnLoads\Routines\UnLoadServoToRoutine.cs" />
<Compile Include="UnLoads\Routines\UnLoadVentRoutine.cs" />
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</Project>
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