HCL 7941909471 Merge branch 'Atm_Cycle' into develop ... # Conflicts: # ThirdParty/MECF.Framework/MECF.Framework.RT.EquipmentLibrary.dll # ThirdParty/MECF.Framework/MECF.Framework.UI.Client.dll		2024-04-01 16:15:59 +08:00
..
Base	1:控制V94和V96阀时，对应的控制MFC设置为0	2023-06-20 11:09:36 +08:00
LoadHomeRoutine.cs	1.Load Home增加Rotation ServoOn	2024-03-29 15:52:44 +08:00
LoadLockClawRoutine.cs	Mainframe工程更名为SicModules。	2023-04-13 15:35:13 +08:00
LoadLockGroupRoutine.cs	Mainframe工程更名为SicModules。	2023-04-13 15:35:13 +08:00
LoadLockLeakCheckRoutine.cs	TM,Load,Unload腔漏检Routine添加延时，参考PM腔漏检的延时调用时机	2023-07-18 15:51:57 +08:00
LoadLockLiftRoutine.cs	Mainframe工程更名为SicModules。	2023-04-13 15:35:13 +08:00
LoadLockPrepareTransferRoutine.cs	1.更新	2024-03-27 10:24:08 +08:00
LoadLockPumpRoutine.cs	1.Load Pump时不关闭TM Fast Pump阀	2023-08-10 16:51:27 +08:00
LoadLockPurgeRoutine.cs	1.Load和Unload Purge增加Vent超时时间	2023-08-10 14:32:17 +08:00
LoadLockServoToRoutine.cs	1.取消Load Servo压力Pump延时	2023-09-06 15:48:27 +08:00
LoadLockTrayAlignerRoutine.cs	Mainframe工程更名为SicModules。	2023-04-13 15:35:13 +08:00
LoadLockTrayClawRoutine.cs	Mainframe工程更名为SicModules。	2023-04-13 15:35:13 +08:00
LoadLockVentRoutine.cs	1:控制V94和V96阀时，对应的控制MFC设置为0	2023-06-20 11:09:36 +08:00
LoadRotationHomeOffsetRoutine.cs	Mainframe工程更名为SicModules。	2023-04-13 15:35:13 +08:00
LoadSeparateRoutine.cs	Mainframe工程更名为SicModules。	2023-04-13 15:35:13 +08:00