235 lines
30 KiB
XML
235 lines
30 KiB
XML
<?xml version="1.0" encoding="utf-8"?>
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<DeviceModelDefine type="Sic" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" >
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<IoInterLocks assembly="SicModules" classType="SicModules.Devices.IoInterLock">
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<IoInterLock id="IoInterLock" module="TM" display="IoInterLock" schematicId="IoInterLock" unit=""
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doTmAtProcessPress="DO_TMAtProcessPress" doLLAtProcessPress="DO_LoadAtProcessPress" diTmAtATM="DI_TMPressure1ATM" diLoadLockAtATm="DI_LoadPressureATM"
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aiTmPressure="AI_TMPressure1" aiLLPressure="AI_LoadPressure" diTmUnderVac="DI_TMPressure1VAC"
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doTmCyclePurgeRoutineRunning="DO_TMCyclePurgeRoutineRunning" doTmLeakCheckRoutineRunning="DO_TMLeakCheckRoutineRunning" doTmPumpDownRoutineRunning="DO_TMPumpDownRoutineRunning"
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doTmServoPressRoutineRunning="DO_TMServoPressRoutineRunning" doTmVentUpRoutineRunning="DO_TMVentUpRoutineRunning" doLLCyclePurgeRoutineRunning="DO_LoadCyclePurgeRoutineRunning"
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doLLLeakCheckRoutineRunning="DO_LoadLeakCheckRoutineRunning" doLLPumpDownRoutineRunning="DO_LoadPumpDownRoutineRunning" doLLVentUpRoutineRunning="DO_LoadVentUpRoutineRunning"
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diVacRobotExtenLLEnableFB="DI_VacRobotExtenLoadEnableFB" diVacRobotExtendBufferEnableFB="DI_VacRobotExtendBufferEnableFB" diVacRobotExtendPMAEnableFB="DI_VacRobotExtendPMAEnableFB"
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diATMRobotExtendUnloadEnableFB="DI_ATMRobotExtendUnloadEnableFB" diATMRobotExtendLoadLSideEnableFB="DI_ATMRobotExtendLoadLSideEnableFB" diATMRobotExtendLoadRSideEnableFB="DI_ATMRobotExtendLoadRSideEnableFB"
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diVacRobotExtendUnloadEnableFB="DI_VacRobotExtendUnloadEnableFB" diVacRobotExtendPMBEnableFB="DI_VacRobotExtendPMBEnableFB"
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doVacRobotExtenLLEnable="DO_VacRobotExtenLoadEnable" doVacRobotExtendBufferEnable="DO_VacRobotExtendBufferEnable" doVacRobotExtendPMAEnable="DO_VacRobotExtendPMAEnable"
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doVacRobotExtendUnloadEnable="DO_VacRobotExtendUnloadEnable" doVacRobotExtendPMBEnable="DO_VacRobotExtendPMBEnable" doATMRobotExtendUnloadEnable="DO_ATMRobotExtendUnloadEnable"
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doATMRobotExtendLoaLSideEnable="DO_ATMRobotExtendLoaLSideEnable" doATMRobotExtendLoaRSideEnable="DO_ATMRobotExtendLoaRSideEnable"
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doRectorAATMTransferReady="DO_ReactorAATMTransferReady" doRectorAProcessTransferReady="DO_ReactorAProcessTransferReady" doPm1LidClosed="DO_PM1LidClosed"
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doRectorBATMTransferReady="DO_ReactorBATMTransferReady" doRectorBProcessTransferReady="DO_ReactorBProcessTransferReady" doPm2LidClosed="DO_PM2LidClosed"
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doUnLoadPurgeRoutineRunning="DO_UnLoadCyclePurgeRoutineRunning" doUnLoadLeakCheckRoutineRunning="DO_UnLoadLeakCheckRoutineRunning"
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doUnLoadPumpDownRoutineRunning="DO_UnLoadPumpDownRoutineRunning" doUnLoadVentUpRoutineRunning="DO_UnLoadVentUpRoutineRunning"
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/>
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</IoInterLocks>
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<IoMfcs classType="Aitex.Core.RT.Device.Devices.IoMFC" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoMfc3 id="Mfc60" module="TM" display="Mfc60" schematicId="Mfc60" unit="sccm"
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aiFlow="AI_M60FlowRead" aoFlow="AO_M60FlowSetpoint"
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scBasePath="TM.MFC"
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Valve="TMVent"
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DisableFbSpErrMonWhenValveClosed="true"
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aioType="float" />
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</IoMfcs>
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<TcAdses classType="Aitex.Core.RT.Device.Devices.SicAds" assembly="MECF.Framework.RT.EquipmentLibrary">
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<TcAds id="MainPLC" module="PM1" display="" schematicId="" unit="" option="true" />
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<TcAds id="MainPLC" module="PM2" display="" schematicId="" unit="" option="true" />
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</TcAdses>
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<WcfPlcs assembly="MECF.Framework.Common" classType="MECF.Framework.Common.PLC.WcfPlc" >
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<WcfPlc id="MainPLC" module="PM1" display="" schematicId="" unit="" option="true" />
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<WcfPlc id="MainPLC" module="PM2" display="" schematicId="" unit="" option="true" />
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</WcfPlcs>
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<TcAdses assembly="SicModules" classType="SicModules.Devices.SicAds">
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<TcAds id="MainPLC" module="TM" display="" schematicId="" unit="" option="true" />
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</TcAdses>
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<WcfPlcs assembly="MECF.Framework.Common" classType="MECF.Framework.Common.PLC.WcfPlc" >
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<WcfPlc id="MainPLC" module="TM" display="" schematicId="" unit="" option="true" />
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</WcfPlcs>
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<IoSignalTowers classType="MECF.Framework.RT.EquipmentLibrary.Devices.IoSignalTower" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoSignalTower id="SignalTower" module="TM" display="SignalTower" schematicId="TMSignalTower"
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eventFile="STEvents.xml"
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doGreen="DO_TowerGreen"
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doYellow="DO_TowerYellow"
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doRed="DO_TowerRed"
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doBuzzer="DO_Buzzer" />
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</IoSignalTowers>
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<IoSensors classType="Aitex.Core.RT.Device.Devices.IoSensor" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoSensor id="LLWaferPlaced" module="TM" display="" schematicId="" unit="" di="DI_LoadWaferPlaced" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="ForelineBasePressureReady" module="TM" display="" schematicId="" unit="" di="DI_ForelineBasePressureReady" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="LoadTrayHomeSensor" module="TM" display="" schematicId="" unit="" di="DI_LoadHomeTraySensor" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="CassALWaferConvexSensor" module="TM" display="" schematicId="" unit="" di="DI_WaferCassetLeftConvexSensor" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="CassARWaferConvexSensor" module="TM" display="" schematicId="" unit="" di="DI_WaferCassetRightConvexSensor" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="CassALInch6Sensor" module="TM" display="" schematicId="" unit="" di="DI_WaferCassetLeftInch6" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="CassARInch6Sensor" module="TM" display="" schematicId="" unit="" di="DI_WaferCassetRightInch6" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="CassBLInch6Sensor" module="TM" display="" schematicId="" unit="" di="DI_TrayCassetInch6" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="CassALInch8Sensor" module="TM" display="" schematicId="" unit="" di="DI_WaferCassetLeftInch8" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="CassARInch8Sensor" module="TM" display="" schematicId="" unit="" di="DI_WaferCassetRightInch8" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="CassBLInch8Sensor" module="TM" display="" schematicId="" unit="" di="DI_TrayCassetInch8" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="CassBLWaferConvexSensor" module="TM" display="" schematicId="" unit="" di="DI_TrayCassetConvexSensor" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="UnLoadTrayPresence" module="TM" display="" schematicId="" unit="" di="DI_UnloadStationTrayPresence" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="UnLoadWaferPresence" module="TM" display="" schematicId="" unit="" di="DI_UnLoadWaferPresence" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="LoadDoorClosed" module="TM" display="" schematicId="" unit="" di="DI_LoadDoorClosed" textOutTrigValue="true" infoText="Information1 LoadDoor.Closed [TDI-0]" warningText="" alarmText="" />
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<IoSensor id="LoadDoorOpened" module="TM" display="" schematicId="" unit="" di="DI_LoadDoorOpened" textOutTrigValue="true" infoText="Information2 LoadDoor.Opened [TDI-1]" warningText="" alarmText="" />
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<IoSensor id="UnloadStationDoorClosed" module="TM" display="" schematicId="" unit="" di="DI_UnloadStationDoorClosed" textOutTrigValue="true" infoText="Information3 UnloadStationDoor.Closed [TDI-2]" warningText="" alarmText="" />
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<IoSensor id="UnloadStationDoorOpened" module="TM" display="" schematicId="" unit="" di="DI_UnloadStationDoorOpened" textOutTrigValue="true" infoText="Information4 UnloadStationDoor.Opened [TDI-3]" warningText="" alarmText="" />
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<IoSensor id="ReactorADoorClosed" module="TM" display="" schematicId="" unit="" di="DI_ReactorADoorClosed" textOutTrigValue="true" infoText="Information5 ReactorA.Door.Closed [TDI-4]" warningText="" alarmText="" />
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<IoSensor id="ReactorADoorOpened" module="TM" display="" schematicId="" unit="" di="DI_ReactorADoorOpened" textOutTrigValue="true" infoText="Information6 ReactorA.Door.Opened [TDI-5]" warningText="" alarmText="" />
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<IoSensor id="ReactorBDoorClosed" module="TM" display="" schematicId="" unit="" di="DI_ReactorBDoorClosed" textOutTrigValue="true" infoText="Information7 ReactorB.Door.Closed [TDI-6]" warningText="" alarmText="" />
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<IoSensor id="ReactorBDoorOpened" module="TM" display="" schematicId="" unit="" di="DI_ReactorBDoorOpened" textOutTrigValue="true" infoText="Information8 ReactorB.Door.Opened [TDI-7]" warningText="" alarmText="" />
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<IoSensor id="BufferStationDoorClosed" module="Buffer" display="" schematicId="" unit="" di="DI_BufferStationDoorClosed" textOutTrigValue="true" infoText="Information9 BufferStationDoor.Closed [TDI-10]" warningText="" alarmText="" />
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<IoSensor id="BufferStationDoorOpened" module="Buffer" display="" schematicId="" unit="" di="DI_BufferStationDoorOpened" textOutTrigValue="true" infoText="Information10 BufferStationDoor.Closed [TDI-11]" warningText="" alarmText="" />
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<IoSensor id="LoadLockGateClosed" module="TM" display="" schematicId="" unit="" di="DI_LoadLockGateClosed" textOutTrigValue="true" infoText="Information11 LoadLockGate.Closed [TDI-22]" warningText="" alarmText="" />
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<IoSensor id="RobotOnBackPos" module="TM" display="" schematicId="" unit="" di="DI_RobotOnBackPos" textOutTrigValue="true" infoText="Information12 RobotOnBackPos [TDI-31]" warningText="" alarmText="" />
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<IoSensor id="LLTrayPresence" module="TM" display="" schematicId="" unit="" di="DI_LoadTrayPresence" textOutTrigValue="true" infoText="Information13 Load position with Tray [TDI-32]" warningText="" alarmText="" />
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<IoSensor id="BufferWaferHigh" module="TM" display="" schematicId="" unit="" di="DI_BufferStationOptSensorHigh" textOutTrigValue="true" infoText="Information14 Buffer High Position with Tray [TDI-37]" warningText="" alarmText="" />
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<IoSensor id="BufferWaferMiddle" module="TM" display="" schematicId="" unit="" di="DI_BufferStationOptSensorMid" textOutTrigValue="true" infoText="Information15 Buffer Middle Position with Tray [TDI-38]" warningText="" alarmText="" />
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<IoSensor id="BufferWaferLow" module="TM" display="" schematicId="" unit="" di="DI_BufferStationOptSensorLow" textOutTrigValue="true" infoText="Information16 Buffer Low Position with Tray [TDI-39]" warningText="" alarmText="" />
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<IoSensor id="LoadLifterCYUp" module="Load" display="" schematicId="" unit="" di="DI_LoadLifterCYUp" textOutTrigValue="true" infoText="Information17 LoadLockLid.Locked [TDI-64]" warningText="" alarmText="" />
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<IoSensor id="LoadLifterCYDown" module="Load" display="" schematicId="" unit="" di="DI_LoadLifterCYDown" textOutTrigValue="true" infoText="Information18 LoadLockLid.Unlocked [TDI-65]" warningText="" alarmText="" />
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<IoSensor id="TMPressure1ATM" module="TM" display="" schematicId="" unit="" di="DI_TMPressure1ATM" textOutTrigValue="true" infoText="Information19 TM at ATM [TDI-88]" warningText="" alarmText="" />
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<IoSensor id="TMPressure1VAC" module="TM" display="" schematicId="" unit="" di="DI_TMPressure1VAC" textOutTrigValue="true" infoText="Information20 TM at VAC [TDI-89]" warningText="" alarmText="" />
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<IoSensor id="LoadPressureATM" module="Load" display="" schematicId="" unit="" di="DI_LoadPressureATM" textOutTrigValue="true" infoText="Information21 Load at ATM [TDI-90]" warningText="" alarmText="" />
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<IoSensor id="LoadPressureVAC" module="Load" display="" schematicId="" unit="" di="DI_LoadPressureVAC" textOutTrigValue="true" infoText="Information22 Load at VAC [TDI-91]" warningText="" alarmText="" />
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<IoSensor id="UnloadSubStationDoorClosed" module="UnLoad" display="" schematicId="" unit="" di="DI_UnloadSubStationDoorClosed" textOutTrigValue="true" infoText="Information23 UnloadSubStationDoor.Closed [TDI-8]" warningText="" alarmText="" />
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<IoSensor id="UnloadSubStationDoorOpened" module="UnLoad" display="" schematicId="" unit="" di="DI_UnloadSubStationDoorOpened" textOutTrigValue="true" infoText="Information24 UnloadSubStationDoor.Opened [TDI-9]" warningText="" alarmText="" />
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<IoSensor id="LoadLSideDoorClosed" module="TM" display="" schematicId="" unit="" di="DI_LoadLSideDoorClosed" textOutTrigValue="true" infoText="Information25 LoaderLsideDoor.Closed [TDI-24]" warningText="" alarmText="" />
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<IoSensor id="LoadLSideDoorOpened" module="TM" display="" schematicId="" unit="" di="DI_LoadLSideDoorOpened" textOutTrigValue="true" infoText="Information26 LoaderLsideDoor.Opened [TDI-25]" warningText="" alarmText="" />
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<IoSensor id="LoadRSideDoorClosed" module="TM" display="" schematicId="" unit="" di="DI_LoadRSideDoorClosed" textOutTrigValue="true" infoText="Information27 LoaderRsideDoor.Closed [TDI-26]" warningText="" alarmText="" />
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<IoSensor id="LoadRSideDoorOpened" module="TM" display="" schematicId="" unit="" di="DI_LoadRSideDoorOpened" textOutTrigValue="true" infoText="Information28 LoaderRsideDoor.Opened [TDI-27]" warningText="" alarmText="" />
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<IoSensor id="LoadLifterCYUp" module="TM" display="" schematicId="" unit="" di="DI_LoadLifterCYUp" textOutTrigValue="true" infoText="Information29 LoaderLifterCY.Up [TDI-64]" warningText="" alarmText="" />
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<IoSensor id="LoadLifterCYDown" module="TM" display="" schematicId="" unit="" di="DI_LoadLifterCYDown" textOutTrigValue="true" infoText="Information30 LoaderLifterCY.Down [TDI-65]" warningText="" alarmText="" />
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<IoSensor id="LoadWaferCYClamped" module="TM" display="" schematicId="" unit="" di="DI_LoadWaferCYClamped" textOutTrigValue="true" infoText="Information31 LoaderWaferCY.Clamped [TDI-66]" warningText="" alarmText="" />
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<IoSensor id="LoadWafeCYOpened" module="TM" display="" schematicId="" unit="" di="DI_LoadWafeCYOpened" textOutTrigValue="true" infoText="Information32 LoaderWafeCY.Opened [TDI-67]" warningText="" alarmText="" />
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<IoSensor id="LoadTrayCYClamped" module="TM" display="" schematicId="" unit="" di="DI_LoadTrayCYClamped" textOutTrigValue="true" infoText="Information33 LoaderTrayCY.Clamped [TDI-68]" warningText="" alarmText="" />
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<IoSensor id="LoadTrayCYOpend" module="TM" display="" schematicId="" unit="" di="DI_LoadTrayCYOpend" textOutTrigValue="true" infoText="Information34 LoaderTrayCY.Opend [TDI-69]" warningText="" alarmText="" />
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<IoSensor id="UnloadStationWaferCYClamped" module="Unload" display="" schematicId="" unit="" di="DI_UnloadStationWaferCYClamped" textOutTrigValue="true" infoText="Information35 UnloadStationWaferCY.Clamped [TDI-72]" warningText="" alarmText="" />
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<IoSensor id="UnloadStationWaferCYOpened" module="Unload" display="" schematicId="" unit="" di="DI_UnloadStationWaferCYOpened" textOutTrigValue="true" infoText="Information36 UnloadStationWaferCY.Opened [TDI-73]" warningText="" alarmText="" />
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<IoSensor id="UnloadStationLifterCYUp" module="Unload" display="" schematicId="" unit="" di="DI_UnloadStationLifterCYUp" textOutTrigValue="true" infoText="Information37 UnloadStationLifterCY.Up [TDI-74]" warningText="" alarmText="" />
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<IoSensor id="UnloadStationLifterCYDown" module="Unload" display="" schematicId="" unit="" di="DI_UnloadStationLifterCYDown" textOutTrigValue="true" infoText="Information38 UnloadStationLifterCY.Down [TDI-75]" warningText="" alarmText="" />
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<IoSensor id="UnloadPressureATM" module="UnLoad" display="" schematicId="" unit="" di="DI_UnloadPressureATM" textOutTrigValue="true" infoText="Information39 UnloadPressure.ATM[TDI-94]" warningText="" alarmText="" />
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<IoSensor id="UnloadPressureVAC" module="UnLoad" display="" schematicId="" unit="" di="DI_UnloadPressureVAC" textOutTrigValue="true" infoText="Information40 UnloadPressure.VAC[TDI-95]" warningText="" alarmText="" />
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<IoSensor id="TMLidClosed" module="TM" display="" schematicId="" unit="" di="DI_TMLidClosed" textOutTrigValue="false" infoText="" warningText="" alarmText="Alarm200 TM Lid Opened [TDI-12]" />
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<IoSensor id="LLLidClosed" module="LoadLock" display="" schematicId="" unit="" di="DI_LoadLidClosed" textOutTrigValue="false" infoText="" warningText="" alarmText="Alarm201 LoadLid Opened [TDI-13]" />
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<IoSensor id="BufferLidClosed" module="Buffer" display="" schematicId="" unit="" di="DI_BufferStationLidClosed" textOutTrigValue="false" infoText="" warningText="" alarmText="Alarm202 BufferStation Lid Opened [TDI-15]" />
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<IoSensor id="TMDryPump1Alarm" module="TM" display="" schematicId="" unit="" di="DI_TMDryPump1Alarm" textOutTrigValue="false" infoText="" warningText="" alarmText="Alarm203 TM DryPump1 Alarm [TDI-43]" />
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<IoSensor id="TMDryPump1Warning" module="TM" display="" schematicId="" unit="" di="DI_TMDryPump1Warning" textOutTrigValue="false" infoText="" warningText="" alarmText="Alarm204 TM DryPump1 Warning [TDI-44]" />
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<IoSensor id="TMDryPump1Running" module="TM" display="" schematicId="" unit="" di="DI_TMDryPump1Running" textOutTrigValue="false" infoText="" warningText="" alarmText="Alarm205 TM DryPump1 Not Runing [TDI-49]" />
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<IoSensor id="UnloadLidClosed" module="UnLoad" display="" schematicId="" unit="" di="DI_UnloadStationLidClosed" textOutTrigValue="false" infoText="" warningText="" alarmText="Alarm206 UnloadStationLid Opened [TDI-14]" />
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<IoSensor id="TMDryPump2Alarm" module="TM" display="" schematicId="" unit="" di="DI_TMDryPump2Alarm" textOutTrigValue="false" infoText="" warningText="" alarmText="Alarm207 TM DryPump2 Alarm [TDI-78]" />
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<IoSensor id="TMDryPump2Warning" module="TM" display="" schematicId="" unit="" di="DI_TMDryPump2Warning" textOutTrigValue="false" infoText="" warningText="" alarmText="Alarm208 TM DryPump2 Warning [TDI-79]" />
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<IoSensor id="TMDryPump2Running" module="TM" display="" schematicId="" unit="" di="DI_TMDryPump2Running" textOutTrigValue="false" infoText="" warningText="" alarmText="Alarm209 TM DryPump2 Not Runing [TDI-86]" />
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</IoSensors>
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<IoPumps classType="SicModules.Devices.IoPump" assembly="SicModules">
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<IoPump id="TMPump1" module="TM" display="Pump1" schematicId="TMPump1" unit="" diRunning="DI_TMDryPump1Running" diAlarm="DI_TMDryPump1Alarm" diWarning="DI_TMDryPump1Warning"/>
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<IoPump id="TMPump2" module="TM" display="Pump2" schematicId="TMPump2" unit="" diRunning="DI_TMDryPump2Running" diAlarm="DI_TMDryPump2Alarm" diWarning="DI_TMDryPump2Warning"/>
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</IoPumps>
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<IoValves classType="Aitex.Core.RT.Device.Devices.IoValve" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoValve id="LoadSlowPump" module="TM" display="V84" schematicId="LoadSlowPump" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_LoadSlowPumpFB" doOpen="DO_LoadSlowPump" />
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<IoValve id="LoadFastPump" module="TM" display="V83" schematicId="LoadFastPump" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_LoadFastPumpFB" doOpen="DO_LoadFastPump"/>
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<IoValve id="TMSlowPump" module="TM" display="V82" schematicId="TMSlowPump" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMSlowPumpFB" doOpen="DO_TMSlowPump"/>
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<IoValve id="TMFastPump" module="TM" display="V81" schematicId="TMFastPump" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMFastPumpFB" doOpen="DO_TMFastPump"/>
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<IoValve id="UnLoadSlowPump" module="TM" display="V123" schematicId="UnLoadSlowPump" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_UnloadSlowPumpFB" doOpen="DO_UnloadSlowPump" />
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<IoValve id="UnLoadFastPump" module="TM" display="V122" schematicId="UnLoadFastPump" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_UnloadFastPumpFB" doOpen="DO_UnloadFastPump"/>
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<IoValve id="BufferVent" module="TM" display="V80" schematicId="BufferVent" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_BufferVentFB" doOpen="DO_BufferVent"/>
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<IoValve id="LoadVent" module="TM" display="V79" schematicId="LoadVent" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_LoadVentFB" doOpen="DO_LoadVent"/>
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<IoValve id="TMVent" module="TM" display="V77" schematicId="TMVent" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMVentFB" doOpen="DO_TMVent" />
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<IoValve id="UnLoadVent" module="TM" display="V78" schematicId="UnLoadVent" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_UnloadVentFB" doOpen="DO_UnloadVent"/>
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<IoValve id="TMLoadBanlance" module="TM" display="V85" schematicId="TMLoadBanlance" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMLoadBanlanceFB" doOpen="DO_TMLoadBanlance"/>
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<IoValve id="TMUnLoadBanlance" module="TM" display="V124" schematicId="TMToUnloadBanlance" unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_TMToUnloadBanlance"/>
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</IoValves>
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<IoSlitValves classType="Aitex.Core.RT.Device.Unit.IoSlitValve" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoSlitValve id="LoadLockDoor" module="TM" display="LLDoor" Type="" unit="" schematicId="LLDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_LoadDoorOpened" diClose="DI_LoadDoorClosed" doOpen="DO_LoadDoorOpen" doClose="DO_LoadDoorClose" />
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<IoSlitValve id="PM1Door" module="TM" display="PM1Door" Type="" unit="" schematicId="PM1Door" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_ReactorADoorOpened" diClose="DI_ReactorADoorClosed" doOpen="DO_RectorADoorOpen" doClose="DO_RectorADoorClose" />
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<IoSlitValve id="PM2Door" module="TM" display="PM2Door" Type="" unit="" schematicId="PM2Door" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_ReactorBDoorOpened" diClose="DI_ReactorBDoorClosed" doOpen="DO_RectorBDoorOpen" doClose="DO_RectorBDoorClose" />
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<IoSlitValve id="UnLoadDoor" module="TM" display="UnLoadDoor" Type="" unit="" schematicId="UnLoadDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_UnloadStationDoorOpened" diClose="DI_UnloadStationDoorClosed" doOpen="DO_UnloadStationDoorOpen" doClose="DO_UnloadStationDoorClose" />
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<IoSlitValve id="BufferDoor" module="TM" display="BufferDoor" Type="" unit="" schematicId="BufferDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_BufferStationDoorOpened" diClose="DI_BufferStationDoorClosed" doOpen="DO_BufferStationDoorOpen" doClose="DO_BufferStationDoorClose" />
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<IoSlitValve id="UnLoadSubDoor" module="EFEM" display="UnLoadSubDoor" Type="" unit="" schematicId="UnLoadSubDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_UnloadSubStationDoorOpened" diClose="DI_UnloadSubStationDoorClosed" doOpen="DO_UnloadSubStationDoorOpen" doClose="DO_UnloadSubStationDoorClose" />
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<IoSlitValve id="LoadLockLSideDoor" module="EFEM" display="LLLSideDoor" Type="" unit="" schematicId="LLLSideDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_LoadLSideDoorOpened" diClose="DI_LoadLSideDoorClosed" doOpen="DO_LoadLSideDoorOpen" doClose="DO_LoadLSideDoorClose" />
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<IoSlitValve id="LoadLockRSideDoor" module="EFEM" display="LLRSideDoor" Type="" unit="" schematicId="LLRSideDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_LoadRSideDoorOpened" diClose="DI_LoadRSideDoorClosed" doOpen="DO_LoadRSideDoorOpen" doClose="DO_LoadRSideDoorClose" />
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</IoSlitValves>
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<IoPressureMeter3s classType="Aitex.Core.RT.Device.Unit.IoPressureMeter3" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoPressureMeter3 id="LLPressure" module="TM" display="LLPressure" schematicId="LLPressure" unit="mbar" aioType="float" aiValue="AI_LoadPressure" formatString="F1" MaxValue="1500"/>
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<IoPressureMeter3 id="UnLoadPressure" module="TM" display="UnLoadPressure" schematicId="UnLoadPressure" unit="mbar" aioType="float" aiValue="AI_UnloadPressure" formatString="F1" MaxValue="1500"/>
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<IoPressureMeter3 id="TMPressure" module="TM" display="TMPressure" schematicId="TMPressure" unit="mbar" aioType="float" aiValue="AI_TMPressure1" formatString="F1" MaxValue="1500"/>
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<IoPressureMeter3 id="PM1Pressure2" module="TM" display="PM1Pressure2" schematicId="PM1Pressure2" unit="mbar" aioType="float" aiValue="AI_PM1Pressure2" formatString="F1" MaxValue="1500"/>
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<IoPressureMeter3 id="PM2Pressure2" module="TM" display="PM2Pressure2" schematicId="PM2Pressure2" unit="mbar" aioType="float" aiValue="AI_PM2Pressure2" formatString="F1" MaxValue="1500"/>
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</IoPressureMeter3s>
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<IoTempMeters classType="Aitex.Core.RT.Device.Devices.IoTempMeter" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoTempMeter module="UnLoad" id="UnLoadTemp" display="" schematicId="" aioType="float" aiFeedback="AI_UnloadTemp" />
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<IoTempMeter module="Buffer" id="BufferTemp" display="" schematicId="" aioType="float" aiFeedback="AI_BufferTemp" />
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</IoTempMeters>
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<IoLift4s classType="Aitex.Core.RT.Device.Unit.IoLift4" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoLift4 id="LLLift" module="LoadLock" display="LLLift" schematicId="LLLift" unit="" aioType="" diUp="DI_LoadLifterCYUp" diDown="DI_LoadLifterCYDown" doUp="DO_LoadLifterCYUp" doDown="DO_LoadLifterCYDown" scTimeout="10"/>
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<IoLift4 id="UnLoadLift" module="UnLoad" display="UnLoadLift" schematicId="UnLoadLift" unit="" aioType="" diUp="DI_UnloadStationLifterCYUp" diDown="DI_UnloadStationLifterCYDown" doUp="DO_UnloadStationLifterCYUp" doDown="DO_UnloadStationLifterCYDown" scTimeout="10"/>
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</IoLift4s>
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<IoClaws classType="Aitex.Core.RT.Device.Unit.IoClaw" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoClaw id="LLWaferClaw" module="LoadLock" display="LLWaferClaw" schematicId="LLWaferClaw" unit="" aioType="" diUp="DI_LoadWaferCYClamped" diDown="DI_LoadWafeCYOpened" doUp="DO_LoadWaferCYClamp" doDown="DO_LoadWaferCYOpen" scTimeout="10"/>
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<IoClaw id="LLTrayClaw" module="LoadLock" display="LLTrayClaw" schematicId="LLTrayClaw" unit="" aioType="" diUp="DI_LoadTrayCYClamped" diDown="DI_LoadTrayCYOpend" doUp="DO_LoadTrayCYClamp" doDown="DO_LoadTrayCYOpen" scTimeout="10"/>
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<IoClaw id="UnLoadWaferClaw" module="UnLoad" display="UnLoadWaferClaw" schematicId="UnLoadWaferClaw" unit="" aioType="" diUp="DI_UnloadStationWaferCYClamped" diDown="DI_UnloadStationWaferCYOpened" doUp="DO_UnloadStationWaferCYClamp" doDown="DO_UnloadStationWaferCYOpen" scTimeout="10"/>
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</IoClaws>
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<TMRobots assembly="SicModules" classType="SicModules.TMs.SicTMRobot">
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<TMRobot id="TMRobot" module="TMRobot" display="" schematicId="" unit="" />
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</TMRobots>
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<Cassettes assembly="SicModules" classType="SicModules.Cassettes.SicCassette">
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<Cassette id="CassAL" module="CassAL" display="" schematicId="" unit="" />
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<Cassette id="CassAR" module="CassAR" display="" schematicId="" unit="" />
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<Cassette id="CassBL" module="CassBL" display="" schematicId="" unit="" />
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</Cassettes>
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<LoadRotations assembly="SicModules" classType="SicModules.Devices.IoLoadRotation">
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<LoadRotation id="Rotation" module="Load" display="LoadRotation" schematicId="LoadRotation" unit=""
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diServoOn="DI_LdRotationServoOn" diServoBusy="DI_LdRotationBusy" diServoError="DI_LdRotationServoError" diMoveDone="DI_LdRotationMoveDone"
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diRelativeHomeDone="DI_LdRotationRelativeHomeDone" diOneCircleDone="DI_LdRotationOneCircleDone" diCCD1PosDone="DI_LdRotationCCD1PosDone"
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diCCD2PosDone="DI_LdRotationCCD2PosDone" doServoOn="DO_LdRotationServoOn" doServoReset="DO_LdRotationReset"
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doJogCW="DO_LdRotationJogCW" doJogCCW="DO_LdRotationJogCCW" doStop="DO_LdRotationStop" doMoveRelativeHome="DO_LdRotationMoveRelativeHome"
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doMoveOneCircle="DO_LdRotationMoveOneCircle" doMoveCCD1Pos="DO_LdRotationMoveCCD1Pos" doMoveCCD2Pos="DO_LdRotationMoveCCD2Pos"
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aiCurPos="AI_LdRotationRelativeDegree" aiCCD1Degree="AI_LdRotationCCD1Degree" aiCCD2Degree="AI_LdRotationCCD2Degree"
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aoCCD1Degree="AO_LdRotationCCD1Degree" aoHomeSpeed="AO_LdRotationSpeed" aoPosSpeed="AO_LdRotationPosSpeed" aoCCD2Degree="AO_LdRotationCCD2Degree"
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aoJogDegree="AO_LdRotationJogDegree" aoHomeOffset="AO_LdRotationHomeOffset"/>
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</LoadRotations>
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<TMs assembly="SicModules" classType="SicModules.TMs.SicTM">
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<TM id="TM" module="System" display="" schematicId="" unit="" DiTMLidClosedAlarm="DI_TMLidClosed" DiLLLidClosedAlarm="DI_LLLidClosed" DiBufferLidClosedAlarm="DI_BufferLidClosed" aiLLTemp="AI_LoadTemp" aiBufferTemp="AI_BufferTemp"/>
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</TMs>
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<EFEMs assembly="SicModules" classType="SicModules.EFEMs.SicEFEM">
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<Buffer id="EFEM" module="EFEM" display="" schematicId="" unit="" />
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</EFEMs>
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<LLs assembly="SicModules" classType="SicModules.LLs.SicLoadLock">
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<TM id="LoadLock" module="LoadLock" display="" schematicId="" unit="" />
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</LLs>
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<Unloads assembly="SicModules" classType="SicModules.UnLoads.SicUnLoad">
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<Unload id="UnLoad" module="UnLoad" display="" schematicId="" unit="" />
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</Unloads>
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<Buffers assembly="SicModules" classType="SicModules.Buffers.SicBuffer">
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<Buffer id="Buffer" module="Buffer" display="" schematicId="" unit="" />
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</Buffers>
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<IoCassettes classType="Aitex.Core.RT.Device.Devices.IoCassette" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoCassette id="LeftWaferCassette" module="CassAL" display="" schematicId="" unit="" di6="DI_WaferCassetLeftInch6" di8="DI_WaferCassetLeftInch8"/>
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<IoCassette id="RightWaferCassette" module="CassAR" display="" schematicId="" unit="" di6="DI_WaferCassetRightInch6" di8="DI_WaferCassetRightInch8" />
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<IoCassette id="TrayCassette" module="CassBL" display="" schematicId="" unit="" di6="DI_TrayCassetInch6" di8="DI_TrayCassetInch8"/>
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</IoCassettes>
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</DeviceModelDefine> |