306 lines
11 KiB
C#
306 lines
11 KiB
C#
using Aitex.Core.RT.Device;
|
||
using Aitex.Core.RT.Event;
|
||
using Aitex.Core.RT.Log;
|
||
using Aitex.Core.RT.Routine;
|
||
using Aitex.Core.RT.SCCore;
|
||
using MECF.Framework.Common.Equipment;
|
||
using MECF.Framework.Common.SubstrateTrackings;
|
||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots;
|
||
using SicModules.LLs.Routines;
|
||
using SicModules.TMs.Routines.Base;
|
||
|
||
namespace SicModules.TMs.Routines
|
||
{
|
||
public class TMRobotPlaceRoutine : TMBaseRoutine
|
||
{
|
||
enum RoutineStep
|
||
{
|
||
|
||
WaitOpenSlitValveInterlock,
|
||
OpenSlitValve,
|
||
|
||
CheckBeforePlace,
|
||
Place,
|
||
PrepareTransfer,
|
||
|
||
Extend,
|
||
Handoff,
|
||
HandoffDelay,
|
||
Retract,
|
||
UpdateWaferInfoByHandoff,
|
||
|
||
RequestWaferPresent,
|
||
BeforePlaceRequestWaferPresent,
|
||
AfterPlaceRequestWaferPresent,
|
||
CheckWaferInfoByRobotSensor,
|
||
BeforePlaceCheckWaferInfoByRobotSensor,
|
||
AfterPlaceCheckWaferInfoByRobotSensor,
|
||
RequestAWCData,
|
||
SetRobortExtendToDo,
|
||
ClearRobortExtendToDo,
|
||
|
||
WaitCloseSlitValveInterlock,
|
||
CloseSlitValve,
|
||
WaitPMSensor,
|
||
PostTransfer,
|
||
OpenShutter,
|
||
CloseShutter,
|
||
Delay1,
|
||
Delay2,
|
||
VceMoveToSlot,
|
||
RobotGotoNotWait,
|
||
PrepareTransferNotWait,
|
||
CheckRobotReady,
|
||
CheckTransferPrepared,
|
||
LoadRatation,
|
||
TrayClamp,
|
||
TrayUnClamp,
|
||
TimeDelay1,
|
||
TimeDelay2,
|
||
TimeDelay3,
|
||
SuspectorCheck
|
||
}
|
||
|
||
private ModuleName _target;
|
||
private int _targetSlot;
|
||
private RobotArmEnum _blade;
|
||
private int _placeTimeout;
|
||
private bool _requestAWCData;
|
||
|
||
private bool _autoHand;
|
||
private TMSlitValveRoutine _openSlitValveRoutine = new TMSlitValveRoutine();
|
||
private TMSlitValveRoutine _closeSlitValveRoutine = new TMSlitValveRoutine();
|
||
//private VCEMoveToSlotRoutine _vceMoveToSlotRoutine;
|
||
|
||
private LoadLockTrayClawRoutine _trayClamp = new LoadLockTrayClawRoutine();
|
||
private LoadLockTrayClawRoutine _trayUnClamp = new LoadLockTrayClawRoutine();
|
||
private SicTM _tm;
|
||
|
||
public TMRobotPlaceRoutine()
|
||
{
|
||
Module = "TMRobot";
|
||
Name = "Place";
|
||
_tm = DEVICE.GetDevice<SicTM>($"{ ModuleName.System.ToString()}.{ ModuleName.TM.ToString()}");
|
||
|
||
}
|
||
|
||
public void Init(ModuleName target, int targetSlot, RobotArmEnum blade)
|
||
{
|
||
Init(target, targetSlot, blade, false);
|
||
}
|
||
|
||
public void Init(ModuleName target, int targetSlot, int blade)
|
||
{
|
||
Init(target, targetSlot, blade == 0 ? RobotArmEnum.Blade1 : RobotArmEnum.Blade2, false);
|
||
}
|
||
|
||
public void Init(ModuleName target, int targetSlot)
|
||
{
|
||
Init(target, targetSlot, RobotArmEnum.Blade1, true);
|
||
}
|
||
|
||
private void Init(ModuleName target, int targetSlot, RobotArmEnum blade, bool autoHand)
|
||
{
|
||
_autoHand = autoHand;
|
||
_target = target;
|
||
_targetSlot = targetSlot;
|
||
_blade = blade;
|
||
|
||
_openSlitValveRoutine.Init(target.ToString(), true);
|
||
_closeSlitValveRoutine.Init(target.ToString(), false);
|
||
}
|
||
|
||
public override Result Start(params object[] objs)
|
||
{
|
||
Reset();
|
||
if (RobotDevice.RobotState != RobotStateEnum.Idle)
|
||
{
|
||
EV.PostWarningLog(Module, $"Can not place, TMRobot Is Not IDLE");
|
||
return Result.FAIL;
|
||
}
|
||
_placeTimeout = SC.GetValue<int>("TMRobot.PlaceTimeout");
|
||
_requestAWCData = SC.GetValue<bool>("System.RequestAWCDataAfterPlace");
|
||
|
||
if (!WaferManager.Instance.CheckNoTray(_target, _targetSlot))
|
||
{
|
||
EV.PostWarningLog(Module, $"Can not place, should no tray at {_target}, {_targetSlot + 1}");
|
||
return Result.FAIL;
|
||
}
|
||
|
||
if (_autoHand)
|
||
{
|
||
if (WaferManager.Instance.CheckHasWafer(Module, 0))
|
||
{
|
||
_blade = RobotArmEnum.Blade1;
|
||
}
|
||
else if (WaferManager.Instance.CheckHasWafer(Module, 1))
|
||
{
|
||
_blade = RobotArmEnum.Blade2;
|
||
}
|
||
else
|
||
{
|
||
EV.PostWarningLog(Module, $"Can not place, Robot both arm no wafer");
|
||
return Result.FAIL;
|
||
}
|
||
}
|
||
|
||
int slot = _blade == RobotArmEnum.Blade1 ? 0 : 1;
|
||
if (WaferManager.Instance.CheckNoTray(ModuleHelper.Converter(Module), slot))
|
||
{
|
||
EV.PostWarningLog(Module, $"Can not place, Robot arm {slot + 1} no tray");
|
||
return Result.FAIL;
|
||
}
|
||
|
||
//顶针必须在低位
|
||
if (_target == ModuleName.LoadLock || _target == ModuleName.Load)
|
||
{
|
||
if (!LoadLift.IsDown)
|
||
{
|
||
EV.PostWarningLog(Module, $"Can not place, Load Lift must in down Position!");
|
||
return Result.FAIL;
|
||
}
|
||
}
|
||
else if (_target == ModuleName.UnLoad)
|
||
{
|
||
if (!UnLoadLift.IsDown)
|
||
{
|
||
EV.PostWarningLog(Module, $"Can not place, UnLoad Lift must in down Position!");
|
||
return Result.FAIL;
|
||
}
|
||
}
|
||
|
||
|
||
//Place之前先,根据Sensor检测是否有盘
|
||
if (!SC.GetValue<bool>("System.IsSimulatorMode"))
|
||
{
|
||
if (_target ==ModuleName.LoadLock&& SensorLLTrayPresence.Value)
|
||
{
|
||
EV.PostWarningLog(Module, $"Can not place, LLTrayPresence sensor has tray");
|
||
return Result.FAIL;
|
||
}
|
||
if (_target == ModuleName.UnLoad && SensorUnloadWaferPresence.Value)
|
||
{
|
||
EV.PostWarningLog(Module, $"Can not place, UnloadWaferPresence sensor has wafer");
|
||
return Result.FAIL;
|
||
}
|
||
if (ModuleHelper.IsBuffer(_target) && _targetSlot == 2&& SensorBufferHighWaferPresence.Value)
|
||
{
|
||
EV.PostWarningLog(Module, $"Can not place,BufferHighWaferPresence sensor check has wafer");
|
||
return Result.FAIL;
|
||
}
|
||
if (ModuleHelper.IsBuffer(_target) && _targetSlot == 1&& SensorBufferMiddleWaferPresence.Value)
|
||
{
|
||
EV.PostWarningLog(Module, $"Can not place,BufferMiddleWaferPresence sensor check has wafer");
|
||
return Result.FAIL;
|
||
}
|
||
if (ModuleHelper.IsBuffer(_target) && _targetSlot == 0&& SensorBufferLowWaferPresence.Value)
|
||
{
|
||
EV.PostWarningLog(Module, $"Can not place,BufferLowWaferPresence sensor check has wafer");
|
||
return Result.FAIL;
|
||
}
|
||
}
|
||
_trayClamp.Init(true);
|
||
_trayUnClamp.Init(false);
|
||
Notify($"Start, Place to {_target} slot {_targetSlot + 1}, by {(_blade == RobotArmEnum.Blade1 ? "Blade1" : "Blade2")}");
|
||
|
||
return Result.RUN;
|
||
}
|
||
|
||
public override void Abort()
|
||
{
|
||
_tm.CloseAllVentPumpValue();
|
||
if (!IsPicking)
|
||
{
|
||
RobotDevice.Stop();
|
||
}
|
||
Notify("Abort");
|
||
}
|
||
|
||
public override Result Monitor()
|
||
{
|
||
try
|
||
{
|
||
WaitSlitValveOpenInterlock((int)RoutineStep.WaitOpenSlitValveInterlock, TMDevice.GetSlitValve(_target), _placeTimeout);
|
||
RobotGotoNotWait((int)RoutineStep.RobotGotoNotWait, RobotDevice, _target, _targetSlot, _blade, _placeTimeout);
|
||
|
||
//如果是Buffer腔,则不需要打开闸板阀动作
|
||
if (_target != ModuleName.Buffer)
|
||
{
|
||
ExecuteRoutine((int)RoutineStep.OpenSlitValve, _openSlitValveRoutine);
|
||
}
|
||
|
||
//如果是PM腔,放盘前检查传感器DI_ReactorSuspectorCheck
|
||
//如果有,则不能放盘
|
||
if (ModuleHelper.IsPm(_target))
|
||
{
|
||
CheckReactorSuspector((int)RoutineStep.SuspectorCheck, _target);
|
||
}
|
||
|
||
CheckRobotReady((int)RoutineStep.CheckRobotReady, RobotDevice, _placeTimeout);
|
||
|
||
CheckBeforePlace((int)RoutineStep.CheckBeforePlace, _target, _targetSlot, _blade);
|
||
RobotRequestWaferPresent((int)RoutineStep.BeforePlaceRequestWaferPresent, RobotDevice, _blade, _placeTimeout);
|
||
CheckWaferInfoByRobotRQ((int)RoutineStep.BeforePlaceCheckWaferInfoByRobotSensor, RobotDevice, _blade, 10);
|
||
|
||
WaitPMReadySensor((int)RoutineStep.WaitPMSensor, _target, 5);
|
||
SetRobotExtendToDO((int)RoutineStep.SetRobortExtendToDo, _target, 2);
|
||
|
||
CheckRobotReady((int)RoutineStep.CheckRobotReady, RobotDevice, _placeTimeout);
|
||
Place((int)RoutineStep.Place, RobotDevice, _target, _targetSlot, _blade, _placeTimeout);
|
||
IsPicking = false;
|
||
TimeDelay((int)RoutineStep.TimeDelay1, 1);
|
||
RobotRequestWaferPresent((int)RoutineStep.RequestWaferPresent, RobotDevice, _blade, _placeTimeout);
|
||
CheckWaferInfoByRobotRQ((int)RoutineStep.CheckWaferInfoByRobotSensor, RobotDevice, _blade, 10);
|
||
|
||
if (_requestAWCData)
|
||
{
|
||
RobotRequestWaferAWCData((int)RoutineStep.RequestAWCData, RobotDevice, _placeTimeout);
|
||
}
|
||
|
||
ClearRobortExtendToDO((int)RoutineStep.ClearRobortExtendToDo);
|
||
TimeDelay((int)RoutineStep.TimeDelay2, 1);
|
||
|
||
|
||
if (_target == ModuleName.Load || _target == ModuleName.LoadLock)
|
||
{
|
||
//对中
|
||
ExecuteRoutine((int)RoutineStep.TrayClamp, _trayClamp); //夹爪关闭
|
||
TimeDelay((int)RoutineStep.TimeDelay3, 1);//延迟1s
|
||
ExecuteRoutine((int)RoutineStep.TrayUnClamp, _trayUnClamp); //夹爪打开
|
||
//ExecuteRoutine((int)RoutineStep.LoadRatation, loadRotationHomeRoutine);
|
||
}
|
||
|
||
////如果是PM腔,放完盘后检查传感器DI_ReactorSuspectorCheck
|
||
//if (ModuleHelper.IsPm(_target))
|
||
//{
|
||
// CheckReactorSuspector((int)RoutineStep.SuspectorCheck);
|
||
//}
|
||
|
||
//如果是Buffer腔,则不需要打开闸板阀动作
|
||
if (_target != ModuleName.Buffer)
|
||
{
|
||
ExecuteRoutine((int)RoutineStep.CloseSlitValve, _closeSlitValveRoutine);
|
||
}
|
||
}
|
||
catch (RoutineBreakException)
|
||
{
|
||
return Result.RUN;
|
||
}
|
||
catch (RoutineFaildException ex)
|
||
{
|
||
LOG.Error(ex.ToString());
|
||
RobotDevice.Stop();
|
||
return Result.FAIL;
|
||
}
|
||
|
||
Notify($"Finish, Place to {_target} slot {_targetSlot + 1}, by {_blade}");
|
||
|
||
return Result.DONE;
|
||
}
|
||
|
||
|
||
|
||
|
||
}
|
||
}
|