changle.he
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  • Joined on 2023-03-29
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changle.he pushed to develop at Sic-Software/Sic10 2023-05-11 15:35:58 +08:00
38de9286c6 1.PM Interlock配置文件增加隔热罩当前位置和Down位置
changle.he pushed to develop at Sic-Software/Sic08 2023-05-11 15:32:14 +08:00
908b92fc62 1.PM Interlock配置文件增加隔热罩当前位置和Down位置
changle.he pushed tag Released to Sic-Software/Sic.Framework 2023-05-11 15:22:35 +08:00
changle.he pushed to develop at Sic-Software/Sic.Framework 2023-05-11 15:22:34 +08:00
deb0e6a2d5 [MECF.Framework.RT.EquipmentLibrary]
changle.he pushed to develop at Sic-Software/Sic10 2023-05-11 13:45:31 +08:00
9134522868 1.按照EFEM PM Routine优化PM Routine，防止飞片
changle.he pushed to develop at Sic-Software/Sic10 2023-05-11 13:25:00 +08:00
f440ad91e9 1.TM 取放Tray温度参数合并
changle.he pushed to develop at Sic-Software/Sic08 2023-05-05 11:44:11 +08:00
3b1a0b6930 1.从PM腔取放Tray时根据系统配置确定PSU和SCR打开或关闭
changle.he pushed to develop at Sic-Software/Sic.Framework 2023-05-05 11:24:35 +08:00
09b285b74e [MECF.Framework.RT.EquipmentLibrary]
changle.he pushed to master at Sic-Software/Sic01 2023-04-27 09:02:44 +08:00
5346e229a8 1.GasRingPurgeFlow与OpticPurgeFlow名称互换
changle.he pushed to develop at Sic-Software/Sic08 2023-04-26 13:20:12 +08:00
c3fc974380 1.IoConfinementRing输出信息修改
changle.he pushed to develop at Sic-Software/Sic.Framework 2023-04-26 13:17:43 +08:00
59c443ac9b 1.IoConfiementRing输出信息修改
changle.he pushed to develop at Sic-Software/Sic08 2023-04-26 11:28:20 +08:00
9d59aa3533 传盘压力参数一键设置
changle.he pushed to develop at Sic-Software/Sic06 2023-04-23 13:39:31 +08:00
a1cf17fcb5 1.修改TrayRobot取次数用完的Tray的条件
changle.he pushed to develop at Sic-Software/Sic08 2023-04-21 15:28:27 +08:00
c97ea52947 Test2
changle.he pushed to develop at Sic-Software/Sic08 2023-04-21 15:24:37 +08:00
40c5a695a5 Test
changle.he created branch feature/Test in Sic-Software/Sic08 2023-04-21 15:22:55 +08:00
changle.he pushed to feature/Test at Sic-Software/Sic08 2023-04-21 15:22:55 +08:00
40c5a695a5 Test