Cassettes
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删除久的Coating,修改加热配置项数据类型
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2023-06-01 16:56:20 +08:00 |
Config
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修改TM的interlock DO-47 48 17 8 10 12 14 16
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2023-09-28 14:38:55 +08:00 |
Devices
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1.修改Load 旋转电机CCD位置逻辑
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2023-08-10 16:35:52 +08:00 |
EFEMs
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更新库文件(Commit 90fa346),优化HiWin Aligner执行命令错误后的信息。
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2023-08-22 17:56:16 +08:00 |
LLs
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1.取消Load Servo压力Pump延时
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2023-09-06 15:48:27 +08:00 |
PMs
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Merge branch '_Bypass_InterLock_ReEdit' into develop
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2023-09-25 15:23:25 +08:00 |
Properties
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Add project files.
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2023-03-03 15:42:13 +08:00 |
TMs
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修改TM的interlock DO-47 48 17 8 10 12 14 16
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2023-09-28 14:38:55 +08:00 |
UnLoads
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修改TM的interlock DO-47 48 17 8 10 12 14 16
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2023-09-28 14:38:55 +08:00 |