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SicMultiplate/SicRT/Config/Account/Account.xml

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<?xml version="1.0" encoding="GB2312"?>
<root>
<roles>
<roleItem id="0" name="Manager" autologout="1" logouttime="20">
Header,3;Overview,3;TM,3;EFEM,3;Device,3;ioPlatform,3;LeakCheck,3;Sequence,3;Recipe,3;EventLog,3;RealTimeCharting,3;WaferHistory,3;DataHistory,3;
Charting,3;Config,3;Account,3;Role,3;Runtime,3;Alarm,3;mainPM1,3;processPM1,3;ioPM1,3;motionPM1,3;heaterPM1,3;alarmPM1,3;MFCFlowPM1,3;mainPM2,3;
processPM2,3;ioPM2,3;motionPM2,3;heaterPM2,3;alarmPM2,3;MFCFlowPM2,3;
Step,3;Name,3;Time,3;Growth Rate,3;1. Ar/H2 Switch,3;2. SH Total Flow,3;3. Carray Gas Flow (M40),3;4. SH Total Flow Split Ratio,3;5. Flow Set Mode,3;6. Pressure Set,3;
7. Rotation Set,3;8. PSU Control Mode,3;9. PSU Set Mode,3;10. SCR Control Mode,3;11. SCR Set Mode,3;12. PSU Inner Temp Set,3;13. PSU Middle Temp Set,3;
14. PSU Outer Temp Set,3;15. SCR Temp Set,3;16. PSU Inner Ratio Set,3;17. PSU Middle Ratio Set,3;18. PSU Outer Ratio Set,3;19. SCR Upper Ratio Set,3;
20. SCR Middle Ratio Set,3;21. SCR Lower Ratio Set,3;22. Si Source Total Flow,3;23. SiH4 Flow Mode,3;24. SiH4 Flow (M14),3;25. TCS Flow Mode,3;
26. TCS Bubb Low Flow (M11),3;27. TCS Bubb High Flow (M10),3;28. TCS Push Flow (M12),3;29. TCS Bubb Pressure (PC3),3;30. HCl Flow Mode,3;
31. HCl Flow (M13),3;32. Si Source Split Ratio,3;33. Si Source Push Pressure (PC6),3;34. Si Source Inner Flow (M23),3;35. Si Source Middle Flow (M22),3;
36. Si Source Outer Flow (M9),3;37. C Source Total Flow,3;38. C2H4 Flow Mode,3;39. C2H4 Flow (M16),3;42. C Source Split Ratio,3;
43. C Source Push Pressure (PC7),3;44. C Source Inner Flow (M26),3;45. C Source Middle Flow (M25),3;46. C Source Outer Flow (M15),3;47. Dope Total Flow,3;
48. N2 Flow Mode,3;49. N2 Actual Flow,3;50. N2 Low Flow (M4),3;51. Dilut Flow For N2 (M3),3;52. Diluted N2 Flow (M6),3;53. N2 Post Dilut Pressure (PC1),3;
54. N2 High Flow Mode,3;55. N2 High Flow (M5),3;56. TMA Flow Mode,3;57. TMA Bubb Flow (M7),3;58. TMA Push Flow (M8),3;59. TMA Bubb Pressure (PC2),3;
60. Dope Split Ratio,3;64. Dope Push Pressure (PC5),3;62. Dope Inner Flow (M20),3;63. Dope Middle Flow (M19),3;61. Dope Outer Flow (M2),3;
65. SH Push Total Flow,3;66. SH Inner Flow,3;67. SH Middle Flow,3;68. SH Outer Flow,3;69. Inner Push Flow (M29),3;70. Middle Push Flow (M31),3;
71. Outer Push Flow (M28),3;72. SH Purge Flow (M27),3;73. Optic Purge Flow (M33),3;74. GasRing Purge Flow (M32),3;75. Chamber Purge Flow (M35),3;
76. Rotation-Up Purge Flow (M36),3;77. Shutter Purge Flow (M37),3;78. Heater-WF Purge Flow (M38),3;79. Total Vent Flow,3;80. Vent Push Flow (M1),3;
81. Vent Pre-Exhaust Pressure (PC4),3;Operation.Overview.Operation,3;Operation.Overview.RunningMode,3;PM1.Main.ReactorStatus,3;
PM1.Main.ReactorService,3;PM1.Process.Steps,3;Platform.Mainframe.PM1,3;Platform.Mainframe.Buffer,3;Platform.Mainframe.LL,3;Platform.Mainframe.TM,3;
Platform.Mainframe.PreHeat,3;Step1,3;Step2,3;Step3,3;Step4,3;Step5,3;Step6,3;Step7,3;Step8,3;Step9,3;Step10,3;Step11,3;Step12,3;Step13,3;Step14,3;Step15,3;
Step16,3;Step17,3;Step18,3;Step19,3;Step20,3;Step21,3;Step22,3;Step23,3;Step24,3;Step25,3;Step26,3;Step27,3;Step28,3;Step29,3;Step30,3;Step31,3;Step32,3;
Step33,3;Step34,3;Step35,3;Step36,3;Step37,3;Step38,3;Step39,3;Step40,3;Step41,3;Step42,3;Step43,3;Step44,3;Step45,3;Step46,3;Step47,3;Step48,3;Step49,3;
Step50,3;
</roleItem>
<roleItem id="1" name="Engineer" autologout="1" logouttime="20">
Header,3;Overview,3;TM,3;EFEM,3;Device,3;ioPlatform,3;LeakCheck,3;Sequence,3;Recipe,3;EventLog,3;RealTimeCharting,3;WaferHistory,3;DataHistory,3;
Charting,3;Config,3;Account,3;Role,3;Runtime,3;Alarm,3;mainPM1,3;processPM1,3;ioPM1,3;motionPM1,3;heaterPM1,3;alarmPM1,3;MFCFlowPM1,3;mainPM2,3;
processPM2,3;ioPM2,3;motionPM2,3;heaterPM2,3;alarmPM2,3;MFCFlowPM2,3;
Step,3;Name,3;Time,3;Growth Rate,3;1. Ar/H2 Switch,3;2. SH Total Flow,3;3. Carray Gas Flow (M40),3;4. SH Total Flow Split Ratio,3;5. Flow Set Mode,3;6. Pressure Set,3;
7. Rotation Set,3;8. PSU Control Mode,3;9. PSU Set Mode,3;10. SCR Control Mode,3;11. SCR Set Mode,3;12. PSU Inner Temp Set,3;13. PSU Middle Temp Set,3;
14. PSU Outer Temp Set,3;15. SCR Temp Set,3;16. PSU Inner Ratio Set,3;17. PSU Middle Ratio Set,3;18. PSU Outer Ratio Set,3;19. SCR Upper Ratio Set,3;
20. SCR Middle Ratio Set,3;21. SCR Lower Ratio Set,3;22. Si Source Total Flow,3;23. SiH4 Flow Mode,3;24. SiH4 Flow (M14),3;25. TCS Flow Mode,3;
26. TCS Bubb Low Flow (M11),3;27. TCS Bubb High Flow (M10),3;28. TCS Push Flow (M12),3;29. TCS Bubb Pressure (PC3),3;30. HCl Flow Mode,3;
31. HCl Flow (M13),3;32. Si Source Split Ratio,3;33. Si Source Push Pressure (PC6),3;34. Si Source Inner Flow (M23),3;35. Si Source Middle Flow (M22),3;
36. Si Source Outer Flow (M9),3;37. C Source Total Flow,3;38. C2H4 Flow Mode,3;39. C2H4 Flow (M16),3;42. C Source Split Ratio,3;
43. C Source Push Pressure (PC7),3;44. C Source Inner Flow (M26),3;45. C Source Middle Flow (M25),3;46. C Source Outer Flow (M15),3;47. Dope Total Flow,3;
48. N2 Flow Mode,3;49. N2 Actual Flow,3;50. N2 Low Flow (M4),3;51. Dilut Flow For N2 (M3),3;52. Diluted N2 Flow (M6),3;53. N2 Post Dilut Pressure (PC1),3;
54. N2 High Flow Mode,3;55. N2 High Flow (M5),3;56. TMA Flow Mode,3;57. TMA Bubb Flow (M7),3;58. TMA Push Flow (M8),3;59. TMA Bubb Pressure (PC2),3;
60. Dope Split Ratio,3;64. Dope Push Pressure (PC5),3;62. Dope Inner Flow (M20),3;63. Dope Middle Flow (M19),3;61. Dope Outer Flow (M2),3;
65. SH Push Total Flow,3;66. SH Inner Flow,3;67. SH Middle Flow,3;68. SH Outer Flow,3;69. Inner Push Flow (M29),3;70. Middle Push Flow (M31),3;
71. Outer Push Flow (M28),3;72. SH Purge Flow (M27),3;73. Optic Purge Flow (M33),3;74. GasRing Purge Flow (M32),3;75. Chamber Purge Flow (M35),3;
76. Rotation-Up Purge Flow (M36),3;77. Shutter Purge Flow (M37),3;78. Heater-WF Purge Flow (M38),3;79. Total Vent Flow,3;80. Vent Push Flow (M1),3;
81. Vent Pre-Exhaust Pressure (PC4),3;Operation.Overview.Operation,3;Operation.Overview.RunningMode,3;PM1.Main.ReactorStatus,3;
PM1.Main.ReactorService,3;PM1.Process.Steps,3;Platform.Mainframe.PM1,3;Platform.Mainframe.Buffer,3;Platform.Mainframe.LL,3;Platform.Mainframe.TM,3;
Platform.Mainframe.PreHeat,3;Step1,3;Step2,3;Step3,3;Step4,3;Step5,3;Step6,3;Step7,3;Step8,3;Step9,3;Step10,3;Step11,3;Step12,3;Step13,3;Step14,3;Step15,3;
Step16,3;Step17,3;Step18,3;Step19,3;Step20,3;Step21,3;Step22,3;Step23,3;Step24,3;Step25,3;Step26,3;Step27,3;Step28,3;Step29,3;Step30,3;Step31,3;Step32,3;
Step33,3;Step34,3;Step35,3;Step36,3;Step37,3;Step38,3;Step39,3;Step40,3;Step41,3;Step42,3;Step43,3;Step44,3;Step45,3;Step46,3;Step47,3;Step48,3;Step49,3;
Step50,3;
</roleItem>
<roleItem id="2" name="Technician" autologout="1" logouttime="20">
Header,3;Overview,3;TM,3;EFEM,3;Device,3;ioPlatform,3;LeakCheck,3;Sequence,3;Recipe,3;EventLog,3;RealTimeCharting,3;WaferHistory,3;DataHistory,3;
Charting,3;Config,3;Account,3;Role,3;Runtime,3;Alarm,3;mainPM1,3;processPM1,3;ioPM1,3;motionPM1,3;heaterPM1,3;alarmPM1,3;MFCFlowPM1,3;mainPM2,3;
processPM2,3;ioPM2,3;motionPM2,3;heaterPM2,3;alarmPM2,3;MFCFlowPM2,3;
Step,3;Name,3;Time,3;Growth Rate,3;1. Ar/H2 Switch,3;2. SH Total Flow,3;3. Carray Gas Flow (M40),3;4. SH Total Flow Split Ratio,3;5. Flow Set Mode,3;6. Pressure Set,3;
7. Rotation Set,3;8. PSU Control Mode,3;9. PSU Set Mode,3;10. SCR Control Mode,3;11. SCR Set Mode,3;12. PSU Inner Temp Set,3;13. PSU Middle Temp Set,3;
14. PSU Outer Temp Set,3;15. SCR Temp Set,3;16. PSU Inner Ratio Set,3;17. PSU Middle Ratio Set,3;18. PSU Outer Ratio Set,3;19. SCR Upper Ratio Set,3;
20. SCR Middle Ratio Set,3;21. SCR Lower Ratio Set,3;22. Si Source Total Flow,3;23. SiH4 Flow Mode,3;24. SiH4 Flow (M14),3;25. TCS Flow Mode,3;
26. TCS Bubb Low Flow (M11),3;27. TCS Bubb High Flow (M10),3;28. TCS Push Flow (M12),3;29. TCS Bubb Pressure (PC3),3;30. HCl Flow Mode,3;
31. HCl Flow (M13),3;32. Si Source Split Ratio,3;33. Si Source Push Pressure (PC6),3;34. Si Source Inner Flow (M23),3;35. Si Source Middle Flow (M22),3;
36. Si Source Outer Flow (M9),3;37. C Source Total Flow,3;38. C2H4 Flow Mode,3;39. C2H4 Flow (M16),3;42. C Source Split Ratio,3;
43. C Source Push Pressure (PC7),3;44. C Source Inner Flow (M26),3;45. C Source Middle Flow (M25),3;46. C Source Outer Flow (M15),3;47. Dope Total Flow,3;
48. N2 Flow Mode,3;49. N2 Actual Flow,3;50. N2 Low Flow (M4),3;51. Dilut Flow For N2 (M3),3;52. Diluted N2 Flow (M6),3;53. N2 Post Dilut Pressure (PC1),3;
54. N2 High Flow Mode,3;55. N2 High Flow (M5),3;56. TMA Flow Mode,3;57. TMA Bubb Flow (M7),3;58. TMA Push Flow (M8),3;59. TMA Bubb Pressure (PC2),3;
60. Dope Split Ratio,3;64. Dope Push Pressure (PC5),3;62. Dope Inner Flow (M20),3;63. Dope Middle Flow (M19),3;61. Dope Outer Flow (M2),3;
65. SH Push Total Flow,3;66. SH Inner Flow,3;67. SH Middle Flow,3;68. SH Outer Flow,3;69. Inner Push Flow (M29),3;70. Middle Push Flow (M31),3;
71. Outer Push Flow (M28),3;72. SH Purge Flow (M27),3;73. Optic Purge Flow (M33),3;74. GasRing Purge Flow (M32),3;75. Chamber Purge Flow (M35),3;
76. Rotation-Up Purge Flow (M36),3;77. Shutter Purge Flow (M37),3;78. Heater-WF Purge Flow (M38),3;79. Total Vent Flow,3;80. Vent Push Flow (M1),3;
81. Vent Pre-Exhaust Pressure (PC4),3;Operation.Overview.Operation,3;Operation.Overview.RunningMode,3;PM1.Main.ReactorStatus,3;
PM1.Main.ReactorService,3;PM1.Process.Steps,3;Platform.Mainframe.PM1,3;Platform.Mainframe.Buffer,3;Platform.Mainframe.LL,3;Platform.Mainframe.TM,3;
Platform.Mainframe.PreHeat,3;Step1,3;Step2,3;Step3,3;Step4,3;Step5,3;Step6,3;Step7,3;Step8,3;Step9,3;Step10,3;Step11,3;Step12,3;Step13,3;Step14,3;Step15,3;
Step16,3;Step17,3;Step18,3;Step19,3;Step20,3;Step21,3;Step22,3;Step23,3;Step24,3;Step25,3;Step26,3;Step27,3;Step28,3;Step29,3;Step30,3;Step31,3;Step32,3;
Step33,3;Step34,3;Step35,3;Step36,3;Step37,3;Step38,3;Step39,3;Step40,3;Step41,3;Step42,3;Step43,3;Step44,3;Step45,3;Step46,3;Step47,3;Step48,3;Step49,3;
Step50,3;
</roleItem>
<roleItem id="3" name="Operator" autologout="1" logouttime="20">
Header,3;Overview,3;TM,3;EFEM,3;Device,3;ioPlatform,3;LeakCheck,3;Sequence,3;Recipe,3;EventLog,3;RealTimeCharting,3;WaferHistory,3;DataHistory,3;
Charting,3;Config,3;Account,3;Role,3;Runtime,3;Alarm,3;mainPM1,3;processPM1,3;ioPM1,3;motionPM1,3;heaterPM1,3;alarmPM1,3;MFCFlowPM1,3;mainPM2,3;
processPM2,3;ioPM2,3;motionPM2,3;heaterPM2,3;alarmPM2,3;MFCFlowPM2,3;
Step,3;Name,3;Time,3;Growth Rate,3;1. Ar/H2 Switch,3;2. SH Total Flow,3;3. Carray Gas Flow (M40),3;4. SH Total Flow Split Ratio,3;5. Flow Set Mode,3;6. Pressure Set,3;
7. Rotation Set,3;8. PSU Control Mode,3;9. PSU Set Mode,3;10. SCR Control Mode,3;11. SCR Set Mode,3;12. PSU Inner Temp Set,3;13. PSU Middle Temp Set,3;
14. PSU Outer Temp Set,3;15. SCR Temp Set,3;16. PSU Inner Ratio Set,3;17. PSU Middle Ratio Set,3;18. PSU Outer Ratio Set,3;19. SCR Upper Ratio Set,3;
20. SCR Middle Ratio Set,3;21. SCR Lower Ratio Set,3;22. Si Source Total Flow,3;23. SiH4 Flow Mode,3;24. SiH4 Flow (M14),3;25. TCS Flow Mode,3;
26. TCS Bubb Low Flow (M11),3;27. TCS Bubb High Flow (M10),3;28. TCS Push Flow (M12),3;29. TCS Bubb Pressure (PC3),3;30. HCl Flow Mode,3;
31. HCl Flow (M13),3;32. Si Source Split Ratio,3;33. Si Source Push Pressure (PC6),3;34. Si Source Inner Flow (M23),3;35. Si Source Middle Flow (M22),3;
36. Si Source Outer Flow (M9),3;37. C Source Total Flow,3;38. C2H4 Flow Mode,3;39. C2H4 Flow (M16),3;42. C Source Split Ratio,3;
43. C Source Push Pressure (PC7),3;44. C Source Inner Flow (M26),3;45. C Source Middle Flow (M25),3;46. C Source Outer Flow (M15),3;47. Dope Total Flow,3;
48. N2 Flow Mode,3;49. N2 Actual Flow,3;50. N2 Low Flow (M4),3;51. Dilut Flow For N2 (M3),3;52. Diluted N2 Flow (M6),3;53. N2 Post Dilut Pressure (PC1),3;
54. N2 High Flow Mode,3;55. N2 High Flow (M5),3;56. TMA Flow Mode,3;57. TMA Bubb Flow (M7),3;58. TMA Push Flow (M8),3;59. TMA Bubb Pressure (PC2),3;
60. Dope Split Ratio,3;64. Dope Push Pressure (PC5),3;62. Dope Inner Flow (M20),3;63. Dope Middle Flow (M19),3;61. Dope Outer Flow (M2),3;
65. SH Push Total Flow,3;66. SH Inner Flow,3;67. SH Middle Flow,3;68. SH Outer Flow,3;69. Inner Push Flow (M29),3;70. Middle Push Flow (M31),3;
71. Outer Push Flow (M28),3;72. SH Purge Flow (M27),3;73. Optic Purge Flow (M33),3;74. GasRing Purge Flow (M32),3;75. Chamber Purge Flow (M35),3;
76. Rotation-Up Purge Flow (M36),3;77. Shutter Purge Flow (M37),3;78. Heater-WF Purge Flow (M38),3;79. Total Vent Flow,3;80. Vent Push Flow (M1),3;
81. Vent Pre-Exhaust Pressure (PC4),3;Operation.Overview.Operation,3;Operation.Overview.RunningMode,3;PM1.Main.ReactorStatus,3;
PM1.Main.ReactorService,3;PM1.Process.Steps,3;Platform.Mainframe.PM1,3;Platform.Mainframe.Buffer,3;Platform.Mainframe.LL,3;Platform.Mainframe.TM,3;
Platform.Mainframe.PreHeat,3;Step1,3;Step2,3;Step3,3;Step4,3;Step5,3;Step6,3;Step7,3;Step8,3;Step9,3;Step10,3;Step11,3;Step12,3;Step13,3;Step14,3;Step15,3;
Step16,3;Step17,3;Step18,3;Step19,3;Step20,3;Step21,3;Step22,3;Step23,3;Step24,3;Step25,3;Step26,3;Step27,3;Step28,3;Step29,3;Step30,3;Step31,3;Step32,3;
Step33,3;Step34,3;Step35,3;Step36,3;Step37,3;Step38,3;Step39,3;Step40,3;Step41,3;Step42,3;Step43,3;Step44,3;Step45,3;Step46,3;Step47,3;Step48,3;Step49,3;
Step50,3;
</roleItem>
</roles>
<users>
<userItem id="1" loginname="admin" password="YWRtaW4=" firstname="MAE" lastname="dd" email="" description="">
<rolegroup>
<role id="0"></role>
<role id="1"></role>
<role id="2"></role>
<role id="3"></role>
</rolegroup>
</userItem>
</users>
</root>
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