164 lines
5.1 KiB
C#
164 lines
5.1 KiB
C#
using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using MECF.Framework.Common.Equipment;
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using System;
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using System.Diagnostics;
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namespace Mainframe.UnLoads
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{
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public class UnLoadPrepareTransferRoutine : UnLoadBaseRoutine
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{
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enum RoutineStep
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{
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CheckForelinePressure,
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RequestPump,
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RequestPumpDelay,
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SlowPump,
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CloseSlowValve,
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FastPump,
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PumpDelay,
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CloseFastValve,
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Delay,
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SlowVent,
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CloseSlowVentValve,
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TimeDelay1,
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TimeDelay2,
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TimeDelay3
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}
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private double _pumpSwitchPressure = 100;
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private int _slowPumpTimeout = 100;
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private int _fastPumpTimeout = 100;
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private int _slowVentTimeout = 100;
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private double _targetPressure;
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private double _llVacPressure = 0;
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private double _balancePressureDiff = 0;
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private double _pumpBasePressure = 0;
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private int _pumpDelayTime;
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public UnLoadPrepareTransferRoutine()
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{
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Module = ModuleName.UnLoad.ToString();
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Name = "PrepareTransfer";
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}
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public override Result Start(params object[] objs)
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{
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Reset();
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_targetPressure = SC.GetValue<double>("TM.PressureBalance.BalancePressure");
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_llVacPressure = SC.GetValue<double>("UnLoad.VacuumPressureBase");
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_pumpBasePressure = SC.GetValue<double>("UnLoad.Purge.PumpBasePressure");
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_balancePressureDiff = SC.GetValue<double>("TM.PressureBalance.BalanceMaxDiffPressure");
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_pumpSwitchPressure = SC.GetValue<double>("UnLoad.Pump.SlowFastPumpSwitchPressure");
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_slowPumpTimeout = SC.GetValue<int>("UnLoad.Pump.SlowPumpTimeout");
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_fastPumpTimeout = SC.GetValue<int>("UnLoad.Pump.FastPumpTimeout");
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_slowVentTimeout = SC.GetValue<int>("UnLoad.Vent.SlowVentTimeout");
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_pumpDelayTime = SC.GetValue<int>("UnLoad.Purge.PumpDelayTime");
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//PrepareTrasfer需要把压力调到VacuumBasePressure以下
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if (_targetPressure > _llVacPressure)
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{
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_targetPressure = _llVacPressure;
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}
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string reason;
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if (!UnLoadDevice.SetFastVentValve(false, out reason) || !UnLoadDevice.SetSlowVentValve(false, out reason))
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{
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EV.PostAlarmLog(Module, $"Can not turn off valves, {reason}");
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return Result.FAIL;
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}
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if (!UnLoadDevice.SetFastPumpValve(false, out reason) || !UnLoadDevice.SetSlowPumpValve(false, out reason))
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{
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EV.PostAlarmLog(Module, $"Can not turn off valves, {reason}");
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return Result.FAIL;
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}
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bool isAtmMode = SC.GetValue<bool>("System.IsATMMode");
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if (isAtmMode)
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{
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EV.PostInfoLog(Module, $"system in atm mode, {UnLoadDevice.Module} pump skipped");
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return Result.DONE;
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}
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if (!UnLoadDevice.CheckLidClose())
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{
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EV.PostAlarmLog(Module, $"Can not pump, door is open");
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return Result.FAIL;
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}
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if (!TMDevice.CheckSlitValveClose(ModuleHelper.Converter(UnLoadDevice.Module)))
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{
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EV.PostAlarmLog(Module, $"LoadLock Can not servo to pressure, slit valve is open");
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return Result.FAIL;
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}
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//if (Math.Abs(_targetPressure - UnLoadDevice.ChamberPressure) < _balancePressureDiff && UnLoadDevice.CheckVacuum())
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//{
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// return Result.DONE;
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//}
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//LockPump2(out reason);
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Notify("Start");
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return Result.RUN;
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}
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public override Result Monitor()
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{
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try
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{
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TimeDelay((int)RoutineStep.TimeDelay1, 1);
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SlowPump((int)RoutineStep.SlowPump, _pumpSwitchPressure, _slowPumpTimeout);
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FastPump((int)RoutineStep.FastPump, _pumpBasePressure, _fastPumpTimeout);
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TimeDelay((int)RoutineStep.TimeDelay2, _pumpDelayTime);
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CloseFastPumpValve((int)RoutineStep.CloseFastValve);
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CloseSlowPumpValve((int)RoutineStep.CloseSlowValve);
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// 模拟器运行时由于以上动作刷新DI不及时导致触发Interlock,增加一些延时
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//TODO IoValue类中检查相关DI状态。
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TimeDelay((int)RoutineStep.TimeDelay3, 2);
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SlowVent((int)RoutineStep.SlowVent, _targetPressure - 5, _slowVentTimeout);
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CloseVentValve((int)RoutineStep.CloseSlowVentValve);
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}
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catch (RoutineBreakException)
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{
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return Result.RUN;
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}
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catch (RoutineFaildException)
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{
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//UnlockPump2();
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return Result.FAIL;
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}
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//UnlockPump2();
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Notify("Finished");
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return Result.DONE;
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}
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public override void Abort()
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{
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base.Abort();
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}
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}
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}
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